JPWO2017057277A1 - 撮像素子および撮像装置 - Google Patents

撮像素子および撮像装置 Download PDF

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Publication number
JPWO2017057277A1
JPWO2017057277A1 JP2017543259A JP2017543259A JPWO2017057277A1 JP WO2017057277 A1 JPWO2017057277 A1 JP WO2017057277A1 JP 2017543259 A JP2017543259 A JP 2017543259A JP 2017543259 A JP2017543259 A JP 2017543259A JP WO2017057277 A1 JPWO2017057277 A1 JP WO2017057277A1
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Prior art keywords
light
imaging device
region
unit
solid
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JP2017543259A
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English (en)
Japanese (ja)
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石田 知久
知久 石田
佳之 渡邉
佳之 渡邉
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Nikon Corp
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Nikon Corp
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Publication of JPWO2017057277A1 publication Critical patent/JPWO2017057277A1/ja
Priority to JP2020195228A priority Critical patent/JP7383597B2/ja
Pending legal-status Critical Current

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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/805Coatings
    • H10F39/8057Optical shielding
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10Integrated devices
    • H10F39/12Image sensors
    • H10F39/18Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10Integrated devices
    • H10F39/12Image sensors
    • H10F39/199Back-illuminated image sensors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/802Geometry or disposition of elements in pixels, e.g. address-lines or gate electrodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/803Pixels having integrated switching, control, storage or amplification elements
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/806Optical elements or arrangements associated with the image sensors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/806Optical elements or arrangements associated with the image sensors
    • H10F39/8063Microlenses
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/806Optical elements or arrangements associated with the image sensors
    • H10F39/8067Reflectors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/811Interconnections
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/40Optical elements or arrangements
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/803Pixels having integrated switching, control, storage or amplification elements
    • H10F39/8037Pixels having integrated switching, control, storage or amplification elements the integrated elements comprising a transistor

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  • Solid State Image Pick-Up Elements (AREA)
  • Light Receiving Elements (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
JP2017543259A 2015-09-30 2016-09-26 撮像素子および撮像装置 Pending JPWO2017057277A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2020195228A JP7383597B2 (ja) 2015-09-30 2020-11-25 撮像素子および撮像装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2015195347 2015-09-30
JP2015195347 2015-09-30
PCT/JP2016/078278 WO2017057277A1 (ja) 2015-09-30 2016-09-26 撮像素子および撮像装置

Related Child Applications (1)

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JP2020195228A Division JP7383597B2 (ja) 2015-09-30 2020-11-25 撮像素子および撮像装置

Publications (1)

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JPWO2017057277A1 true JPWO2017057277A1 (ja) 2018-07-26

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JP2017543259A Pending JPWO2017057277A1 (ja) 2015-09-30 2016-09-26 撮像素子および撮像装置
JP2020195228A Active JP7383597B2 (ja) 2015-09-30 2020-11-25 撮像素子および撮像装置
JP2022183147A Pending JP2023017991A (ja) 2015-09-30 2022-11-16 撮像素子

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JP2022183147A Pending JP2023017991A (ja) 2015-09-30 2022-11-16 撮像素子

Country Status (6)

Country Link
US (2) US20180294300A1 (https=)
EP (1) EP3358620B1 (https=)
JP (3) JPWO2017057277A1 (https=)
KR (4) KR102488709B1 (https=)
CN (2) CN115295569A (https=)
WO (1) WO2017057277A1 (https=)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11134209B2 (en) * 2016-01-22 2021-09-28 Sony Corporation Light receiving device, control method, and electronic apparatus
JP6700811B2 (ja) * 2016-01-26 2020-05-27 キヤノン株式会社 半導体装置および半導体装置の製造方法
JP2018060980A (ja) * 2016-10-07 2018-04-12 キヤノン株式会社 撮像表示装置及びウェアラブルデバイス
KR20260016606A (ko) * 2018-02-01 2026-02-03 소니 세미컨덕터 솔루션즈 가부시키가이샤 고체 촬상 장치 및 그 제조 방법, 및 전자 기기
CN109033913A (zh) * 2018-07-25 2018-12-18 维沃移动通信有限公司 一种识别码的识别方法及移动终端
JP7527204B2 (ja) * 2018-09-11 2024-08-02 ソニーセミコンダクタソリューションズ株式会社 固体撮像素子
KR102742350B1 (ko) * 2018-11-21 2024-12-16 소니 세미컨덕터 솔루션즈 가부시키가이샤 고체 촬상 소자
TWI900270B (zh) * 2019-06-26 2025-10-01 日商索尼半導體解決方案公司 光偵測裝置
CN112018140A (zh) * 2020-08-14 2020-12-01 清华大学 基于随机形状单元的微型光谱芯片
JP2022086611A (ja) * 2020-11-30 2022-06-09 ソニーセミコンダクタソリューションズ株式会社 固体撮像装置及びその製造方法
KR102913462B1 (ko) 2021-04-19 2026-01-15 삼성전자주식회사 이미지 센서
US12520606B2 (en) 2022-08-02 2026-01-06 Samsung Electronics Co., Ltd. Image sensor
CN120092510A (zh) * 2022-11-30 2025-06-03 索尼半导体解决方案公司 光学检测装置和电子设备

Citations (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004304105A (ja) * 2003-04-01 2004-10-28 Matsushita Electric Ind Co Ltd 固体撮像装置及びその製造方法
JP2005223084A (ja) * 2004-02-04 2005-08-18 Sony Corp 固体撮像装置
JP2005303081A (ja) * 2004-04-13 2005-10-27 Matsushita Electric Ind Co Ltd 光センサーおよび固体撮像装置
JP2006344754A (ja) * 2005-06-08 2006-12-21 Matsushita Electric Ind Co Ltd 固体撮像装置及びその製造方法
JP2008103368A (ja) * 2006-09-20 2008-05-01 Fujifilm Corp 裏面照射型撮像素子及びこれを備えた撮像装置及び裏面照射型撮像素子の製造方法
JP2010186818A (ja) * 2009-02-10 2010-08-26 Sony Corp 固体撮像装置とその製造方法、及び電子機器
JP2010212668A (ja) * 2009-03-10 2010-09-24 Internatl Business Mach Corp <Ibm> 遮光部を含む画素センサ・セルおよび製造方法
JP2011003860A (ja) * 2009-06-22 2011-01-06 Sony Corp 固体撮像装置とその製造方法、及び電子機器
WO2012026292A1 (ja) * 2010-08-24 2012-03-01 富士フイルム株式会社 固体撮像装置
JP2012156310A (ja) * 2011-01-26 2012-08-16 Sony Corp 固体撮像素子、固体撮像素子の製造方法、および電子機器
JP2013098446A (ja) * 2011-11-04 2013-05-20 Sony Corp 固体撮像素子、固体撮像素子の製造方法、及び、電子機器
WO2013118646A1 (ja) * 2012-02-10 2013-08-15 ソニー株式会社 撮像素子、製造装置および方法、並びに、撮像装置
WO2014120447A1 (en) * 2013-01-31 2014-08-07 Apple Inc. Vertically stacked image sensor
JP2015012126A (ja) * 2013-06-28 2015-01-19 ソニー株式会社 固体撮像素子および駆動方法、並びに電子機器
US20150035028A1 (en) * 2013-08-05 2015-02-05 Apple Inc. Image Sensor with Buried Light Shield and Vertical Gate
JP2015095468A (ja) * 2013-11-08 2015-05-18 ソニー株式会社 固体撮像素子および固体撮像素子の製造方法、並びに電子機器
JP2015149350A (ja) * 2014-02-05 2015-08-20 オリンパス株式会社 固体撮像装置および撮像装置
US20150256769A1 (en) * 2014-03-10 2015-09-10 Samsung Electronics Co., Ltd. Image sensor and method of manufacturing the same

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3799304A (en) 1972-10-30 1974-03-26 Twin Disc Inc Hydraulic control system for power transmission having a modulated friction clutch
JPS5547260U (https=) 1978-09-26 1980-03-27
JP2007201047A (ja) * 2006-01-25 2007-08-09 Matsushita Electric Ind Co Ltd 固体撮像装置およびその製造方法
JP2008060195A (ja) * 2006-08-30 2008-03-13 Nikon Corp 固体撮像装置およびその製造方法
US7781715B2 (en) * 2006-09-20 2010-08-24 Fujifilm Corporation Backside illuminated imaging device, semiconductor substrate, imaging apparatus and method for manufacturing backside illuminated imaging device
JP5568880B2 (ja) * 2008-04-03 2014-08-13 ソニー株式会社 固体撮像装置、固体撮像装置の駆動方法および電子機器
KR101776955B1 (ko) * 2009-02-10 2017-09-08 소니 주식회사 고체 촬상 장치와 그 제조 방법, 및 전자 기기
JP5810551B2 (ja) * 2011-02-25 2015-11-11 ソニー株式会社 固体撮像装置、および、その製造方法、電子機器
JP6299058B2 (ja) * 2011-03-02 2018-03-28 ソニー株式会社 固体撮像装置、固体撮像装置の製造方法及び電子機器
JP5794068B2 (ja) * 2011-09-16 2015-10-14 ソニー株式会社 固体撮像素子および製造方法、並びに電子機器
JP6065448B2 (ja) * 2012-08-03 2017-01-25 ソニー株式会社 固体撮像装置、固体撮像装置の製造方法及び電子機器
JP5547260B2 (ja) 2012-10-22 2014-07-09 株式会社東芝 固体撮像装置
JP2014096490A (ja) * 2012-11-09 2014-05-22 Sony Corp 撮像素子、製造方法
US9305952B2 (en) * 2013-08-27 2016-04-05 Semiconductor Components Industries, Llc Image sensors with inter-pixel light blocking structures
JP2015065270A (ja) * 2013-09-25 2015-04-09 ソニー株式会社 固体撮像装置およびその製造方法、並びに電子機器
KR102363433B1 (ko) * 2015-01-15 2022-02-16 삼성전자주식회사 이미지 센서
CN108040502A (zh) * 2015-09-30 2018-05-15 株式会社尼康 摄像元件及摄像装置

Patent Citations (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004304105A (ja) * 2003-04-01 2004-10-28 Matsushita Electric Ind Co Ltd 固体撮像装置及びその製造方法
JP2005223084A (ja) * 2004-02-04 2005-08-18 Sony Corp 固体撮像装置
JP2005303081A (ja) * 2004-04-13 2005-10-27 Matsushita Electric Ind Co Ltd 光センサーおよび固体撮像装置
JP2006344754A (ja) * 2005-06-08 2006-12-21 Matsushita Electric Ind Co Ltd 固体撮像装置及びその製造方法
JP2008103368A (ja) * 2006-09-20 2008-05-01 Fujifilm Corp 裏面照射型撮像素子及びこれを備えた撮像装置及び裏面照射型撮像素子の製造方法
JP2010186818A (ja) * 2009-02-10 2010-08-26 Sony Corp 固体撮像装置とその製造方法、及び電子機器
JP2010212668A (ja) * 2009-03-10 2010-09-24 Internatl Business Mach Corp <Ibm> 遮光部を含む画素センサ・セルおよび製造方法
JP2011003860A (ja) * 2009-06-22 2011-01-06 Sony Corp 固体撮像装置とその製造方法、及び電子機器
WO2012026292A1 (ja) * 2010-08-24 2012-03-01 富士フイルム株式会社 固体撮像装置
JP2012156310A (ja) * 2011-01-26 2012-08-16 Sony Corp 固体撮像素子、固体撮像素子の製造方法、および電子機器
JP2013098446A (ja) * 2011-11-04 2013-05-20 Sony Corp 固体撮像素子、固体撮像素子の製造方法、及び、電子機器
WO2013118646A1 (ja) * 2012-02-10 2013-08-15 ソニー株式会社 撮像素子、製造装置および方法、並びに、撮像装置
WO2014120447A1 (en) * 2013-01-31 2014-08-07 Apple Inc. Vertically stacked image sensor
JP2015012126A (ja) * 2013-06-28 2015-01-19 ソニー株式会社 固体撮像素子および駆動方法、並びに電子機器
US20150035028A1 (en) * 2013-08-05 2015-02-05 Apple Inc. Image Sensor with Buried Light Shield and Vertical Gate
JP2015095468A (ja) * 2013-11-08 2015-05-18 ソニー株式会社 固体撮像素子および固体撮像素子の製造方法、並びに電子機器
JP2015149350A (ja) * 2014-02-05 2015-08-20 オリンパス株式会社 固体撮像装置および撮像装置
US20150256769A1 (en) * 2014-03-10 2015-09-10 Samsung Electronics Co., Ltd. Image sensor and method of manufacturing the same

Also Published As

Publication number Publication date
EP3358620A1 (en) 2018-08-08
US20180294300A1 (en) 2018-10-11
CN115295569A (zh) 2022-11-04
EP3358620B1 (en) 2025-08-20
US20220085220A1 (en) 2022-03-17
EP3358620A4 (en) 2019-04-24
CN108174619B (zh) 2022-09-20
WO2017057277A1 (ja) 2017-04-06
KR20200145850A (ko) 2020-12-30
CN108174619A (zh) 2018-06-15
JP2021044572A (ja) 2021-03-18
KR20230009533A (ko) 2023-01-17
KR102488709B1 (ko) 2023-01-13
JP2023017991A (ja) 2023-02-07
KR20180048900A (ko) 2018-05-10
KR102623653B1 (ko) 2024-01-10
KR20240010528A (ko) 2024-01-23
JP7383597B2 (ja) 2023-11-20

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