JPWO2017017886A1 - 光電極及びその製造方法、並びに光電気化学セル - Google Patents
光電極及びその製造方法、並びに光電気化学セル Download PDFInfo
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- 239000000758 substrate Substances 0.000 claims abstract description 48
- 229910052751 metal Inorganic materials 0.000 claims abstract description 41
- 150000004767 nitrides Chemical class 0.000 claims abstract description 33
- 239000002184 metal Substances 0.000 claims abstract description 31
- 229910052733 gallium Inorganic materials 0.000 claims abstract description 12
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 11
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 40
- 229910020055 NbON Inorganic materials 0.000 claims description 38
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 27
- 229910021529 ammonia Inorganic materials 0.000 claims description 20
- 229910003071 TaON Inorganic materials 0.000 claims description 17
- 239000008151 electrolyte solution Substances 0.000 claims description 14
- 239000010408 film Substances 0.000 description 295
- 239000010955 niobium Substances 0.000 description 39
- 230000015572 biosynthetic process Effects 0.000 description 27
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 19
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 19
- 239000001257 hydrogen Substances 0.000 description 19
- 229910052739 hydrogen Inorganic materials 0.000 description 19
- 239000001301 oxygen Substances 0.000 description 19
- 229910052760 oxygen Inorganic materials 0.000 description 19
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 15
- 239000007789 gas Substances 0.000 description 13
- 229910052594 sapphire Inorganic materials 0.000 description 13
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- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 229910010413 TiO 2 Inorganic materials 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 238000002371 ultraviolet--visible spectrum Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 2
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- 238000010586 diagram Methods 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
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- RDTGIHRWTHTOCP-UHFFFAOYSA-N ethyl(methyl)azanide;niobium(3+) Chemical compound [Nb+3].CC[N-]C.CC[N-]C.CC[N-]C RDTGIHRWTHTOCP-UHFFFAOYSA-N 0.000 description 2
- 125000001183 hydrocarbyl group Chemical group 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 150000002822 niobium compounds Chemical class 0.000 description 2
- 238000002233 thin-film X-ray diffraction Methods 0.000 description 2
- MHMBUJVKUFAYFM-UHFFFAOYSA-N C(C)N(C)[Ta] Chemical compound C(C)N(C)[Ta] MHMBUJVKUFAYFM-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
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- 239000007864 aqueous solution Substances 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
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- 229910052734 helium Inorganic materials 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical group 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
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- 230000001681 protective effect Effects 0.000 description 1
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- 229910052709 silver Inorganic materials 0.000 description 1
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- 238000005477 sputtering target Methods 0.000 description 1
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- 229910052715 tantalum Inorganic materials 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
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Abstract
Description
基板と、
前記基板上に設けられた、Znの一部がGa及びAlの少なくともいずれか1種の元素で置換されているZnO導電膜と、
前記ZnO導電膜に対して前記基板と反対側に設けられた、4A族、5A族、6A族及び3B族の金属元素から選ばれる少なくともいずれか1種の金属元素の窒化物又は酸窒化物の半導体膜と、
を含む、光電極を提供する。
基板上に、Znの一部がGa及びAlの少なくともいずれか1種の元素で置換されているZnO導電膜を作製し、
前記ZnO導電膜に対して前記基板とは反対側に、4A族、5A族、6A族及び3B族の金属元素から選ばれる少なくともいずれか1種の金属元素の窒化物又は酸窒化物の半導体膜を、アンモニアを用いて作製する、
光電極の製造方法を提供する。
4e-+4H+→2H2↑ …(2)
Znの1原子%、2原子%、3原子%、4原子%、5原子%、6原子%、7原子%及び8原子%がGaに置換されたZnOターゲットをそれぞれ準備した。なお、以下、特に言及しない限り、「原子%」を単に「%」と表記する。スパッタ装置を用いて、300℃に加熱したR面が露出しているサファイア基板(2インチ角)上に、流量3.38×10-3Pa・m3/s(20sccm)のArガスフロー雰囲気下で、準備した各ZnOターゲットを用いたスパッタリングにより、Znの1%、2%、3%、4%、5%、6%、7%及び8%がGaに置換されたGZO膜をそれぞれ成膜した。得られたGZO膜のシート抵抗を図3に示す。図3に示されたNbON成膜前のシート抵抗からわかるように、Znの2〜6%がGaに置換されたGZO膜は、シート抵抗が30Ω/□以下であった。また、GZO膜の薄膜XRDスペクトルを図4に示す。図4に示すように、Znの4%以下がGaに置換されたGZO膜において、A面配向のみのエピタキシャル膜が成膜されていることがわかる。
導電膜として、GZO膜に代えて、ATO膜(アンチモンドープ酸化錫膜)を成膜した点を除いて、実施例1と同じ方法で比較例1の光電極を作製した。なお、ATO膜の成膜条件は、実施例1のGZO膜の場合と同じであった。
実施例1の光電極のGZO膜とNbON膜との間にZnO膜を設けたこと以外、実施例1と同じ方法で実施例2の光電極を作製した。すなわち、まず、実施例1と同様に、スパッタ装置を用いて、300℃に加熱したR面が露出しているサファイア基板(2インチ角)上に、流量3.38×10-3Pa・m3/s(20sccm)のArガスフロー雰囲気下で、準備した各ZnOターゲットを用いたスパッタリングにより、Znの1%、2%、3%、4%、5%、6%、7%及び8%がGaに置換されたGZO膜をそれぞれ成膜した。次に、各GZO膜上に、ZnがGaに置換していないZnOターゲットを用いたスパッタリングにより、ZnO半導体膜を厚さ50nmで設けた。次に、ZnO半導体膜上に実施例1と同様の方法でNbON膜を作製して、実施例2の光電極を得た。
実施例1のMOCVD成膜において、アンモニア(1.69×10-3Pa・m3/s(10sccm))と水蒸気(1.69×10-5Pa・m3/s(0.1sccm))とを混合したガスを基板に噴射することに代わり、アンモニア(1.69×10-3Pa・m3/s(10sccm))のみを噴射することで、NbON膜に代わりNb3N5膜を成膜した。これにより、サファイア基板上にGZO膜が設けられ、そのGZO膜上にNb3N5膜が設けられた実施例3の光電極が作製された。
実施例3の光電極のGZO膜とNb3N5膜との間にZnO膜を設けたこと以外、実施例3と同じ方法で実施例4の光電極を作製した。すなわち、まず、実施例3と同様に、スパッタ装置を用いて、300℃に加熱したR面が露出しているサファイア基板(2インチ角)上に、流量3.38×10-3Pa・m3/s(20sccm)のArガスフロー雰囲気下で、準備した各ZnOターゲットを用いたスパッタリングにより、Znの1%、2%、3%、4%、5%、6%、7%及び8%がGaに置換されたGZO膜をそれぞれ成膜した。次に、各GZO膜上に、ZnがGaに置換していないZnOターゲットを用いたスパッタリングにより、ZnO半導体膜を厚さ50nmで設けた。次に、ZnO半導体膜上に実施例3と同様の方法でNb3N5膜を作製して、実施例4の光電極を得た。
実施例1のMOCVD成膜で使用したTertiary-butylimino tris-(ethylmethylamino)niobium((CH3)3CN=Nb(N(C2H5)CH3)3)に代えて、Tertiary-butylimino tris-(ethylmethylamino)tantalum((CH3)3CN=Ta(N(C2H5)CH3)3))を使用した以外は、実施例1と同様の方法で光電極を作製した。すなわち、実施例5の光電極は、実施例1の光電極においてNbON膜の代わりにTaON膜が設けられた光電極であった。図14は、実施例5の光電極におけるTaON膜の表面から10nm深さのXPSスペクトルを示す。また、実施例5の光電極におけるTaON膜の表面からのAESスペクトルにより、TaON膜の膜組成はほぼTa/O/N=1/1/1になっており、TaONの生成が確認できた。また、実施例5の光電極について、GZO膜が露出した部分(電極取り出し部)のシート抵抗値が図15に示されている(図15中の、「TaON成膜後」の結果)。TaON膜の成膜前と成膜後とでシート抵抗値がほとんど変化しておらず、TaON膜の成膜によってGZO膜が変化していないことがわかる。
実施例5のMOCVD成膜において、アンモニア(1.69×10-3Pa・m3/s(10sccm))と水蒸気(1.69×10-5Pa・m3/s(0.1sccm))とを混合したガスを基板に噴射することに代わり、アンモニア(1.69×10-3Pa・m3/s(10sccm))のみを噴射することで、TaON膜に代わりTa3N5膜を成膜した。これにより、サファイア基板上にGZO膜が設けられ、そのGZO膜上にTa3N5膜が設けられた実施例6の光電極が作製された。
Claims (13)
- 基板と、
前記基板上に設けられた、Znの一部がGa及びAlの少なくともいずれか1種の元素で置換されているZnO導電膜と、
前記ZnO導電膜に対して前記基板と反対側に設けられた、4A族、5A族、6A族及び3B族の金属元素から選ばれる少なくともいずれか1種の金属元素の窒化物又は酸窒化物の半導体膜と、
を含む、光電極。 - 前記ZnO導電膜において、Zn原子とGa原子とAl原子との合計に対する、Ga原子とAl原子との合計の割合を原子百分率で表した場合、前記割合が2原子%以上6原子%以下である、
請求項1に記載の光電極。 - 前記ZnO導電膜において、Zn原子とGa原子とAl原子との合計に対する、Ga原子とAl原子との合計の割合を原子百分率で表した場合、前記割合が2原子%以上4原子%以下である、
請求項2に記載の光電極。 - 前記ZnO導電膜がエピタキシャル膜である、
請求項1〜3のいずれか1項に記載の光電極。 - 前記ZnO導電膜と前記半導体膜との間に配置されたZnO半導体膜をさらに含む、
請求項1〜4のいずれか1項に記載の光電極。 - 前記ZnO半導体膜がエピタキシャル膜である、
請求項5に記載の光電極。 - 前記ZnO導電膜の一部が、前記半導体膜に覆われることなく露出している、
請求項1〜6のいずれか1項に記載の光電極。 - 前記半導体膜が、Nb窒化物、Ta窒化物、Nb酸窒化物及びTa酸窒化物から選ばれる少なくともいずれか1種の半導体膜である、
請求項1〜7のいずれか1項に記載の光電極。 - 前記半導体膜が、Nb3N5及びTa3N5から選ばれる少なくともいずれか1種の窒化物の半導体膜である、
請求項8に記載の光電極。 - 前記半導体膜が、NbON及びTaONから選ばれる少なくともいずれか1種の酸窒化物の半導体膜である、
請求項8に記載の光電極。 - 請求項1〜10のいずれか1項に記載の光電極と、
前記光電極のZnO導電膜と電気的に接続された対極と、
前記光電極および前記対極を収容する容器と、
を備えた光電気化学セル。 - 前記容器内に収容され、かつ前記光電極および前記対極の表面と接触する、水を含む電解液をさらに備えた、請求項11に記載の光電気化学セル。
- 基板上に、Znの一部がGa及びAlの少なくともいずれか1種の元素で置換されているZnO導電膜を作製し、
前記ZnO導電膜に対して前記基板とは反対側に、4A族、5A族、6A族及び3B族の金属元素から選ばれる少なくともいずれか1種の金属元素の窒化物又は酸窒化物の半導体膜を、アンモニアを用いて作製する、
光電極の製造方法。
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