JPWO2017017858A1 - SiC基板の製造方法 - Google Patents
SiC基板の製造方法 Download PDFInfo
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- JPWO2017017858A1 JPWO2017017858A1 JP2017530979A JP2017530979A JPWO2017017858A1 JP WO2017017858 A1 JPWO2017017858 A1 JP WO2017017858A1 JP 2017530979 A JP2017530979 A JP 2017530979A JP 2017530979 A JP2017530979 A JP 2017530979A JP WO2017017858 A1 JPWO2017017858 A1 JP WO2017017858A1
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- 239000000758 substrate Substances 0.000 title claims abstract description 137
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 24
- 238000000034 method Methods 0.000 title claims description 17
- YZCKVEUIGOORGS-UHFFFAOYSA-N Hydrogen atom Chemical compound [H] YZCKVEUIGOORGS-UHFFFAOYSA-N 0.000 claims abstract description 34
- 238000005530 etching Methods 0.000 claims abstract description 11
- 230000001678 irradiating effect Effects 0.000 claims abstract description 6
- 239000007789 gas Substances 0.000 claims description 16
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 15
- 239000013078 crystal Substances 0.000 claims description 8
- 229910052739 hydrogen Inorganic materials 0.000 claims description 6
- 239000001257 hydrogen Substances 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 description 16
- 230000000052 comparative effect Effects 0.000 description 8
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 7
- 229910052721 tungsten Inorganic materials 0.000 description 7
- 239000010937 tungsten Substances 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 125000004432 carbon atom Chemical group C* 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000010494 dissociation reaction Methods 0.000 description 3
- 230000005593 dissociations Effects 0.000 description 3
- 238000000137 annealing Methods 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000003795 desorption Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 238000004093 laser heating Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/0445—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising crystalline silicon carbide
- H01L21/0475—Changing the shape of the semiconductor body, e.g. forming recesses
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic System
- H01L29/1608—Silicon carbide
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/268—Bombardment with radiation with high-energy radiation using electromagnetic radiation, e.g. laser radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/04—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their crystalline structure, e.g. polycrystalline, cubic or particular orientation of crystalline planes
- H01L29/045—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their crystalline structure, e.g. polycrystalline, cubic or particular orientation of crystalline planes by their particular orientation of crystalline planes
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
- C30B33/02—Heat treatment
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
- C30B33/08—Etching
- C30B33/12—Etching in gas atmosphere or plasma
Abstract
Description
[非特許文献1]Hiroshi Nakagawa, Satoru Tanaka, and Ikuo Suemue, "Self−Ordering of Nanofacets on Vicinal SiC Surfaces"、 2003年11月26日、PHISICAL REVIEW LETTERS 91,226107.
表1に、SiC基板200の表面を処理した各実施例および各比較例の製造条件と、基板表面にナノファセットが形成されるか否かの結果を示す。各実施例は、図1から図3において説明した方法で作製したサンプルである。各実施例における材料、材料等の使用量、材料等の割合、処理内容、処理手順、要素または結晶面等の向き等は、本発明の趣旨を逸脱しない範囲で、適宜変更することができる。従って、本発明の範囲は以下の実施例に限定されない。
Claims (7)
- 表面を平坦化したSiC基板を製造する製造方法であって、
オフ角を有するSiC基板を加熱した状態で、前記SiC基板の表面に原子状水素を照射して、前記SiC基板の表面をエッチングする段階を備える製造方法。 - 前記エッチングする段階において、前記SiC基板を800℃以上且つ1200℃以下の範囲で加熱する
請求項1に記載の製造方法。 - 前記SiC基板のオフ角が、1°以上且つ8°以下である
請求項1または2に記載の製造方法。 - 前記SiC基板のオフ方向が、[11−20]または[1−100]方向である
請求項1から3のいずれか一項に記載の製造方法。 - 前記SiC基板の多形が4Hまたは6Hである
請求項1から4のいずれか一項に記載の製造方法。 - 前記SiC基板の前記表面の結晶面が(0001)または(000−1)である
請求項1から5のいずれか一項に記載の製造方法。 - 前記SiC基板が載置された処理室に連結されたガス供給セルにおいて、水素を含む原料ガスから前記原子状水素を生成する段階を更に備える
請求項1から6のいずれか一項に記載の製造方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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PCT/JP2015/071723 WO2017017858A1 (ja) | 2015-07-30 | 2015-07-30 | SiC基板の製造方法 |
Publications (2)
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JPWO2017017858A1 true JPWO2017017858A1 (ja) | 2018-01-18 |
JP6447732B2 JP6447732B2 (ja) | 2019-01-09 |
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JP2017530979A Active JP6447732B2 (ja) | 2015-07-30 | 2015-07-30 | SiC基板の製造方法 |
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US (1) | US10297450B2 (ja) |
JP (1) | JP6447732B2 (ja) |
CN (1) | CN107431005B (ja) |
DE (1) | DE112015006240T5 (ja) |
WO (1) | WO2017017858A1 (ja) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003234301A (ja) * | 2001-10-25 | 2003-08-22 | Matsushita Electric Ind Co Ltd | 半導体基板、半導体素子及びその製造方法 |
JP2005317670A (ja) * | 2004-04-27 | 2005-11-10 | Japan Science & Technology Agency | (100)配向した立方晶炭化珪素結晶膜の作製方法 |
JP2008205296A (ja) * | 2007-02-21 | 2008-09-04 | Matsushita Electric Ind Co Ltd | 炭化珪素半導体素子及びその製造方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001332508A (ja) * | 2000-05-23 | 2001-11-30 | Matsushita Electric Ind Co Ltd | 半導体素子の製造方法 |
EP1306890A2 (en) * | 2001-10-25 | 2003-05-02 | Matsushita Electric Industrial Co., Ltd. | Semiconductor substrate and device comprising SiC and method for fabricating the same |
JP4887418B2 (ja) * | 2009-12-14 | 2012-02-29 | 昭和電工株式会社 | SiCエピタキシャルウェハの製造方法 |
WO2012067112A1 (ja) | 2010-11-17 | 2012-05-24 | 新日本製鐵株式会社 | エピタキシャル炭化珪素単結晶基板の製造方法 |
CN102534808B (zh) * | 2010-12-14 | 2014-11-05 | 北京天科合达蓝光半导体有限公司 | 高质量碳化硅表面的获得方法 |
JP5786759B2 (ja) * | 2012-02-21 | 2015-09-30 | 新日鐵住金株式会社 | エピタキシャル炭化珪素ウエハの製造方法 |
JP6112712B2 (ja) * | 2013-03-27 | 2017-04-12 | 国立研究開発法人産業技術総合研究所 | 炭化珪素エピタキシャルウエハの製造方法 |
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2015
- 2015-07-30 WO PCT/JP2015/071723 patent/WO2017017858A1/ja active Application Filing
- 2015-07-30 DE DE112015006240.8T patent/DE112015006240T5/de active Pending
- 2015-07-30 JP JP2017530979A patent/JP6447732B2/ja active Active
- 2015-07-30 CN CN201580078145.6A patent/CN107431005B/zh active Active
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2017
- 2017-09-19 US US15/709,411 patent/US10297450B2/en active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2003234301A (ja) * | 2001-10-25 | 2003-08-22 | Matsushita Electric Ind Co Ltd | 半導体基板、半導体素子及びその製造方法 |
JP2005317670A (ja) * | 2004-04-27 | 2005-11-10 | Japan Science & Technology Agency | (100)配向した立方晶炭化珪素結晶膜の作製方法 |
JP2008205296A (ja) * | 2007-02-21 | 2008-09-04 | Matsushita Electric Ind Co Ltd | 炭化珪素半導体素子及びその製造方法 |
Also Published As
Publication number | Publication date |
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CN107431005B (zh) | 2020-11-13 |
WO2017017858A1 (ja) | 2017-02-02 |
JP6447732B2 (ja) | 2019-01-09 |
US10297450B2 (en) | 2019-05-21 |
US20180005828A1 (en) | 2018-01-04 |
DE112015006240T5 (de) | 2017-11-09 |
CN107431005A (zh) | 2017-12-01 |
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