JPWO2014092021A1 - 窒化珪素焼結体およびそれを用いた摺動部材 - Google Patents
窒化珪素焼結体およびそれを用いた摺動部材 Download PDFInfo
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Abstract
Description
(I29.6°+I31.0°)/(I33.6°+I36.1°)=0.10〜0.30 …(1)
を満たし、上記窒化珪素焼結体の任意の断面における単位面積100μm×100μm当りの粒界相の面積比が25〜40%であり、マシナブル係数が0.100〜0.120であることを特徴とする窒化珪素焼結体が得られる。
(I39.5°)/(I33.6°+I36.1°)=0.03〜0.10 …(2)
を満たすことが好ましい。また、窒化珪素焼結体をXRD分析した際に、Y2Si3O12N(H相)、YSiO2N(K相)またはY2Si3O3N4のいずれか1種以上に対応する31.9±0.3°に検出される最強ピーク強度I31.9°が、下記関係式:
(I31.9°)/(I33.6°+I36.1°)=0.05〜0.15 …(3)
を満たすことが好ましい。また、XRD分析は窒化珪素焼結体の任意の断面で行うことが好ましい。
第一の実施形態は、窒化珪素焼結体をXRD分析した際に、六方晶系α−SiAlON結晶に対応する29.6±0.3°および31.0±0.3°に検出される最強ピーク強度をI29.6°、I31.0°とする一方、β−Si3N4結晶に対応する33.6±0.3°、36.1±0.3°に検出される最強ピーク強度をI33.6°、I36.1°としたときに、各最強ピーク強度が関係式:
(I29.6°+I31.0°)/(I33.6°+I36.1°)=0.10〜0.30 …(1)
を満たし、上記窒化珪素焼結体の任意の断面における単位面積100μm×100μm当りの粒界相の面積比が25〜40%であり、マシナブル係数が0.100〜0.120であることを特徴とする窒化珪素焼結体である。
式(4)において、Fnは押込み荷重であり、ここでは20kgfとする。20kgfの押込み荷重Fnは、窒化珪素焼結体の硬度や靭性を測定する上で好適な値である。ビッカース硬度(Hv)は、JIS−R−1610に準じて測定するものとする。破壊靭性値(K1C)は、JIS−R−1607の圧子圧入法(IF法)に準じて測定するものとする。破壊靭性値の計算には、新原の式を用いるものとする。後述するベアリングボールについては、その断面を使用して測定するものとする。
パラメータSc.mが大きいと摩耗が大きく、パラメータSc.mが小さいと摩耗が小さいことを意味する。材料の結晶粒径dを小さくすることや破壊靭性値K1cを大きくすることで、摩耗を抑えることが可能であることが分かる。
第二の実施形態は、第一の実施形態の窒化珪素焼結体を用いた摺動部材である。摺動部材としては、ベアリングボール、ローラ、チェックボール、ウエアパッド、プランジャー、コロなどが挙げられる。これら摺動部材は、金属部材やセラミックスなどからなる相手部材と摺動する。摺動面の耐久性を上げるためには、表面粗さ(Ra)が0.5μm以下、さらには0.1μm以下、より好ましくは0.05μm以下に研磨加工した研磨面とすることが好ましい。摺動面を平坦にすることにより、窒化珪素焼結体の耐久性を向上させると共に相手部材への攻撃性を低下させることができる。相手部材への攻撃性を低下させることにより、相手部材の消耗を低減できるので摺動部材を組み込んだ装置の耐久性を向上させることができる。
次に製造方法について説明する。第一の実施形態の窒化珪素焼結体は上記構成を有すれば特に製造方法は限定されるものではないが効率的に得るための方法として次のものが挙げられる。
せん断速度a,bの値には特に決まりはないが、TI値が1以上の値をとるように設定するのがよい。TI値が1に近づくほど、ニュートン流体の挙動に近くなり、凝集のない、あるいは凝集の極めて弱い高分散のスラリーであることを示唆する。本件ではa=6(1/s)、b=60(1/s)としたときのTI値が1.0〜2.0の値をとるように調整した。なお、sは秒を示す。このような混合方式を用いることにより、焼結時の六方晶α-SiAlON結晶の均一な粒成長を効果的に行うことが可能となる。
(実施例1〜13および比較例1〜2)
窒化珪素粉末として、酸素含有量が1.2質量%であり、平均粒径が0.7μmであり、α−Si3N4の割合が99質量%のものを用意した。次に、焼結助剤として表1に示すものを用意した。なお、焼結助剤粉末は、いずれも平均粒径1.3μm以下のものを使用した。
実施例1〜13および比較例1〜2と同様の製造方法を用いて摺動部材であるベアリングボールを作製した。ベアリングボールの直径は9.525mm、表面粗さ(Ra)は0.01μmになるように研磨した。
Claims (12)
- 窒化珪素焼結体をXRD分析した際に、六方晶系α−SiAlON結晶に対応する29.6±0.3°および31.0±0.3°に検出される最強ピーク強度をI29.6°、I31.0°とする一方、β−Si3N4結晶に対応する33.6±0.3°、36.1±0.3°に検出される最強ピーク強度をI33.6°、I36.1°としたときに、各最強ピーク強度が下記関係式:
I29.6°+I31.0°)/(I33.6°+I36.1°)=0.10〜0.30 …(1)
を満たし、
上記窒化珪素焼結体の任意の断面における単位面積100μm×100μm当りの粒界相の面積比が25〜40%であり、マシナブル係数が0.100〜0.120であることを特徴とする窒化珪素焼結体。 - 窒化珪素焼結体をXRD分析した際に、Y4Si2O7N2(J相)に対応する39.5±0.3°に検出される最強ピーク強度I39.5°が、下記関係式:
(I39.5°)/(I33.6°+I36.1°)=0.03〜0.10 …(2)
を満たすことを特徴とする請求項1記載の窒化珪素焼結体。 - 窒化珪素焼結体をXRD分析した際に、Y2Si3O12N(H相)、YSiO2N(K相)またはY2Si3O3N4のいずれか1種以上に対応する31.9±0.3°に検出される最強ピーク強度I31.9°が、下記関係式:
(I31.9°)/(I33.6°+I36.1°)=0.05〜0.15 …(3)
を満たすことを特徴とする請求項1ないし請求項2のいずれか1項に記載の窒化珪素焼結体。 - XRD分析は窒化珪素焼結体の任意の断面にて行うことを特徴とする請求項1ないし請求項3のいずれか1項に記載の窒化珪素焼結体。
- Hf−Y−O系化合物結晶とY−Al−Oとを含有する非晶質相を含む粒界相を具備することを特徴とする請求項1ないし請求項4のいずれか1項に記載の窒化珪素焼結体。
- 平均粒径2μm以下の酸化物、炭化物、窒化物のいずれか1種以上の粒子を具備することを特徴とする請求項1ないし請求項5のいずれか1項に記載の窒化珪素焼結体。
- 前記粒子がモリブデン化合物粒子であることを特徴とする請求項6記載の窒化珪素焼結体。
- Alを酸化物換算値で5〜10質量%、希土類元素のいずれか1種類以上を酸化物換算値で1〜10質量%、4A、5A、6A元素のいずれか1種類以上を酸化物換算値で1〜5質量%含有し、かつ、Alと希土類元素とのmol比がAl(mol):希土類元素(mol)=1:1〜8:1であることを特徴とする請求項1ないし請求項7のいずれか1項に記載の窒化珪素焼結体。
- ビッカース硬度(Hv)が1500以上であり、破壊靭性値(K1C)が6.0MPa・m1/2以上であり、かつ、3点曲げ強度が900MPa以上であることを特徴とする請求項1ないし請求項8のいずれか1項に記載の窒化珪素焼結体。
- 請求項1ないし請求項9のいずれか1項に記載の窒化珪素焼結体を用いたことを特徴とする摺動部材。
- 摺動部材がベアリングボールであることを特徴とする請求項10記載の摺動部材。
- 摺動面は表面粗さ(Ra)が0.5μm以下の研磨面であることを特徴とする請求項10ないし請求項11のいずれか1項に記載の摺動部材。
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