JPWO2013168206A1 - 冷凍機、冷却トラップ - Google Patents
冷凍機、冷却トラップ Download PDFInfo
- Publication number
- JPWO2013168206A1 JPWO2013168206A1 JP2014514238A JP2014514238A JPWO2013168206A1 JP WO2013168206 A1 JPWO2013168206 A1 JP WO2013168206A1 JP 2014514238 A JP2014514238 A JP 2014514238A JP 2014514238 A JP2014514238 A JP 2014514238A JP WO2013168206 A1 JPWO2013168206 A1 JP WO2013168206A1
- Authority
- JP
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- Prior art keywords
- refrigerator
- vibration
- piston
- housing
- frequency
- Prior art date
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Links
- 238000001816 cooling Methods 0.000 title claims abstract description 60
- 238000005259 measurement Methods 0.000 claims description 3
- 239000006096 absorbing agent Substances 0.000 abstract description 28
- 238000010521 absorption reaction Methods 0.000 abstract description 11
- 230000005855 radiation Effects 0.000 abstract description 3
- 239000007789 gas Substances 0.000 description 23
- 230000008859 change Effects 0.000 description 14
- 238000012546 transfer Methods 0.000 description 12
- 238000000034 method Methods 0.000 description 9
- 230000008569 process Effects 0.000 description 6
- 238000012545 processing Methods 0.000 description 6
- 230000006835 compression Effects 0.000 description 5
- 238000007906 compression Methods 0.000 description 5
- 230000001172 regenerating effect Effects 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000003507 refrigerant Substances 0.000 description 3
- 230000001133 acceleration Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000017525 heat dissipation Effects 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000005057 refrigeration Methods 0.000 description 2
- 230000002441 reversible effect Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- -1 for example Substances 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000005338 heat storage Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D8/00—Cold traps; Cold baffles
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
- F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2500/00—Problems to be solved
- F25B2500/13—Vibrations
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2600/00—Control issues
- F25B2600/02—Compressor control
- F25B2600/025—Compressor control by controlling speed
- F25B2600/0253—Compressor control by controlling speed with variable speed
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
- Y02B30/70—Efficient control or regulation technologies, e.g. for control of refrigerant flow, motor or heating
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Thermal Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Vibration Prevention Devices (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Devices That Are Associated With Refrigeration Equipment (AREA)
Abstract
Description
本実施形態では、冷凍機駆動周波数75.00Hz(設定周波数)のときに振動が最も小さくなるように初期設定された冷凍機が、真空容器3へ取付けられた影響で、駆動周波数74.95±0.01Hzで冷凍機の振動が最小なるように変化した場合について説明する。
3 真空容器
5 真空排気装置
7 ターボ分子ポンプ(TMP)
10 冷却トラップ
12 トラップ容器
14 冷凍機
18 冷却パネル
21 シリンダ
22 筐体
23 冷却ステージ
24 吸熱部
25 放熱部
27 伝熱部材
31 駆動ピストン
32 リニアモータ
35 フリーピストン
36 位相調整ばね
37 熱交換器
41 振動センサー
43 制御ユニット
45 動吸振器
47 演算器
48 インバーター
49 バンドパスフィルター
51 ばね
52 振動体(錘)
55 フランジ
56 放熱体
Claims (6)
- 筐体と、
作動ガスを圧縮、膨張させるべく前記筐体内において往復運動可能なピストンと、
前記ピストンが駆動されたときの前記筐体の振動を低減する振動低減手段と、
前記筐体が真空装置に接続された状態で、前記ピストンが駆動されたときの前記筐体の振動を低減するために前記ピストンの駆動周波数を調整する駆動周波数調整手段と、を備えることを特徴とする冷凍機。 - 前記筐体の振動を測定する測定手段を備えることを特徴とする請求項1に記載の冷凍機。
- 前記振動低減手段は、一端が前記筐体に接続され、他端が錘に接続された弾性部材を備えて構成され、
前記駆動周波数調整手段は、前記筐体の振動が最小になる前記ピストンの駆動周波数を、駆動周波数を変化させながらサーチすることを特徴とする請求項1に記載の冷凍機。 - 前記ピストンと所定の位相差を有して前記筐体内で往復運動し、前記作動ガスが圧縮される空間と膨張される空間との間に配置される第2ピストンを備えることを特徴とする請求項1乃至3のいずれか1項に記載の冷凍機。
- 前記筐体を、前記真空装置に接続する取付け部を備えることを特徴とする請求項1乃至4のいずれか1項に記載の冷凍機。
- 請求項1乃至5のいずれか1項に記載の冷凍機を用いて、気体分子を捕獲する冷却パネルを冷却することを特徴とする冷却トラップ。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014514238A JP5711424B2 (ja) | 2012-05-11 | 2012-11-06 | 冷凍機、冷却トラップ |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012109660 | 2012-05-11 | ||
JP2012109660 | 2012-05-11 | ||
JP2014514238A JP5711424B2 (ja) | 2012-05-11 | 2012-11-06 | 冷凍機、冷却トラップ |
PCT/JP2012/007104 WO2013168206A1 (ja) | 2012-05-11 | 2012-11-06 | 冷凍機、冷却トラップ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP5711424B2 JP5711424B2 (ja) | 2015-04-30 |
JPWO2013168206A1 true JPWO2013168206A1 (ja) | 2015-12-24 |
Family
ID=49550292
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014514238A Active JP5711424B2 (ja) | 2012-05-11 | 2012-11-06 | 冷凍機、冷却トラップ |
Country Status (5)
Country | Link |
---|---|
US (1) | US9421478B2 (ja) |
JP (1) | JP5711424B2 (ja) |
KR (1) | KR101573647B1 (ja) |
CN (1) | CN104011484B (ja) |
WO (1) | WO2013168206A1 (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9500391B2 (en) * | 2013-05-01 | 2016-11-22 | The John Hopkins University | Active damping vibration controller for use with cryocoolers |
JP6337770B2 (ja) * | 2014-12-26 | 2018-06-06 | 京セラドキュメントソリューションズ株式会社 | モーター駆動装置 |
JP6526530B2 (ja) | 2015-09-15 | 2019-06-05 | 株式会社東芝 | 冷凍システムおよびその制御方法 |
GB2576185B (en) * | 2018-08-08 | 2022-07-20 | Oxford Instruments Nanotechnology Tools Ltd | Noise reduction method for a cryogenic cooling system |
CN109269316B (zh) * | 2018-09-05 | 2020-12-04 | 索通发展股份有限公司 | 水冷冷凝器以及orc发电装置 |
JP7143272B2 (ja) * | 2019-12-24 | 2022-09-28 | ツインバード工業株式会社 | フリーピストン型スターリング冷凍機 |
CN111015738A (zh) * | 2019-12-27 | 2020-04-17 | 上海智殷自动化科技有限公司 | 一种工业机器人振动抑制方法 |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63263250A (ja) * | 1987-04-20 | 1988-10-31 | Mitsubishi Electric Corp | スタ−リング機関の振動低減装置 |
JPH10184541A (ja) | 1996-12-27 | 1998-07-14 | Anelva Corp | 真空排気装置 |
US6131394A (en) * | 1998-07-21 | 2000-10-17 | The Regents Of The University Of California | System and method of active vibration control for an electro-mechanically cooled device |
JP3640538B2 (ja) * | 1998-09-11 | 2005-04-20 | シャープ株式会社 | スターリングエンジン |
JP3788556B2 (ja) * | 1998-12-28 | 2006-06-21 | シャープ株式会社 | スターリング冷凍機 |
US6672144B2 (en) * | 1999-03-29 | 2004-01-06 | Veeco Instruments Inc. | Dynamic activation for an atomic force microscope and method of use thereof |
JP2002130854A (ja) * | 2000-10-25 | 2002-05-09 | Sharp Corp | スターリング冷凍装置及びそれを備えた冷却庫 |
US7257949B2 (en) * | 2001-12-26 | 2007-08-21 | Sharp Kabushiki Kaisha | Stirling engine |
JP2004020029A (ja) * | 2002-06-14 | 2004-01-22 | Sharp Corp | 冷凍機の異常診断装置及び異常診断方法 |
JP2004309080A (ja) * | 2003-04-10 | 2004-11-04 | Sharp Corp | 共振周波数調整方法及びスターリング機関 |
EP1639332A2 (en) * | 2003-06-11 | 2006-03-29 | Furry Brothers, LLC | Systems and methods for performing inspections and detecting chemical leaks using an infrared camera system |
GB0416330D0 (en) * | 2004-07-22 | 2004-08-25 | Microgen Energy Ltd | Method and apparatus for instability detection and correction in a domestic combined heat and power unit |
US20070268944A1 (en) * | 2006-05-22 | 2007-11-22 | Frank Voss | Gas purification in an excimer laser using a stirling cycle cooler |
JP5028142B2 (ja) * | 2007-05-17 | 2012-09-19 | キヤノンアネルバ株式会社 | クライオトラップ |
KR101045488B1 (ko) | 2007-05-17 | 2011-06-30 | 캐논 아네르바 가부시키가이샤 | 크라이오 트랩 및 크라이오 트랩을 갖는 진공 처리 장치 |
JP2009017755A (ja) * | 2007-07-09 | 2009-01-22 | Sharp Corp | リニアモータ制御装置およびスターリング機関 |
US8011183B2 (en) * | 2007-08-09 | 2011-09-06 | Global Cooling Bv | Resonant stator balancing of free piston machine coupled to linear motor or alternator |
KR101484306B1 (ko) * | 2007-10-24 | 2015-01-20 | 엘지전자 주식회사 | 리니어 압축기 |
KR101328349B1 (ko) * | 2007-10-24 | 2013-11-11 | 엘지전자 주식회사 | 리니어 압축기 |
US7884680B2 (en) * | 2008-06-30 | 2011-02-08 | Infineon Technologies Ag | Dynamically adjustable Q-factors |
-
2012
- 2012-11-06 WO PCT/JP2012/007104 patent/WO2013168206A1/ja active Application Filing
- 2012-11-06 JP JP2014514238A patent/JP5711424B2/ja active Active
- 2012-11-06 CN CN201280064197.4A patent/CN104011484B/zh active Active
- 2012-11-06 KR KR1020147015472A patent/KR101573647B1/ko active IP Right Grant
-
2014
- 2014-05-16 US US14/279,382 patent/US9421478B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
CN104011484B (zh) | 2015-12-23 |
KR101573647B1 (ko) | 2015-12-01 |
KR20140101347A (ko) | 2014-08-19 |
US20140290282A1 (en) | 2014-10-02 |
CN104011484A (zh) | 2014-08-27 |
WO2013168206A1 (ja) | 2013-11-14 |
JP5711424B2 (ja) | 2015-04-30 |
US9421478B2 (en) | 2016-08-23 |
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