JPWO2013024807A1 - 積層コイル部品およびその製造方法 - Google Patents
積層コイル部品およびその製造方法 Download PDFInfo
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- 238000004519 manufacturing process Methods 0.000 title claims description 13
- 239000004020 conductor Substances 0.000 claims abstract description 122
- 229910052709 silver Inorganic materials 0.000 claims abstract description 27
- 239000004332 silver Substances 0.000 claims abstract description 27
- 238000010030 laminating Methods 0.000 claims abstract description 8
- 239000000463 material Substances 0.000 claims description 55
- 229910000859 α-Fe Inorganic materials 0.000 claims description 53
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 16
- 239000001301 oxygen Substances 0.000 claims description 16
- 229910052760 oxygen Inorganic materials 0.000 claims description 16
- 238000010304 firing Methods 0.000 claims description 15
- 238000006243 chemical reaction Methods 0.000 claims description 14
- 239000012298 atmosphere Substances 0.000 claims description 13
- 239000000696 magnetic material Substances 0.000 claims description 7
- 229910052759 nickel Inorganic materials 0.000 claims description 5
- 229910052742 iron Inorganic materials 0.000 claims description 3
- 229910052725 zinc Inorganic materials 0.000 claims description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 28
- 238000000034 method Methods 0.000 description 14
- 238000005245 sintering Methods 0.000 description 14
- 230000035699 permeability Effects 0.000 description 12
- 238000012360 testing method Methods 0.000 description 10
- 238000005259 measurement Methods 0.000 description 9
- 230000035882 stress Effects 0.000 description 9
- 229910017518 Cu Zn Inorganic materials 0.000 description 8
- 229910017752 Cu-Zn Inorganic materials 0.000 description 8
- 229910017943 Cu—Zn Inorganic materials 0.000 description 8
- 230000008859 change Effects 0.000 description 8
- 239000013078 crystal Substances 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 7
- 229910015902 Bi 2 O 3 Inorganic materials 0.000 description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 230000035939 shock Effects 0.000 description 6
- 230000002159 abnormal effect Effects 0.000 description 4
- 230000004907 flux Effects 0.000 description 4
- 238000003475 lamination Methods 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 230000001603 reducing effect Effects 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- 239000011230 binding agent Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 239000003960 organic solvent Substances 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 239000002002 slurry Substances 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 2
- 229910007565 Zn—Cu Inorganic materials 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 238000011049 filling Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 229910052718 tin Inorganic materials 0.000 description 2
- 239000002966 varnish Substances 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 238000001354 calcination Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- TVZPLCNGKSPOJA-UHFFFAOYSA-N copper zinc Chemical class [Cu].[Zn] TVZPLCNGKSPOJA-UHFFFAOYSA-N 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000001934 delay Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000007606 doctor blade method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000006355 external stress Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 238000004898 kneading Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910002076 stabilized zirconia Inorganic materials 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
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Abstract
Description
導体部が銀を含む導体から成り、
磁性体部がFe、Ni、Zn、Cuを含む焼結フェライト材料から成り、
磁性体部の中央領域におけるCu含有量(CuO換算)(重量%)に対する、磁性体部の導体部近傍領域におけるCu含有量(CuO換算)(重量%)の比が、0.2〜0.5である、積層コイル部品が提供される。
Fe2O3、NiO、ZnO、CuOを含み、かつCuO含有量が0.3〜4mol%であるフェライト材料のグリーンシートを、銀を含む導体ペースト層を介して積層し、導体ペースト層がフェライト材料のグリーンシートを貫通してコイル状に相互接続されている積層体を得ること、および
積層体を酸素濃度0.1体積%以下の雰囲気で熱処理することにより、フェライト材料のグリーンシートおよび銀を含む導体ペースト層を焼成して、それぞれ磁性体層および導体パターン層とし、これにより、それぞれ前記磁性体部および前記導体部を形成すること
を含む製造方法もまた提供される。
試料No.1〜14について得られた積層コイル部品を、Cu含有量(CuO換算)、平均結晶粒径、直流重畳特性および熱衝撃試験により評価した。
試料No.1〜14につき各10個の積層コイル部品を用いて、樹脂固めを行い、厚み方向の約1/2の位置(図1のA−A線の位置)まで研磨し、洗浄した後、図4(a)に示す積層体1の露出面において、磁性体部2の中央領域Xおよび導体部近傍領域Yに対して、波長分散型X線分析法(WDX法)を用いて組成を定量分析し(測定ビーム径 1μmとし、中央領域Xの測定はコイル内側のほぼ中央にて行い、導体部近傍領域Yの測定は、磁性体部2と導体部3の界面から磁性体部2の内部へt=約5μmの位置に測定ビーム中心を設定して行った)、領域XおよびYにおける磁性体部2のCu含有量(CuO換算)を求め、10個の積層コイル部品での平均値を算出した。結果を表1に併せて示す。
試料No.1〜14につき各10個の積層コイル部品を用いて、樹脂固めを行い、厚み方向の約1/2の位置(図1のA−A線の位置)まで研磨し、更に化学エッチングを行って、走査電子顕微鏡(SEM)を用いて、磁性体部2の中央領域Xおよび導体部近傍領域Y(領域XおよびYは上記と同じ)においてSEM写真を撮影し、このSEM写真から、JIS規格(R1670)に準拠し、旭化成エンジニアリング製の画像解析ソフト「A像くん」(登録商標)を用いて、円相当径に換算して平均結晶粒径を測定し、10個の積層コイル部品での平均値を算出し、平均結晶粒径とした。結果を表1に併せて示す。
試料No.1〜14につき各50個の積層コイル部品を用いて、JIS規格(C2560−2)に準拠し、1Aの直流電流を積層コイル部品に重畳した。その前後で、積層コイル部品のインダクタンスLを周波数1MHzで測定し、直流重畳試験前後でのインダクタンス変化率を求め、50個の積層コイル部品での平均値を算出した。結果を表2に示す。
試料No.1〜14につき各50個の積層コイル部品を用いて、−55℃〜+125℃の範囲で所定の温度プロファイルで2000サイクル繰り返した。その前後で、積層コイル部品のインダクタンスLを周波数1MHzで測定し、ヒートサイクル試験前後でのインダクタンス変化率を求め、50個の積層コイル部品での平均値を算出した。結果を表2に示す。
2 磁性体部
3 導体部
4a、4b 引出し部
5a、5b 外部電極
8a〜8h 磁性体層
9a〜9f 導体パターン層
9a’、9f’ 引出し部
10a〜10e ビア
11 積層コイル部品
12 非磁性体層
X 中央領域
Y 導体部近傍領域
X’ 高Cu含有量領域(CuO換算)
Y’ 低Cu含有量領域(CuO換算)
Claims (4)
- 磁性体層が積層されて成る磁性体部と、磁性体層間に配置された複数の導体パターン層が磁性体層を貫通してコイル状に相互接続され、磁性体部に埋設されて成る導体部とを有する積層コイル部品であって、
導体部が銀を含む導体から成り、
磁性体部がFe、Ni、Zn、Cuを含む焼結フェライト材料から成り、
磁性体部の中央領域におけるCu含有量(CuO換算)に対する、磁性体部の導体部近傍領域におけるCu含有量(CuO換算)の比が、0.2〜0.5である、積層コイル部品。 - 磁性体部の中央領域におけるCu含有量(CuO換算)に対する、磁性体部の導体部近傍領域におけるCu含有量(CuO換算)の比が、0.2〜0.3である、請求項1に記載の積層コイル部品。
- 磁性体部の中央領域におけるCu含有量(CuO換算)が、0.2〜3重量%である、請求項1または2に記載の積層コイル部品。
- 磁性体層が積層されて成る磁性体部と、磁性体層間に配置された複数の導体パターン層が磁性体層を貫通してコイル状に相互接続され、磁性体部に埋設されて成る導体部とを有する積層コイル部品の製造方法であって、
Fe2O3、NiO、ZnO、CuOを含み、かつCuO含有量が0.3〜4mol%であるフェライト材料のグリーンシートを、銀を含む導体ペースト層を介して積層し、導体ペースト層がフェライト材料のグリーンシートを貫通してコイル状に相互接続されている積層体を得ること、および
積層体を酸素濃度0.1体積%以下の雰囲気で熱処理することにより、フェライト材料のグリーンシートおよび銀を含む導体ペースト層を焼成して、それぞれ磁性体層および導体パターン層とし、これにより、それぞれ前記磁性体部および前記導体部を形成すること
を含む製造方法。
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JPS63102215A (ja) * | 1986-10-20 | 1988-05-07 | Taiyo Yuden Co Ltd | 積層型インダクタの製造方法 |
JPH0353606A (ja) * | 1989-07-20 | 1991-03-07 | Murata Mfg Co Ltd | 積層型lrフィルタの製造方法 |
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