JPWO2012137408A1 - 処理装置 - Google Patents
処理装置 Download PDFInfo
- Publication number
- JPWO2012137408A1 JPWO2012137408A1 JP2013508731A JP2013508731A JPWO2012137408A1 JP WO2012137408 A1 JPWO2012137408 A1 JP WO2012137408A1 JP 2013508731 A JP2013508731 A JP 2013508731A JP 2013508731 A JP2013508731 A JP 2013508731A JP WO2012137408 A1 JPWO2012137408 A1 JP WO2012137408A1
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- 238000005192 partition Methods 0.000 claims abstract description 145
- 239000000758 substrate Substances 0.000 claims abstract description 38
- 238000003825 pressing Methods 0.000 claims description 17
- 238000000638 solvent extraction Methods 0.000 claims 1
- 238000005516 engineering process Methods 0.000 abstract 1
- 238000004140 cleaning Methods 0.000 description 5
- 238000009792 diffusion process Methods 0.000 description 5
- 239000007795 chemical reaction product Substances 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 238000009616 inductively coupled plasma Methods 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67069—Apparatus for fluid treatment for etching for drying etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32458—Vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32715—Workpiece holder
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/6719—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the processing chambers, e.g. modular processing chambers
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Drying Of Semiconductors (AREA)
- Plasma Technology (AREA)
- Chemical Vapour Deposition (AREA)
- Spectroscopy & Molecular Physics (AREA)
Abstract
Description
Claims (6)
- 基板を処理する処理装置であって、
基板を処理する処理空間において前記基板を支持する基板支持部と、
開口部を有する天井部を含んでいて前記処理空間を外部空間から仕切る第1仕切り部材と、
前記開口部を閉塞し前記第1仕切り部材とともに前記処理空間を前記外部空間から仕切るように前記第1仕切り部材に取り付けられる第2仕切り部材と、を備え、
前記第2仕切り部材は、前記天井部の下面が向いている空間に向けて前記第2仕切り部材を移動させることによって前記第2仕切り部材を前記第1仕切り部材から取り外すことができるように、前記第1仕切り部材に取り付けられる、
ことを特徴とする処理装置。 - 前記第1仕切り部材は、前記開口部の周囲に取り付け面を有し、前記第2仕切り部材は、前記取り付け面に対してシール部材を介して押し付けられるようにして前記第1仕切り部材に取り付けられる、
ことを特徴とする請求項1に記載の処理装置。 - 前記処理装置は、前記取り付け面に対して前記第2仕切り部材を押し付けるための取り付けリングを更に含む、
ことを特徴とする請求項2に記載の処理装置。 - 前記取り付けリングと前記第2仕切り部材との間に弾性リングが配置されている、
ことを特徴とする請求項3に記載の処理装置。 - 前記第1仕切り部材は、前記開口部の周囲に配置された取り付け面と、前記取り付け面の周囲に配置された固定面とを有し、
前記処理装置は、前記取り付け面に対して前記第2仕切り部材を押し付けるための取り付けリングを更に含み、
前記取り付けリングは、前記固定面に固定され、前記取り付けリングと前記第2仕切り部材との間に第1シール部材が配置され、前記取り付けリングと前記固定面との間に第2シール部材が配置されている、
ことを特徴とする請求項1に記載の処理装置。 - 前記基板支持部を支持するベース部を更に備え、
前記処理装置は、前記第1仕切り部のうち少なくとも前記天井部と前記第2仕切り部とを含む構造体を前記ベース部から離隔させて前記処理空間を前記外部空間に開放することができるように構成されている、
ことを特徴とする請求項1乃至5のいずれか1項に記載の処理装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013508731A JP5647336B2 (ja) | 2011-04-04 | 2012-03-07 | プラズマ処理装置 |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011083113 | 2011-04-04 | ||
JP2011083113 | 2011-04-04 | ||
PCT/JP2012/001572 WO2012137408A1 (ja) | 2011-04-04 | 2012-03-07 | 処理装置 |
JP2013508731A JP5647336B2 (ja) | 2011-04-04 | 2012-03-07 | プラズマ処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2012137408A1 true JPWO2012137408A1 (ja) | 2014-07-28 |
JP5647336B2 JP5647336B2 (ja) | 2014-12-24 |
Family
ID=46968825
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013508731A Active JP5647336B2 (ja) | 2011-04-04 | 2012-03-07 | プラズマ処理装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US9603231B2 (ja) |
JP (1) | JP5647336B2 (ja) |
KR (1) | KR101446455B1 (ja) |
CN (1) | CN103477721B (ja) |
TW (1) | TWI490975B (ja) |
WO (1) | WO2012137408A1 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB201304631D0 (en) * | 2013-03-14 | 2013-05-01 | Malvern Instr Ltd | Monomer detection in protein separation |
WO2014161199A1 (zh) * | 2013-04-03 | 2014-10-09 | Wang Dongjun | 等离子体增强原子层沉积设备 |
GB201318249D0 (en) * | 2013-10-15 | 2013-11-27 | Spts Technologies Ltd | Plasma etching apparatus |
CN108695131B (zh) * | 2017-04-05 | 2020-04-28 | 北京北方华创微电子装备有限公司 | 反应腔室 |
KR102636427B1 (ko) * | 2018-02-20 | 2024-02-13 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 방법 및 장치 |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06310436A (ja) * | 1993-04-20 | 1994-11-04 | Sumitomo Metal Ind Ltd | 薄膜形成装置 |
US6308654B1 (en) * | 1996-10-18 | 2001-10-30 | Applied Materials, Inc. | Inductively coupled parallel-plate plasma reactor with a conical dome |
US6197165B1 (en) | 1998-05-06 | 2001-03-06 | Tokyo Electron Limited | Method and apparatus for ionized physical vapor deposition |
US6287435B1 (en) | 1998-05-06 | 2001-09-11 | Tokyo Electron Limited | Method and apparatus for ionized physical vapor deposition |
US6080287A (en) * | 1998-05-06 | 2000-06-27 | Tokyo Electron Limited | Method and apparatus for ionized physical vapor deposition |
JP3363405B2 (ja) | 1999-03-17 | 2003-01-08 | 株式会社日立製作所 | プラズマ処理装置およびプラズマ処理装置システム |
US20020179245A1 (en) | 1999-03-17 | 2002-12-05 | Toshio Masuda | Plasma processing apparatus and maintenance method therefor |
JP3205312B2 (ja) | 1999-03-17 | 2001-09-04 | 株式会社日立製作所 | プラズマ処理装置及びプラズマ処理装置のメンテナンス方法 |
TW464919B (en) | 1999-03-30 | 2001-11-21 | Tokyo Electron Ltd | Plasma processing apparatus, maintenance method thereof and setting method thereof |
WO2001088971A1 (fr) * | 2000-05-17 | 2001-11-22 | Tokyo Electron Limited | Dispositif de traitement et procede d'entretien du dispositif, mecanisme et procede de montage d'une piece du dispositif de traitement, et mecanisme de verrouillage et procede de blocage du mecanisme de verrouillage |
JP3935850B2 (ja) | 2003-01-31 | 2007-06-27 | 株式会社日立ハイテクノロジーズ | プラズマ処理装置 |
CN100350569C (zh) * | 2003-05-02 | 2007-11-21 | 东京毅力科创株式会社 | 处理气体导入机构和等离子体处理装置 |
WO2004097919A1 (ja) | 2003-05-02 | 2004-11-11 | Tokyo Electron Limited | 処理ガス導入機構およびプラズマ処理装置 |
JP4426343B2 (ja) * | 2004-03-08 | 2010-03-03 | 株式会社日立ハイテクノロジーズ | プラズマ処理装置 |
US7704887B2 (en) * | 2005-11-22 | 2010-04-27 | Applied Materials, Inc. | Remote plasma pre-clean with low hydrogen pressure |
US7942969B2 (en) * | 2007-05-30 | 2011-05-17 | Applied Materials, Inc. | Substrate cleaning chamber and components |
US7879250B2 (en) * | 2007-09-05 | 2011-02-01 | Applied Materials, Inc. | Method of processing a workpiece in a plasma reactor with independent wafer edge process gas injection |
JP4723559B2 (ja) * | 2007-12-25 | 2011-07-13 | 株式会社日立ハイテクノロジーズ | プラズマ処理装置 |
JP5062057B2 (ja) * | 2008-06-25 | 2012-10-31 | 東京エレクトロン株式会社 | 真空処理装置 |
CN201517131U (zh) * | 2009-09-16 | 2010-06-30 | 湖北师范学院 | 一种制备类金刚石薄膜的装置 |
KR20130135981A (ko) | 2011-03-31 | 2013-12-11 | 캐논 아네르바 가부시키가이샤 | 기판 처리 장치 |
-
2012
- 2012-03-07 KR KR1020137028690A patent/KR101446455B1/ko active IP Right Grant
- 2012-03-07 JP JP2013508731A patent/JP5647336B2/ja active Active
- 2012-03-07 WO PCT/JP2012/001572 patent/WO2012137408A1/ja active Application Filing
- 2012-03-07 CN CN201280015592.3A patent/CN103477721B/zh active Active
- 2012-03-28 TW TW101110817A patent/TWI490975B/zh active
-
2013
- 2013-09-18 US US14/030,003 patent/US9603231B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US20140014269A1 (en) | 2014-01-16 |
CN103477721B (zh) | 2016-05-18 |
JP5647336B2 (ja) | 2014-12-24 |
TW201306162A (zh) | 2013-02-01 |
TWI490975B (zh) | 2015-07-01 |
WO2012137408A1 (ja) | 2012-10-11 |
CN103477721A (zh) | 2013-12-25 |
KR101446455B1 (ko) | 2014-10-01 |
KR20130135991A (ko) | 2013-12-11 |
US9603231B2 (en) | 2017-03-21 |
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