JPWO2012124663A1 - 板状体の研磨方法 - Google Patents

板状体の研磨方法 Download PDF

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Publication number
JPWO2012124663A1
JPWO2012124663A1 JP2013504723A JP2013504723A JPWO2012124663A1 JP WO2012124663 A1 JPWO2012124663 A1 JP WO2012124663A1 JP 2013504723 A JP2013504723 A JP 2013504723A JP 2013504723 A JP2013504723 A JP 2013504723A JP WO2012124663 A1 JPWO2012124663 A1 JP WO2012124663A1
Authority
JP
Japan
Prior art keywords
plate
polishing
sticking
holding
stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2013504723A
Other languages
English (en)
Japanese (ja)
Inventor
裕一 女部田
裕一 女部田
準一 齋藤
準一 齋藤
英生 中村
英生 中村
木村　宏
宏 木村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGC Inc
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Publication of JPWO2012124663A1 publication Critical patent/JPWO2012124663A1/ja
Withdrawn legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/48—Flattening arrangements

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)
JP2013504723A 2011-03-15 2012-03-12 板状体の研磨方法 Withdrawn JPWO2012124663A1 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2011056732 2011-03-15
JP2011056732 2011-03-15
PCT/JP2012/056308 WO2012124663A1 (ja) 2011-03-15 2012-03-12 板状体の研磨方法

Publications (1)

Publication Number Publication Date
JPWO2012124663A1 true JPWO2012124663A1 (ja) 2014-07-24

Family

ID=46830732

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013504723A Withdrawn JPWO2012124663A1 (ja) 2011-03-15 2012-03-12 板状体の研磨方法

Country Status (5)

Country Link
JP (1) JPWO2012124663A1 (zh)
KR (2) KR20140010073A (zh)
CN (3) CN105856061B (zh)
TW (1) TW201247362A (zh)
WO (1) WO2012124663A1 (zh)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101612928B1 (ko) * 2013-01-04 2016-04-15 주식회사 엘지화학 연마용 백패드에 유리판을 마운팅하는 장치 및 방법
JP6357260B2 (ja) * 2016-09-30 2018-07-11 株式会社荏原製作所 研磨装置、及び研磨方法
IT201600130117A1 (it) 2016-12-22 2018-06-22 Breton Spa Macchina e metodo per la levigatura e/o lucidatura di lastre di materiale lapideo, quale pietra naturale o agglomerata, ceramico e vetro
KR102027814B1 (ko) * 2018-05-23 2019-10-02 주식회사 앤아이윈 디스플레이용 대면적 글라스의 cmp 장치의 상정반
JP7217202B2 (ja) * 2019-05-31 2023-02-02 株式会社荏原製作所 温度調整装置および研磨装置
CN110707670B (zh) * 2019-10-24 2020-12-01 南方电网科学研究院有限责任公司 一种变电站小电阻接地装置的控制方法
CN111300240B (zh) * 2020-02-22 2021-02-19 深圳市盛鸿运科技有限公司 一种钢板表面处理设备及钢板表面处理工艺

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5094037A (en) * 1989-10-03 1992-03-10 Speedfam Company, Ltd. Edge polisher
JPH10291147A (ja) * 1997-04-21 1998-11-04 Nippon Electric Glass Co Ltd 板ガラスの研磨方法及び装置
CN1241779C (zh) * 2000-05-01 2006-02-15 本田技研工业株式会社 侧壁板组装线装置
JP2004034216A (ja) * 2002-07-02 2004-02-05 Tamagawa Machinery Co Ltd 研磨機および研磨方法
JP4207153B2 (ja) * 2002-07-31 2009-01-14 旭硝子株式会社 基板の研磨方法及びその装置
US8079895B2 (en) * 2002-10-11 2011-12-20 Bando Kiko Co., Ltd. Glass-plate working apparatus
JP5009101B2 (ja) * 2006-10-06 2012-08-22 株式会社荏原製作所 基板研磨装置
JP4654275B2 (ja) * 2008-07-31 2011-03-16 信越半導体株式会社 両面研磨装置
JP5028354B2 (ja) * 2008-07-31 2012-09-19 信越半導体株式会社 ウェーハの研磨方法
JP5408788B2 (ja) * 2009-03-06 2014-02-05 エルジー・ケム・リミテッド フロートガラス研磨システム
JP5408790B2 (ja) * 2009-03-06 2014-02-05 エルジー・ケム・リミテッド フロートガラス研磨システム

Also Published As

Publication number Publication date
WO2012124663A1 (ja) 2012-09-20
CN105856061B (zh) 2019-06-11
KR20180069925A (ko) 2018-06-25
TW201247362A (en) 2012-12-01
CN105856061A (zh) 2016-08-17
CN105798767A (zh) 2016-07-27
CN105798767B (zh) 2018-01-30
CN103429383B (zh) 2016-05-11
CN103429383A (zh) 2013-12-04
KR20140010073A (ko) 2014-01-23

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