JPWO2011125973A1 - フィルタ保持装置、露光装置、及びデバイス製造方法 - Google Patents

フィルタ保持装置、露光装置、及びデバイス製造方法 Download PDF

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Publication number
JPWO2011125973A1
JPWO2011125973A1 JP2012509649A JP2012509649A JPWO2011125973A1 JP WO2011125973 A1 JPWO2011125973 A1 JP WO2011125973A1 JP 2012509649 A JP2012509649 A JP 2012509649A JP 2012509649 A JP2012509649 A JP 2012509649A JP WO2011125973 A1 JPWO2011125973 A1 JP WO2011125973A1
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JP
Japan
Prior art keywords
frame
filter
shape changing
holding device
changing portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2012509649A
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English (en)
Japanese (ja)
Inventor
公一 桂
公一 桂
恵二 松浦
恵二 松浦
佳成 堀田
佳成 堀田
孝志 増川
孝志 増川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Publication of JPWO2011125973A1 publication Critical patent/JPWO2011125973A1/ja
Withdrawn legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/0407—Constructional details of adsorbing systems
    • B01D53/0415—Beds in cartridges
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/102—Carbon
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/20—Organic adsorbents
    • B01D2253/206—Ion exchange resins
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/40—Nitrogen compounds
    • B01D2257/406—Ammonia
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Separation Of Gases By Adsorption (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2012509649A 2010-04-05 2011-04-04 フィルタ保持装置、露光装置、及びデバイス製造方法 Withdrawn JPWO2011125973A1 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US32092210P 2010-04-05 2010-04-05
US61/320,922 2010-04-05
PCT/JP2011/058511 WO2011125973A1 (fr) 2010-04-05 2011-04-04 Support de filtre, dispositif d'exposition, et procédé de production de dispositif

Publications (1)

Publication Number Publication Date
JPWO2011125973A1 true JPWO2011125973A1 (ja) 2013-07-11

Family

ID=44762908

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012509649A Withdrawn JPWO2011125973A1 (ja) 2010-04-05 2011-04-04 フィルタ保持装置、露光装置、及びデバイス製造方法

Country Status (5)

Country Link
JP (1) JPWO2011125973A1 (fr)
KR (1) KR20130019416A (fr)
CN (1) CN102821828A (fr)
TW (1) TW201231144A (fr)
WO (1) WO2011125973A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013020653A1 (de) * 2013-12-05 2015-06-11 Rt-Filtertechnik Gmbh Filtervorrichtung, insbesondere in Form einer Luftfiltervorrichtung
JP6511858B2 (ja) * 2015-02-27 2019-05-15 シンフォニアテクノロジー株式会社 搬送室
CN110652804A (zh) * 2019-10-10 2020-01-07 极达鑫环境科技(重庆)有限公司 一种高密闭型高效滤网安装框

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS532152B2 (fr) * 1973-06-08 1978-01-25
JPS6320930U (fr) * 1986-07-23 1988-02-12
JPH09113028A (ja) * 1995-10-17 1997-05-02 Matsushita Electric Ind Co Ltd 空気清浄フィルタ用収納ケース
JPH09249024A (ja) * 1996-03-14 1997-09-22 Zexel Corp 空調ユニット
JPH1147531A (ja) * 1997-07-31 1999-02-23 Tennex:Kk 室内空気処理用のフィルタ部材
JP2002158170A (ja) * 2000-09-08 2002-05-31 Nikon Corp 露光装置及びデバイス製造方法
JP2004045573A (ja) * 2002-07-09 2004-02-12 Canon Inc 画像形成装置
JP5104472B2 (ja) * 2008-03-31 2012-12-19 パナソニック株式会社 ファンフィルタユニット

Also Published As

Publication number Publication date
TW201231144A (en) 2012-08-01
CN102821828A (zh) 2012-12-12
KR20130019416A (ko) 2013-02-26
WO2011125973A1 (fr) 2011-10-13

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A300 Withdrawal of application because of no request for examination

Free format text: JAPANESE INTERMEDIATE CODE: A300

Effective date: 20140701