JPWO2006093036A1 - 微小流量調節機構を有する常閉弁 - Google Patents
微小流量調節機構を有する常閉弁 Download PDFInfo
- Publication number
- JPWO2006093036A1 JPWO2006093036A1 JP2007505884A JP2007505884A JPWO2006093036A1 JP WO2006093036 A1 JPWO2006093036 A1 JP WO2006093036A1 JP 2007505884 A JP2007505884 A JP 2007505884A JP 2007505884 A JP2007505884 A JP 2007505884A JP WO2006093036 A1 JPWO2006093036 A1 JP WO2006093036A1
- Authority
- JP
- Japan
- Prior art keywords
- valve
- flow rate
- valve opening
- normally closed
- piston body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000002093 peripheral effect Effects 0.000 claims description 7
- 239000002184 metal Substances 0.000 description 8
- 230000006835 compression Effects 0.000 description 4
- 238000007906 compression Methods 0.000 description 4
- 230000001105 regulatory effect Effects 0.000 description 4
- 239000012530 fluid Substances 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
- F16K31/1225—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston with a plurality of pistons
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
- F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
- F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
- F16K7/17—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being actuated by fluid pressure
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
- F16K31/1221—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston one side of the piston being spring-loaded
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
- F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
- F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Fluid-Driven Valves (AREA)
- Lift Valve (AREA)
Abstract
Description
Claims (6)
- 流路を開閉する弁ステム;
この弁ステムを流路閉塞方向に付勢する付勢手段;
シリンダに気密に移動可能に嵌められ、上記付勢手段に抗して弁ステムを開弁方向に移動させる圧力室を画成するピストン体;
上記シリンダに設けられた、上記ピストン体の開弁方向への最大移動位置を規制するストッパ機構;を備えた常閉弁において、
上記ストッパ機構が、
上記シリンダに弁ステムと同軸にして位置調節可能に螺合させた、先端部に上記ピストン体に臨む先細の環状テーパ面を有するストローク調節部材;
上記ピストン体に、上記先細環状テーパ面より径方向外方に位置させて設けた可動開弁規制面;
上記シリンダと一体に設けた、この可動開弁規制面と対向する固定開弁規制面;
この可動開弁規制面と固定開弁規制面は、少なくとも一方が、両規制面の間隔を外周にいくに従って狭めるテーパ面からなること;及び
上記先細環状テーパ面、可動開弁規制面及び固定開弁規制面の全てに同時に接触可能な複数のボール;
を有することを特徴とする微小流量調節機構を有する常閉弁。 - 請求項1記載の微小流量調節機構を有する常閉弁において、上記シリンダの端部には、該シリンダの端部を閉塞する端部キャップが固定されており、この端部キャップに、上記ストローク調節部材が螺合され、かつ上記固定開弁規制面が形成されている微小流量調節機構を有する常閉弁。
- 請求項1記載の微小流量調節機構を有する常閉弁において、上記ストローク調節部材は、上記シリンダの端部を閉塞するように螺合された端部キャップからなり、上記シリンダには、このストローク調節部材の内側に先細環状テーパ面の外周側に位置させて、上記固定開弁規制面を有する固定部材が固定されている微小流量調節機構を有する常閉弁。
- 請求項1ないし3のいずれか一項に記載の微小流量調節機構を有する常閉弁において、上記可動開弁規制面と固定開弁規制面の一方は、円錐面の一部からなり、他方は上記弁ステムの軸線と直交する平面からなる微小流量調節機構を有する常閉弁。
- 請求項1ないし4のいずれか一項に記載の微小流量調節機構を有する常閉弁において、上記シリンダ内に、上記複数のボールの移動方向を径方向に規制するガイド溝を備えている微小流量調節機構を有する常閉弁。
- 請求項1ないし5のいずれか一項に記載の微小流量調節機構を有する常閉弁において、上記先細環状テーパ面と、可動開弁規制面及び固定開弁規制面のテーパ面とは、ストローク調節部材の軸方向移動量とピストン体の軸方向移動量の比を1対1/2〜1対1/50にするように角度設定されている微小流量調節機構を有する常閉弁。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007505884A JP4845875B2 (ja) | 2005-03-01 | 2006-02-24 | 微小流量調節機構を有する常閉弁 |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005056323 | 2005-03-01 | ||
JP2005056323 | 2005-03-01 | ||
JP2007505884A JP4845875B2 (ja) | 2005-03-01 | 2006-02-24 | 微小流量調節機構を有する常閉弁 |
PCT/JP2006/303380 WO2006093036A1 (ja) | 2005-03-01 | 2006-02-24 | 微小流量調節機構を有する常閉弁 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2006093036A1 true JPWO2006093036A1 (ja) | 2008-08-07 |
JP4845875B2 JP4845875B2 (ja) | 2011-12-28 |
Family
ID=36941067
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007505884A Active JP4845875B2 (ja) | 2005-03-01 | 2006-02-24 | 微小流量調節機構を有する常閉弁 |
Country Status (7)
Country | Link |
---|---|
US (1) | US7823859B2 (ja) |
EP (1) | EP1860359B1 (ja) |
JP (1) | JP4845875B2 (ja) |
KR (1) | KR101159136B1 (ja) |
CN (1) | CN101133271B (ja) |
TW (1) | TWI348525B (ja) |
WO (1) | WO2006093036A1 (ja) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008089103A (ja) * | 2006-10-03 | 2008-04-17 | Smc Corp | 手動切換弁 |
CN101611254A (zh) * | 2007-02-06 | 2009-12-23 | 株式会社富士金 | 流体控制器 |
US8265794B2 (en) * | 2007-10-01 | 2012-09-11 | Westlock Controls Corporation | Knowledge based valve control method |
FR2928197B1 (fr) * | 2008-03-03 | 2014-11-21 | Sidel Participations | Composant pneumatique formant electrovanne et incorporant un reglage de debit, et installation de soufflage de recipients thermoplastiques equipee d'un tel composant |
JP5185692B2 (ja) * | 2008-05-23 | 2013-04-17 | 藤倉ゴム工業株式会社 | 倍力開閉弁 |
US7971454B2 (en) * | 2008-07-28 | 2011-07-05 | Datacolor Holding Ag | Beaker type dyeing machine |
JP4672076B2 (ja) * | 2009-09-24 | 2011-04-20 | 藤倉ゴム工業株式会社 | 緩作動開閉弁 |
DE102009053814B4 (de) * | 2009-11-18 | 2013-11-14 | Knorr-Bremse Systeme für Schienenfahrzeuge GmbH | Mehrstufig schaltbare vorgesteuerte Ventilanordnung |
JP5508875B2 (ja) * | 2010-01-26 | 2014-06-04 | 株式会社フジキン | 流体制御器および流量制御装置 |
JP6180267B2 (ja) * | 2013-09-30 | 2017-08-16 | Ckd株式会社 | 流体駆動式遮断弁 |
US9920857B2 (en) | 2013-10-30 | 2018-03-20 | Fujikin Incorporated | Vacuum valve |
JP6491878B2 (ja) * | 2014-12-25 | 2019-03-27 | 株式会社フジキン | 流体制御器 |
JP6491877B2 (ja) * | 2014-12-25 | 2019-03-27 | 株式会社フジキン | 流体制御器 |
US10215303B2 (en) * | 2015-05-01 | 2019-02-26 | Fisher Controls International Llc | Adjustable travel stop for a piston actuator |
DE102016115638A1 (de) * | 2016-08-23 | 2018-03-01 | Gemü Gebr. Müller Apparatebau Gmbh & Co. Kommanditgesellschaft | Membranventil |
KR101887395B1 (ko) * | 2016-11-14 | 2018-08-10 | 주식회사 에너콘 | 밸브간극 조정장치를 가진 밸브용 로타리 액추에이터 |
KR102239202B1 (ko) * | 2017-07-04 | 2021-04-09 | 가부시키가이샤 후지킨 | 액추에이터, 밸브, 유체 공급 시스템 및 반도체 제조 장치 |
JP7045839B2 (ja) * | 2017-12-08 | 2022-04-01 | 株式会社キッツエスシーティー | 流体制御バルブ |
CN111742170B (zh) * | 2018-02-22 | 2022-07-15 | 斯瓦戈洛克公司 | 具有流动调整机构的流动控制装置 |
JP7202597B2 (ja) * | 2018-07-31 | 2023-01-12 | 株式会社フジキン | アクチュエータおよびこれを用いたバルブ装置 |
US10975979B2 (en) * | 2018-11-15 | 2021-04-13 | General Electric Company | Actuator fail fix system |
DE102020204754A1 (de) * | 2020-04-15 | 2021-10-21 | Festo Se & Co. Kg | Ventil |
CN114396487A (zh) * | 2021-12-31 | 2022-04-26 | 宁波宝蒂塑胶阀门有限公司 | 一种气动隔膜阀 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4169405A (en) * | 1974-04-10 | 1979-10-02 | Fuji Plastic Co. | Control apparatus |
US5007328A (en) * | 1989-07-24 | 1991-04-16 | Otteman John H | Linear actuator |
JP2698942B2 (ja) | 1991-06-26 | 1998-01-19 | 株式会社河合楽器製作所 | 楽音発生装置 |
JPH0729345Y2 (ja) * | 1991-12-04 | 1995-07-05 | ブイエスイー バクウムテヒニーク ゲーエムベーハー | 微小流量調節弁 |
JP2852843B2 (ja) | 1993-04-02 | 1999-02-03 | 株式会社ベンカン | スローベントバルブ |
JP3532273B2 (ja) * | 1994-12-20 | 2004-05-31 | 株式会社コガネイ | 流体圧作動弁装置 |
JP3844020B2 (ja) | 1997-04-28 | 2006-11-08 | 日本ダイヤバルブ株式会社 | 二段開閉ダイヤフラム弁 |
JP3437811B2 (ja) | 1999-05-12 | 2003-08-18 | 藤倉ゴム工業株式会社 | 二段階切換開閉弁及び倍力型二段階切換開閉弁 |
JP3437799B2 (ja) * | 1999-07-16 | 2003-08-18 | 藤倉ゴム工業株式会社 | 自動二段切換開閉弁 |
JP2002139161A (ja) * | 2000-11-06 | 2002-05-17 | Smc Corp | 二方弁 |
JP3890561B2 (ja) * | 2002-07-12 | 2007-03-07 | Smc株式会社 | 弁開度を調整可能な2ポート真空バルブ |
JP4133272B2 (ja) * | 2002-12-03 | 2008-08-13 | 藤倉ゴム工業株式会社 | ガスボンベ用空気作動常閉弁のロック機構 |
-
2006
- 2006-02-24 US US11/817,513 patent/US7823859B2/en active Active
- 2006-02-24 JP JP2007505884A patent/JP4845875B2/ja active Active
- 2006-02-24 WO PCT/JP2006/303380 patent/WO2006093036A1/ja active Application Filing
- 2006-02-24 KR KR1020077019202A patent/KR101159136B1/ko active IP Right Grant
- 2006-02-24 CN CN2006800067024A patent/CN101133271B/zh active Active
- 2006-02-24 TW TW095106375A patent/TWI348525B/zh active
- 2006-02-24 EP EP06714519.3A patent/EP1860359B1/en active Active
Also Published As
Publication number | Publication date |
---|---|
EP1860359B1 (en) | 2013-07-10 |
KR101159136B1 (ko) | 2012-06-25 |
TWI348525B (en) | 2011-09-11 |
JP4845875B2 (ja) | 2011-12-28 |
US7823859B2 (en) | 2010-11-02 |
WO2006093036A1 (ja) | 2006-09-08 |
TW200636179A (en) | 2006-10-16 |
CN101133271B (zh) | 2010-05-26 |
KR20070108529A (ko) | 2007-11-12 |
CN101133271A (zh) | 2008-02-27 |
EP1860359A4 (en) | 2012-08-29 |
EP1860359A1 (en) | 2007-11-28 |
US20090050832A1 (en) | 2009-02-26 |
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