JP5508875B2 - 流体制御器および流量制御装置 - Google Patents
流体制御器および流量制御装置 Download PDFInfo
- Publication number
- JP5508875B2 JP5508875B2 JP2010013994A JP2010013994A JP5508875B2 JP 5508875 B2 JP5508875 B2 JP 5508875B2 JP 2010013994 A JP2010013994 A JP 2010013994A JP 2010013994 A JP2010013994 A JP 2010013994A JP 5508875 B2 JP5508875 B2 JP 5508875B2
- Authority
- JP
- Japan
- Prior art keywords
- valve
- limit switch
- bolt
- piston
- switching valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000012530 fluid Substances 0.000 title claims description 52
- 239000011295 pitch Substances 0.000 claims description 26
- 210000001124 body fluid Anatomy 0.000 claims 1
- 239000010839 body fluid Substances 0.000 claims 1
- 230000006835 compression Effects 0.000 description 3
- 238000007906 compression Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 230000010354 integration Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
- F16K31/124—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston servo actuated
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
- F16K31/1226—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston the fluid circulating through the piston
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
- F16K37/0066—Hydraulic or pneumatic means
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Indication Of The Valve Opening Or Closing Status (AREA)
- Fluid-Driven Valves (AREA)
- Flow Control (AREA)
- Multiple-Way Valves (AREA)
Description
(2) ボディ
(3) コントロールバルブ
(4) 圧力センサ(センサ)
(5) 流体制御器
(6) 切換バルブ(バルブ)
(7) リミットスイッチ
(8) リミットスイッチ位置決め手段
(9) 第1のオリフィス
(10) 第2のオリフィス
(21) ケーシング
(23) ダイヤフラム(弁体)
(25) 弁棒
(26) 第1ピストン(移動部材)
(29) ピストン駆動手段
(42) 第1のボルト
(43) 第2のボルト
(44) 連結ねじ
(44a)(44b)めねじ部
(45) 第1のロックナット
(46) 第2のロックナット
Claims (3)
- 流体通路が設けられたボディと、ボディに取り付けられてその流体通路の開閉を行うバルブと、バルブの動作を検出するリミットスイッチと、リミットスイッチの位置決め手段とを備えている流体制御器であって、
バルブは、ケーシングの開口から一部を突出させバルブの開閉に伴って直線移動してリミットスイッチに当接する移動部材を有しており、
リミットスイッチ位置決め手段は、バルブのボディに固定された第1のボルトと、リミットスイッチに固定された第2のボルトと、一端に第1のボルトにねじ合わされるめねじ部が、他端に第2のボルトにねじ合わされるめねじ部がそれぞれ設けられて両ボルトを連結する連結ねじと、連結ねじと第1のボルトとの相対回転を阻止する第1のロックナットと、連結ねじと第2のボルトとの相対回転を阻止する第2のロックナットとを有しており、第1のボルトと第2のボルトとでピッチが異なるものとされていることを特徴とする流体制御器。 - バルブは、ボディの上方に設けられたケーシングと、流体通路を開閉する弁体と、上昇または下降することにより弁体を開または閉方向に移動させる弁棒と、弁棒に設けられたピストンと、ピストンを駆動するピストン駆動手段とを備えており、ピストンは、弁棒が上方位置にあるときにケーシングの開口からピストン上端部を露出させるように、弁棒上端部に設けられており、該ピストンが、リミットスイッチに当接する移動部材とされていることを特徴とする請求項1の流体制御器。
- 所要の流体通路が形成されたボディと、ボディに取り付けられたコントロールバルブ、センサおよびリミットスイッチ付き切換バルブと、コントロールバルブからの出口通路に設けられた第1のオリフィスと、切換バルブからの出口通路に設けられた第2のオリフィスと、流量の制御を行う制御部とを備えており、切換バルブが閉じられた場合、第1のオリフィスにおける流量の制御が行われ、切換バルブが開けられた場合、第2のオリフィスにおける流量の制御が行われる流量制御装置において、リミットスイッチ付き切換バルブは、請求項1または2のいずれかの流体制御器とされて、コントロールバルブとオリフィスとの間に配置されていることを特徴とする流量制御装置。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010013994A JP5508875B2 (ja) | 2010-01-26 | 2010-01-26 | 流体制御器および流量制御装置 |
CN201080062408.1A CN102770697B (zh) | 2010-01-26 | 2010-11-25 | 流体控制器及流量控制装置 |
KR1020127020849A KR101422973B1 (ko) | 2010-01-26 | 2010-11-25 | 유체 제어기 및 유량 제어 장치 |
DE112010005186.0T DE112010005186B4 (de) | 2010-01-26 | 2010-11-25 | Fluidsteuervorrichtung und Volumenstromregelungseinrichtung |
US13/522,536 US9163748B2 (en) | 2010-01-26 | 2010-11-25 | Fluid control device and flow rate control apparatus |
PCT/JP2010/070984 WO2011092929A1 (ja) | 2010-01-26 | 2010-11-25 | 流体制御器および流量制御装置 |
TW100102552A TWI484311B (zh) | 2010-01-26 | 2011-01-25 | 流體控制器及流量控制裝置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010013994A JP5508875B2 (ja) | 2010-01-26 | 2010-01-26 | 流体制御器および流量制御装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011154433A JP2011154433A (ja) | 2011-08-11 |
JP5508875B2 true JP5508875B2 (ja) | 2014-06-04 |
Family
ID=44318930
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010013994A Active JP5508875B2 (ja) | 2010-01-26 | 2010-01-26 | 流体制御器および流量制御装置 |
Country Status (7)
Country | Link |
---|---|
US (1) | US9163748B2 (ja) |
JP (1) | JP5508875B2 (ja) |
KR (1) | KR101422973B1 (ja) |
CN (1) | CN102770697B (ja) |
DE (1) | DE112010005186B4 (ja) |
TW (1) | TWI484311B (ja) |
WO (1) | WO2011092929A1 (ja) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5613420B2 (ja) * | 2010-02-05 | 2014-10-22 | 株式会社フジキン | 流体制御器 |
KR101940325B1 (ko) | 2011-10-05 | 2019-01-18 | 가부시키가이샤 호리바 에스텍 | 유체 기구 및 상기 유체 기구를 구성하는 지지 부재 및 유체 제어 시스템 |
JP5665793B2 (ja) * | 2012-04-26 | 2015-02-04 | 株式会社フジキン | 可変オリフィス型圧力制御式流量制御器 |
US9454158B2 (en) | 2013-03-15 | 2016-09-27 | Bhushan Somani | Real time diagnostics for flow controller systems and methods |
JP6372998B2 (ja) * | 2013-12-05 | 2018-08-15 | 株式会社フジキン | 圧力式流量制御装置 |
JP6527684B2 (ja) | 2014-10-31 | 2019-06-05 | 株式会社フジキン | バルブ、流体制御装置、半導体制御装置、および半導体製造方法 |
JP6539482B2 (ja) | 2015-04-15 | 2019-07-03 | 株式会社フジキン | 遮断開放器 |
JP6786096B2 (ja) | 2016-07-28 | 2020-11-18 | 株式会社フジキン | 圧力式流量制御装置 |
US10983538B2 (en) | 2017-02-27 | 2021-04-20 | Flow Devices And Systems Inc. | Systems and methods for flow sensor back pressure adjustment for mass flow controller |
WO2019102882A1 (ja) | 2017-11-24 | 2019-05-31 | 株式会社フジキン | バルブ装置およびその制御装置を用いた制御方法、流体制御装置および半導体製造装置 |
CN110159928B (zh) * | 2018-02-13 | 2021-04-20 | 辛耘企业股份有限公司 | 流体控制装置 |
CN110107796B (zh) * | 2019-06-06 | 2024-01-02 | 山东洁普斯自动化科技有限公司 | 直通式定量阀 |
KR20230000975A (ko) * | 2021-06-25 | 2023-01-03 | 가부시키가이샤 호리바 에스텍 | 유체 제어 장치, 유체 제어 시스템, 유체 제어 장치용 프로그램 및 유체 제어 방법 |
Family Cites Families (38)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3074686A (en) * | 1959-08-26 | 1963-01-22 | Francis L Cain | Adjustable automatic valve assembly |
US3253612A (en) * | 1963-07-30 | 1966-05-31 | Sarco Company Inc | Valve having an adjustable stop |
US3565089A (en) * | 1969-01-21 | 1971-02-23 | Elkhart Brass Mfg Co | Valve |
US3712587A (en) * | 1971-05-12 | 1973-01-23 | American La France Inc | Flow restricting valve |
JPS5544266B2 (ja) * | 1974-04-10 | 1980-11-11 | ||
JPS5335640Y2 (ja) | 1976-01-23 | 1978-08-31 | ||
US4030523A (en) * | 1976-04-19 | 1977-06-21 | The United States Of America As Represented By The Secretary Of The Navy | Digital flow control system |
JPS5513411A (en) * | 1978-07-12 | 1980-01-30 | Hitachi Ltd | Control method for flow controller |
JPS5637772U (ja) * | 1979-08-30 | 1981-04-10 | ||
JPS6324486Y2 (ja) | 1980-04-15 | 1988-07-05 | ||
GB2138108B (en) | 1983-04-14 | 1986-08-06 | Apv Int Ltd | Valve units and systems incorporating valve units |
US4801051A (en) * | 1984-03-26 | 1989-01-31 | Nordson Corporation | Flow control device for a fluid dispensing apparatus |
DE3432953C2 (de) | 1984-09-07 | 1986-11-13 | Otto Tuchenhagen GmbH & Co KG, 2059 Büchen | Vorrichtung zur Anordnung und Justierung von Stellungsmeldern oder- gebern für Ventilantriebe |
US4884720A (en) * | 1987-06-05 | 1989-12-05 | The Coca-Cola Company | Post-mix beverage dispenser valve with continuous solenoid modulation |
JPS644906U (ja) | 1987-06-27 | 1989-01-12 | ||
JPH01269706A (ja) * | 1988-04-22 | 1989-10-27 | Mitsubishi Motors Corp | 2物の結合方法 |
JPH0551964U (ja) * | 1991-12-10 | 1993-07-09 | 帝人製機株式会社 | 圧力容器の初期安全装置 |
JPH11265216A (ja) | 1998-03-17 | 1999-09-28 | Omi Tadahiro | 圧力式流量制御装置 |
JP2000065240A (ja) * | 1998-08-21 | 2000-03-03 | Neriki:Kk | 止め弁 |
JP2002139161A (ja) * | 2000-11-06 | 2002-05-17 | Smc Corp | 二方弁 |
US6742541B2 (en) * | 2001-04-19 | 2004-06-01 | Asco Controls, Lp | Linear indicator for a valve |
JP4028345B2 (ja) | 2002-10-16 | 2007-12-26 | 古河電気工業株式会社 | フラットケーブル用フラット導体の設計方法及びフラットケーブル |
DE10249161B3 (de) * | 2002-10-22 | 2004-01-29 | Robert Bosch Gmbh | Vorrichtung zur Einstellung eines Ankerhubs eines Magnetventils |
CA2452809C (en) * | 2002-12-10 | 2012-05-29 | Montreal Bronze Foundry Limited | Diaphragm valve having adjustable closure means |
US6997202B2 (en) * | 2002-12-17 | 2006-02-14 | Advanced Technology Materials, Inc. | Gas storage and dispensing system for variable conductance dispensing of gas at constant flow rate |
CN1751200A (zh) * | 2003-03-07 | 2006-03-22 | 喜开理株式会社 | 流量控制阀 |
WO2004081428A2 (en) * | 2003-03-07 | 2004-09-23 | Swagelok Company | Valve with adjustable stop |
JP2004308717A (ja) * | 2003-04-03 | 2004-11-04 | Asahi Organic Chem Ind Co Ltd | 流体作動弁 |
DE20310778U1 (de) | 2003-07-14 | 2003-12-04 | Bürkert Werke GmbH & Co. KG | Stellungsmelder für Hubventilantriebe |
JP2005133404A (ja) * | 2003-10-30 | 2005-05-26 | Otis:Kk | 束体 |
EP1860359B1 (en) * | 2005-03-01 | 2013-07-10 | Fujikura Rubber Ltd. | Normally closed valve having minute flow amount regulating mechanism |
JP4856905B2 (ja) * | 2005-06-27 | 2012-01-18 | 国立大学法人東北大学 | 流量レンジ可変型流量制御装置 |
DE102006055393A1 (de) | 2006-05-05 | 2007-11-08 | Robert Bosch Gmbh | Ventil und hydraulische Steueranordnung |
JP5019283B2 (ja) * | 2006-10-11 | 2012-09-05 | Smc株式会社 | 複合安全弁 |
JP5066474B2 (ja) * | 2008-03-31 | 2012-11-07 | アズビル株式会社 | 流量制御システム |
US8033525B2 (en) * | 2008-05-13 | 2011-10-11 | Honeywell International Inc. | Valve trim adjustor for a poppet control valve |
US8490947B2 (en) * | 2009-10-01 | 2013-07-23 | Joe Leighton & Associates, Inc. | Presettable gas valve with retainer |
DE202010003659U1 (de) | 2010-03-16 | 2010-07-15 | Bürkert Werke GmbH | Vorrichtung zur Endlagenerkennung in Hubventilen, Ventilbausatz sowie Sensormodul hierfür |
-
2010
- 2010-01-26 JP JP2010013994A patent/JP5508875B2/ja active Active
- 2010-11-25 DE DE112010005186.0T patent/DE112010005186B4/de not_active Expired - Fee Related
- 2010-11-25 US US13/522,536 patent/US9163748B2/en active Active
- 2010-11-25 CN CN201080062408.1A patent/CN102770697B/zh not_active Expired - Fee Related
- 2010-11-25 KR KR1020127020849A patent/KR101422973B1/ko active IP Right Grant
- 2010-11-25 WO PCT/JP2010/070984 patent/WO2011092929A1/ja active Application Filing
-
2011
- 2011-01-25 TW TW100102552A patent/TWI484311B/zh active
Also Published As
Publication number | Publication date |
---|---|
TWI484311B (zh) | 2015-05-11 |
US20130001453A1 (en) | 2013-01-03 |
WO2011092929A1 (ja) | 2011-08-04 |
US9163748B2 (en) | 2015-10-20 |
KR101422973B1 (ko) | 2014-07-23 |
CN102770697B (zh) | 2014-07-16 |
DE112010005186T5 (de) | 2012-11-08 |
DE112010005186B4 (de) | 2020-05-28 |
JP2011154433A (ja) | 2011-08-11 |
KR20120102811A (ko) | 2012-09-18 |
CN102770697A (zh) | 2012-11-07 |
TW201140270A (en) | 2011-11-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5508875B2 (ja) | 流体制御器および流量制御装置 | |
US7337805B2 (en) | Valve with adjustable stop | |
US10372145B2 (en) | Pressure-type flow rate control device | |
RU2526900C2 (ru) | Встраиваемый регулятор давления | |
JP6799859B2 (ja) | 圧電式リニアアクチュエータ、圧電駆動バルブ及び流量制御装置 | |
US20040154466A1 (en) | Control valve positioner mounting system | |
US10261522B2 (en) | Pressure-type flow rate control device | |
AU2012362670B2 (en) | Mounting assemblies for use with fluid control devices | |
JP2008530481A (ja) | フロー調節機構を有するフロー制御デバイス | |
US20230112308A1 (en) | Arrangements and methods for controlled flow rate of pneumatic actuated valves | |
US20100089456A1 (en) | Method and apparatus for low powered and/or high pressure flow control | |
JP2021119307A5 (ja) | ||
WO2019102882A1 (ja) | バルブ装置およびその制御装置を用いた制御方法、流体制御装置および半導体製造装置 | |
WO2004092860A2 (en) | Tamper resistant pressure regulator | |
JP2006519971A (ja) | 調節ストップをもつバルブ |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20121107 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20130910 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20140225 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20140324 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5508875 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |