JPS648622A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS648622A
JPS648622A JP62164309A JP16430987A JPS648622A JP S648622 A JPS648622 A JP S648622A JP 62164309 A JP62164309 A JP 62164309A JP 16430987 A JP16430987 A JP 16430987A JP S648622 A JPS648622 A JP S648622A
Authority
JP
Japan
Prior art keywords
pattern
film
photoresist
mask
nontransparent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62164309A
Other languages
English (en)
Inventor
Takashi Matsuoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP62164309A priority Critical patent/JPS648622A/ja
Publication of JPS648622A publication Critical patent/JPS648622A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP62164309A 1987-06-30 1987-06-30 Manufacture of semiconductor device Pending JPS648622A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62164309A JPS648622A (en) 1987-06-30 1987-06-30 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62164309A JPS648622A (en) 1987-06-30 1987-06-30 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS648622A true JPS648622A (en) 1989-01-12

Family

ID=15790681

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62164309A Pending JPS648622A (en) 1987-06-30 1987-06-30 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS648622A (ja)

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