JPS5798179A - Manufacture of magnetic bubble memory element - Google Patents

Manufacture of magnetic bubble memory element

Info

Publication number
JPS5798179A
JPS5798179A JP17325880A JP17325880A JPS5798179A JP S5798179 A JPS5798179 A JP S5798179A JP 17325880 A JP17325880 A JP 17325880A JP 17325880 A JP17325880 A JP 17325880A JP S5798179 A JPS5798179 A JP S5798179A
Authority
JP
Japan
Prior art keywords
film
mask
exposed part
permalloy
manufacture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17325880A
Other languages
Japanese (ja)
Inventor
Hiroshi Umezaki
Norikazu Tsumita
Naoki Koyama
Ken Sugita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP17325880A priority Critical patent/JPS5798179A/en
Publication of JPS5798179A publication Critical patent/JPS5798179A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/32—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying conductive, insulating or magnetic material on a magnetic film, specially adapted for a thin magnetic film
    • H01F41/34—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying conductive, insulating or magnetic material on a magnetic film, specially adapted for a thin magnetic film in patterns, e.g. by lithography

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Thin Magnetic Films (AREA)

Abstract

PURPOSE:To form a conductor pattern and a permalloy pattern with high accuracy, by using a specific material for a laminated film on a wafer, and further improving the 1 mask method. CONSTITUTION:The first insulator film 2 consisting of Al2O3, etc., a conductive substance film 3, the second insulating film 4 consisting of Al2O3, etc., a permalloy film 5, a mask film, and a photoresist film are laminated in order and are made to adhere on a substrate 1 having a magnetic garnet film. Subsequently, resist patterns 7, 8 which are partially different in thickness are formed by an exposure, an exposed part of a mask film 6 is removed by means of plasma etching by making said patterns a mask, and after that, an exposed part of the permalloy film 5 is removed by means of ion-milling. Furthermore, an exposed part of the mask film 6 is removed by means of plasma etching, an exposed part of the second insulating film 4 and the conductive substance film 4 being under said second insulating film are removed by means of ion-milling, and after that, the resist patterns 7, 8 are removed.
JP17325880A 1980-12-10 1980-12-10 Manufacture of magnetic bubble memory element Pending JPS5798179A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17325880A JPS5798179A (en) 1980-12-10 1980-12-10 Manufacture of magnetic bubble memory element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17325880A JPS5798179A (en) 1980-12-10 1980-12-10 Manufacture of magnetic bubble memory element

Publications (1)

Publication Number Publication Date
JPS5798179A true JPS5798179A (en) 1982-06-18

Family

ID=15957104

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17325880A Pending JPS5798179A (en) 1980-12-10 1980-12-10 Manufacture of magnetic bubble memory element

Country Status (1)

Country Link
JP (1) JPS5798179A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6174196A (en) * 1984-09-19 1986-04-16 Fujitsu Ltd Manufacture of magnetic bubble memory element

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6174196A (en) * 1984-09-19 1986-04-16 Fujitsu Ltd Manufacture of magnetic bubble memory element

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