JPS54148338A - Manufacture of magnetic detector - Google Patents

Manufacture of magnetic detector

Info

Publication number
JPS54148338A
JPS54148338A JP5678078A JP5678078A JPS54148338A JP S54148338 A JPS54148338 A JP S54148338A JP 5678078 A JP5678078 A JP 5678078A JP 5678078 A JP5678078 A JP 5678078A JP S54148338 A JPS54148338 A JP S54148338A
Authority
JP
Japan
Prior art keywords
detector
conductor film
conductor
magnetic
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5678078A
Other languages
Japanese (ja)
Other versions
JPS6110909B2 (en
Inventor
Sotaro Edokoro
Hiroshi Gokan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP5678078A priority Critical patent/JPS54148338A/en
Priority to US06/036,983 priority patent/US4302822A/en
Publication of JPS54148338A publication Critical patent/JPS54148338A/en
Priority to US06/266,105 priority patent/US4390404A/en
Publication of JPS6110909B2 publication Critical patent/JPS6110909B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Thin Magnetic Films (AREA)
  • Hall/Mr Elements (AREA)

Abstract

PURPOSE: To manufacture the magnetic detector by decreasing the contact resistance between the conductor pattern and the detector pattern with no magnetic film remaining under the conductor pattern, and thus to reduce the manufacturing processes as well as to improve the bubble transfer characteristics.
CONSTITUTION: The conductor film is formed by coating the conductor film on the substrate in a fixed thickness; the fixed detector region resist pattern is formed larger than the shape of the detector; and the conductor film is formed through the ion milling method. Then the soft magnetic conductor film for the magnetic detector is coated with no exfoliation of the mask material used for the procesing. And the soft magnetic conductor film is removed by lift-off of the mask material at the areas except for the detector region, and the conductor and the soft conductor film for the detector are formed at one time by the ion milling processing. The first ion milling is put in obliquely.
COPYRIGHT: (C)1979,JPO&Japio
JP5678078A 1978-05-12 1978-05-12 Manufacture of magnetic detector Granted JPS54148338A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP5678078A JPS54148338A (en) 1978-05-12 1978-05-12 Manufacture of magnetic detector
US06/036,983 US4302822A (en) 1978-05-12 1979-05-08 Thin-film magnetic bubble domain detection device and process for manufacturing the same
US06/266,105 US4390404A (en) 1978-05-12 1981-05-21 Process for manufacture of thin-film magnetic bubble domain detection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5678078A JPS54148338A (en) 1978-05-12 1978-05-12 Manufacture of magnetic detector

Publications (2)

Publication Number Publication Date
JPS54148338A true JPS54148338A (en) 1979-11-20
JPS6110909B2 JPS6110909B2 (en) 1986-03-31

Family

ID=13036941

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5678078A Granted JPS54148338A (en) 1978-05-12 1978-05-12 Manufacture of magnetic detector

Country Status (1)

Country Link
JP (1) JPS54148338A (en)

Also Published As

Publication number Publication date
JPS6110909B2 (en) 1986-03-31

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