JPS54148338A - Manufacture of magnetic detector - Google Patents
Manufacture of magnetic detectorInfo
- Publication number
- JPS54148338A JPS54148338A JP5678078A JP5678078A JPS54148338A JP S54148338 A JPS54148338 A JP S54148338A JP 5678078 A JP5678078 A JP 5678078A JP 5678078 A JP5678078 A JP 5678078A JP S54148338 A JPS54148338 A JP S54148338A
- Authority
- JP
- Japan
- Prior art keywords
- detector
- conductor film
- conductor
- magnetic
- pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Thin Magnetic Films (AREA)
- Hall/Mr Elements (AREA)
Abstract
PURPOSE: To manufacture the magnetic detector by decreasing the contact resistance between the conductor pattern and the detector pattern with no magnetic film remaining under the conductor pattern, and thus to reduce the manufacturing processes as well as to improve the bubble transfer characteristics.
CONSTITUTION: The conductor film is formed by coating the conductor film on the substrate in a fixed thickness; the fixed detector region resist pattern is formed larger than the shape of the detector; and the conductor film is formed through the ion milling method. Then the soft magnetic conductor film for the magnetic detector is coated with no exfoliation of the mask material used for the procesing. And the soft magnetic conductor film is removed by lift-off of the mask material at the areas except for the detector region, and the conductor and the soft conductor film for the detector are formed at one time by the ion milling processing. The first ion milling is put in obliquely.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5678078A JPS54148338A (en) | 1978-05-12 | 1978-05-12 | Manufacture of magnetic detector |
US06/036,983 US4302822A (en) | 1978-05-12 | 1979-05-08 | Thin-film magnetic bubble domain detection device and process for manufacturing the same |
US06/266,105 US4390404A (en) | 1978-05-12 | 1981-05-21 | Process for manufacture of thin-film magnetic bubble domain detection device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5678078A JPS54148338A (en) | 1978-05-12 | 1978-05-12 | Manufacture of magnetic detector |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54148338A true JPS54148338A (en) | 1979-11-20 |
JPS6110909B2 JPS6110909B2 (en) | 1986-03-31 |
Family
ID=13036941
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5678078A Granted JPS54148338A (en) | 1978-05-12 | 1978-05-12 | Manufacture of magnetic detector |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54148338A (en) |
-
1978
- 1978-05-12 JP JP5678078A patent/JPS54148338A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6110909B2 (en) | 1986-03-31 |
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