JPS6481361A - Manufacture of tunnel transistor - Google Patents
Manufacture of tunnel transistorInfo
- Publication number
- JPS6481361A JPS6481361A JP62237395A JP23739587A JPS6481361A JP S6481361 A JPS6481361 A JP S6481361A JP 62237395 A JP62237395 A JP 62237395A JP 23739587 A JP23739587 A JP 23739587A JP S6481361 A JPS6481361 A JP S6481361A
- Authority
- JP
- Japan
- Prior art keywords
- oxide film
- silicon
- superhigh vacuum
- substrate
- silicon oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 5
- 229910052710 silicon Inorganic materials 0.000 abstract 5
- 239000010703 silicon Substances 0.000 abstract 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 4
- 229910052814 silicon oxide Inorganic materials 0.000 abstract 4
- 239000000758 substrate Substances 0.000 abstract 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 2
- 229910052760 oxygen Inorganic materials 0.000 abstract 2
- 239000001301 oxygen Substances 0.000 abstract 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 abstract 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- 229910052796 boron Inorganic materials 0.000 abstract 1
- 238000005229 chemical vapour deposition Methods 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 150000002500 ions Chemical class 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 230000003647 oxidation Effects 0.000 abstract 1
- 238000007254 oxidation reaction Methods 0.000 abstract 1
- 230000001590 oxidative effect Effects 0.000 abstract 1
Landscapes
- Bipolar Transistors (AREA)
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62237395A JPS6481361A (en) | 1987-09-24 | 1987-09-24 | Manufacture of tunnel transistor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62237395A JPS6481361A (en) | 1987-09-24 | 1987-09-24 | Manufacture of tunnel transistor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6481361A true JPS6481361A (en) | 1989-03-27 |
| JPH0573353B2 JPH0573353B2 (enrdf_load_stackoverflow) | 1993-10-14 |
Family
ID=17014757
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62237395A Granted JPS6481361A (en) | 1987-09-24 | 1987-09-24 | Manufacture of tunnel transistor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6481361A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH022130A (ja) * | 1988-06-14 | 1990-01-08 | Nippon Telegr & Teleph Corp <Ntt> | シリコン熱酸化膜形成方法および形成装置 |
| WO2002073678A1 (en) * | 2001-03-10 | 2002-09-19 | Nanos Aps | Method for oxidation of a silicon substrate |
| JP2006210564A (ja) * | 2005-01-27 | 2006-08-10 | Matsushita Electric Ind Co Ltd | バイポーラトランジスタの製造方法およびそれを用いたバイポーラトランジスタ |
-
1987
- 1987-09-24 JP JP62237395A patent/JPS6481361A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH022130A (ja) * | 1988-06-14 | 1990-01-08 | Nippon Telegr & Teleph Corp <Ntt> | シリコン熱酸化膜形成方法および形成装置 |
| WO2002073678A1 (en) * | 2001-03-10 | 2002-09-19 | Nanos Aps | Method for oxidation of a silicon substrate |
| JP2006210564A (ja) * | 2005-01-27 | 2006-08-10 | Matsushita Electric Ind Co Ltd | バイポーラトランジスタの製造方法およびそれを用いたバイポーラトランジスタ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0573353B2 (enrdf_load_stackoverflow) | 1993-10-14 |
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