JPS6481293A - Manufacture of fine circuit - Google Patents

Manufacture of fine circuit

Info

Publication number
JPS6481293A
JPS6481293A JP62238417A JP23841787A JPS6481293A JP S6481293 A JPS6481293 A JP S6481293A JP 62238417 A JP62238417 A JP 62238417A JP 23841787 A JP23841787 A JP 23841787A JP S6481293 A JPS6481293 A JP S6481293A
Authority
JP
Japan
Prior art keywords
circuit
irradiated
ceramic
superconductor
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62238417A
Other languages
Japanese (ja)
Inventor
Eiji Sugata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP62238417A priority Critical patent/JPS6481293A/en
Publication of JPS6481293A publication Critical patent/JPS6481293A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/105—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by conversion of non-conductive material on or in the support into conductive material, e.g. by using an energy beam

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)

Abstract

PURPOSE:To manufacture a fine circuit by using a simple means whose cost of installation is low by a method wherein a ceramic thin film capable of becoming a superconductor is formed on a substrate and this thin film is irradiated with an electron beam or a laser. CONSTITUTION:A ceramic thin layer 2 is formed on a substrate 1 composed of an insulator such as a ceramic or the like in such a way that a pasty ceramic capable of becoming a superconductor is coated, sputtered or the like. Then, a part to be used as a circuit in the thin layer 2 is irradiated with an ion beam according to a need; a very small quantity of composition in the part to be used as the circuit is adjusted. Then, the part to be used as the circuit is irradiated with an electron beam 3 or a laser; the part to be used as the circuit is baked; a fine circuit 4 composed of the superconductor is formed. Accordingly, when a position to be irradiated with the electron beam 3 or the ion beam and a heating temperature are controlled by using a computer, the arbitrary circuit can be formed; the structure thus formed is simple and a cost of installation is low.
JP62238417A 1987-09-22 1987-09-22 Manufacture of fine circuit Pending JPS6481293A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62238417A JPS6481293A (en) 1987-09-22 1987-09-22 Manufacture of fine circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62238417A JPS6481293A (en) 1987-09-22 1987-09-22 Manufacture of fine circuit

Publications (1)

Publication Number Publication Date
JPS6481293A true JPS6481293A (en) 1989-03-27

Family

ID=17029897

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62238417A Pending JPS6481293A (en) 1987-09-22 1987-09-22 Manufacture of fine circuit

Country Status (1)

Country Link
JP (1) JPS6481293A (en)

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