JPS6477977A - Manufacture of superconductive wiring circuit - Google Patents
Manufacture of superconductive wiring circuitInfo
- Publication number
- JPS6477977A JPS6477977A JP62235087A JP23508787A JPS6477977A JP S6477977 A JPS6477977 A JP S6477977A JP 62235087 A JP62235087 A JP 62235087A JP 23508787 A JP23508787 A JP 23508787A JP S6477977 A JPS6477977 A JP S6477977A
- Authority
- JP
- Japan
- Prior art keywords
- superconductive
- thin film
- high energy
- energy beam
- wiring pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0268—Manufacture or treatment of devices comprising copper oxide
- H10N60/0661—After-treatment, e.g. patterning
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
Abstract
PURPOSE:To make a wiring pattern minute, by applying a superconductive material as a paste state on a substrate, projecting a high energy beam on the applied superconductive material in a required pattern, sintering the material, and removing a part that is not sintered. CONSTITUTION:A superconductive thin film 2 comprising the paste of an oxide superconductive material is coated uniformly on one surface of a wiring substrate 1, while a high energy beam 3 such as laser light is projected through a condenser lens 4. In the first stage, the high energy beam at about 200 deg.C is projected, and the superconductive thin film 2 is made insoluble in accordance with the required wiring pattern. Thereafter, the superconductive thin film 2 is washed with ethanol and the like, and a part that is not sintered is removed. In the second stage, a high energy beam 3 at about 900 deg.C is projected on a wiring pattern 5, and main sintering is performed. The wiring width of the wiring pattern can be miniaturized less than several mum when the applied thickness of the thin film 2 is 1mum.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62235087A JPS6477977A (en) | 1987-09-18 | 1987-09-18 | Manufacture of superconductive wiring circuit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62235087A JPS6477977A (en) | 1987-09-18 | 1987-09-18 | Manufacture of superconductive wiring circuit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6477977A true JPS6477977A (en) | 1989-03-23 |
Family
ID=16980873
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62235087A Pending JPS6477977A (en) | 1987-09-18 | 1987-09-18 | Manufacture of superconductive wiring circuit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6477977A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0317495A2 (en) * | 1987-11-18 | 1989-05-24 | International Business Machines Corporation | Fabrication of patterned lines of high-TC superconductors |
| JPH01184897A (en) * | 1988-01-13 | 1989-07-24 | Shinko Electric Ind Co Ltd | Formation of circuit pattern and conductor producing composition used therefor |
-
1987
- 1987-09-18 JP JP62235087A patent/JPS6477977A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0317495A2 (en) * | 1987-11-18 | 1989-05-24 | International Business Machines Corporation | Fabrication of patterned lines of high-TC superconductors |
| JPH01184897A (en) * | 1988-01-13 | 1989-07-24 | Shinko Electric Ind Co Ltd | Formation of circuit pattern and conductor producing composition used therefor |
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