JPS647522A - X-ray mask and manufacture thereof - Google Patents

X-ray mask and manufacture thereof

Info

Publication number
JPS647522A
JPS647522A JP16107787A JP16107787A JPS647522A JP S647522 A JPS647522 A JP S647522A JP 16107787 A JP16107787 A JP 16107787A JP 16107787 A JP16107787 A JP 16107787A JP S647522 A JPS647522 A JP S647522A
Authority
JP
Japan
Prior art keywords
silicon
masking material
ray mask
ray
grooves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16107787A
Other languages
English (en)
Inventor
Masayoshi Ino
Shintaro Ushio
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP16107787A priority Critical patent/JPS647522A/ja
Publication of JPS647522A publication Critical patent/JPS647522A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Drying Of Semiconductors (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
JP16107787A 1987-06-30 1987-06-30 X-ray mask and manufacture thereof Pending JPS647522A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16107787A JPS647522A (en) 1987-06-30 1987-06-30 X-ray mask and manufacture thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16107787A JPS647522A (en) 1987-06-30 1987-06-30 X-ray mask and manufacture thereof

Publications (1)

Publication Number Publication Date
JPS647522A true JPS647522A (en) 1989-01-11

Family

ID=15728189

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16107787A Pending JPS647522A (en) 1987-06-30 1987-06-30 X-ray mask and manufacture thereof

Country Status (1)

Country Link
JP (1) JPS647522A (ja)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02187025A (ja) * 1989-01-13 1990-07-23 Sanyo Electric Co Ltd エッチング方法及びｘ線リソグラフィ用マスクの製造方法
US5065111A (en) * 1989-06-12 1991-11-12 Oki Electric Industry Co., Ltd. Differential amplifying circuit operable at high speed
US5772687A (en) * 1993-03-12 1998-06-30 Saito; Yoshikuni Hub for syringe, connecting structure of hub, syringe, syringe assembly and method of assembling syringe assembly
US5879339A (en) * 1993-06-29 1999-03-09 Saito; Yoshikuni Hub for syringe, connecting structure of hub, syringe, piston, needle assembly unit, connecting structure between needle assembly unit and syringe, syringe assembly and method of assembling syringe assembly
JP2008310092A (ja) * 2007-06-15 2008-12-25 Shin Etsu Chem Co Ltd フォトマスク
WO2023284010A1 (zh) * 2021-07-13 2023-01-19 长鑫存储技术有限公司 一种半导体结构制作方法、半导体结构及存储器

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53104176A (en) * 1977-02-24 1978-09-11 Oki Electric Ind Co Ltd Mask for x-ray exposure
JPS58202526A (ja) * 1982-05-21 1983-11-25 Hitachi Ltd Ｘ線露光用マスクの製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53104176A (en) * 1977-02-24 1978-09-11 Oki Electric Ind Co Ltd Mask for x-ray exposure
JPS58202526A (ja) * 1982-05-21 1983-11-25 Hitachi Ltd Ｘ線露光用マスクの製造方法

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02187025A (ja) * 1989-01-13 1990-07-23 Sanyo Electric Co Ltd エッチング方法及びｘ線リソグラフィ用マスクの製造方法
US5065111A (en) * 1989-06-12 1991-11-12 Oki Electric Industry Co., Ltd. Differential amplifying circuit operable at high speed
US5772687A (en) * 1993-03-12 1998-06-30 Saito; Yoshikuni Hub for syringe, connecting structure of hub, syringe, syringe assembly and method of assembling syringe assembly
US5879339A (en) * 1993-06-29 1999-03-09 Saito; Yoshikuni Hub for syringe, connecting structure of hub, syringe, piston, needle assembly unit, connecting structure between needle assembly unit and syringe, syringe assembly and method of assembling syringe assembly
JP2008310092A (ja) * 2007-06-15 2008-12-25 Shin Etsu Chem Co Ltd フォトマスク
WO2023284010A1 (zh) * 2021-07-13 2023-01-19 长鑫存储技术有限公司 一种半导体结构制作方法、半导体结构及存储器

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