JPS6472026A - Lens evaluating method - Google Patents
Lens evaluating methodInfo
- Publication number
- JPS6472026A JPS6472026A JP22825387A JP22825387A JPS6472026A JP S6472026 A JPS6472026 A JP S6472026A JP 22825387 A JP22825387 A JP 22825387A JP 22825387 A JP22825387 A JP 22825387A JP S6472026 A JPS6472026 A JP S6472026A
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- film
- resist
- etched
- lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Testing Of Optical Devices Or Fibers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22825387A JPS6472026A (en) | 1987-09-14 | 1987-09-14 | Lens evaluating method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22825387A JPS6472026A (en) | 1987-09-14 | 1987-09-14 | Lens evaluating method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6472026A true JPS6472026A (en) | 1989-03-16 |
JPH0474656B2 JPH0474656B2 (ja) | 1992-11-26 |
Family
ID=16873568
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP22825387A Granted JPS6472026A (en) | 1987-09-14 | 1987-09-14 | Lens evaluating method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6472026A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10176974A (ja) * | 1996-12-19 | 1998-06-30 | Nikon Corp | 投影光学系の収差測定方法 |
JP2007325508A (ja) * | 2006-06-06 | 2007-12-20 | Ryobi Ltd | ロータリ芝刈り機 |
-
1987
- 1987-09-14 JP JP22825387A patent/JPS6472026A/ja active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10176974A (ja) * | 1996-12-19 | 1998-06-30 | Nikon Corp | 投影光学系の収差測定方法 |
JP2007325508A (ja) * | 2006-06-06 | 2007-12-20 | Ryobi Ltd | ロータリ芝刈り機 |
Also Published As
Publication number | Publication date |
---|---|
JPH0474656B2 (ja) | 1992-11-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |