JPS6466905A - Manufacture of thermistor - Google Patents
Manufacture of thermistorInfo
- Publication number
- JPS6466905A JPS6466905A JP22289487A JP22289487A JPS6466905A JP S6466905 A JPS6466905 A JP S6466905A JP 22289487 A JP22289487 A JP 22289487A JP 22289487 A JP22289487 A JP 22289487A JP S6466905 A JPS6466905 A JP S6466905A
- Authority
- JP
- Japan
- Prior art keywords
- film
- resist film
- section
- resist
- inorganic insulating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000010408 film Substances 0.000 abstract 17
- 239000007788 liquid Substances 0.000 abstract 2
- 239000010409 thin film Substances 0.000 abstract 2
- 230000002378 acidificating effect Effects 0.000 abstract 1
- 238000000151 deposition Methods 0.000 abstract 1
- 239000003960 organic solvent Substances 0.000 abstract 1
- 239000000126 substance Substances 0.000 abstract 1
Landscapes
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Thermistors And Varistors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22289487A JPS6466905A (en) | 1987-09-08 | 1987-09-08 | Manufacture of thermistor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22289487A JPS6466905A (en) | 1987-09-08 | 1987-09-08 | Manufacture of thermistor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6466905A true JPS6466905A (en) | 1989-03-13 |
JPH0421321B2 JPH0421321B2 (enrdf_load_stackoverflow) | 1992-04-09 |
Family
ID=16789531
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP22289487A Granted JPS6466905A (en) | 1987-09-08 | 1987-09-08 | Manufacture of thermistor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6466905A (enrdf_load_stackoverflow) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61188502A (ja) * | 1985-02-18 | 1986-08-22 | Matsushita Electric Ind Co Ltd | 光素子の製造方法 |
-
1987
- 1987-09-08 JP JP22289487A patent/JPS6466905A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61188502A (ja) * | 1985-02-18 | 1986-08-22 | Matsushita Electric Ind Co Ltd | 光素子の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH0421321B2 (enrdf_load_stackoverflow) | 1992-04-09 |
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