JPS645880Y2 - - Google Patents

Info

Publication number
JPS645880Y2
JPS645880Y2 JP1982009467U JP946782U JPS645880Y2 JP S645880 Y2 JPS645880 Y2 JP S645880Y2 JP 1982009467 U JP1982009467 U JP 1982009467U JP 946782 U JP946782 U JP 946782U JP S645880 Y2 JPS645880 Y2 JP S645880Y2
Authority
JP
Japan
Prior art keywords
wafer
water supply
pair
basket
supply box
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982009467U
Other languages
English (en)
Japanese (ja)
Other versions
JPS58114042U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP946782U priority Critical patent/JPS58114042U/ja
Publication of JPS58114042U publication Critical patent/JPS58114042U/ja
Application granted granted Critical
Publication of JPS645880Y2 publication Critical patent/JPS645880Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
JP946782U 1982-01-28 1982-01-28 シリコンウエハ−の洗浄装置 Granted JPS58114042U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP946782U JPS58114042U (ja) 1982-01-28 1982-01-28 シリコンウエハ−の洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP946782U JPS58114042U (ja) 1982-01-28 1982-01-28 シリコンウエハ−の洗浄装置

Publications (2)

Publication Number Publication Date
JPS58114042U JPS58114042U (ja) 1983-08-04
JPS645880Y2 true JPS645880Y2 (OSRAM) 1989-02-14

Family

ID=30022103

Family Applications (1)

Application Number Title Priority Date Filing Date
JP946782U Granted JPS58114042U (ja) 1982-01-28 1982-01-28 シリコンウエハ−の洗浄装置

Country Status (1)

Country Link
JP (1) JPS58114042U (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH084080B2 (ja) * 1986-02-14 1996-01-17 ロ−ム株式会社 半導体ウエハ用洗浄装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3772868A (en) * 1971-08-26 1973-11-20 Electrospin Corp Fiber conveying device for an open-end spinning apparatus

Also Published As

Publication number Publication date
JPS58114042U (ja) 1983-08-04

Similar Documents

Publication Publication Date Title
JP2520833B2 (ja) 浸漬式の液処理装置
JP2901098B2 (ja) 洗浄装置および洗浄方法
US6273802B1 (en) Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device
JPH0573245B2 (OSRAM)
JP3341727B2 (ja) ウエット装置
JP2003093978A (ja) キャリヤプレートの洗浄方法及び装置
JPS645880Y2 (OSRAM)
JPH01120828A (ja) 半導体ウエハの自動洗浄装置
JP3155147B2 (ja) 基板処理装置
CN211700203U (zh) 一种半导体抛光片清洗设备
JP3066986B2 (ja) ウエット処理装置及びウエット処理方法
JPH0670962B2 (ja) 浸漬式の液処理装置
JP3641707B2 (ja) 現像処理装置および現像処理方法
JPH0115178Y2 (OSRAM)
JPS61133633A (ja) 半導体ウエ−ハの洗浄装置
JPS63152123A (ja) 浸漬式の液処理装置
JPH0155573B2 (OSRAM)
JPH0463539B2 (OSRAM)
JPH11162907A (ja) 洗浄方法
JPH0814891B2 (ja) ディスク基板用洗浄装置
JPH0331432Y2 (OSRAM)
JPH03228330A (ja) エッチング装置
JPS6347258B2 (OSRAM)
JPH0493046A (ja) ウェハー移載装置
JPH06252072A (ja) 基板処理装置