JPS6457637A - Method and apparatus for handling wafer - Google Patents
Method and apparatus for handling waferInfo
- Publication number
- JPS6457637A JPS6457637A JP63118423A JP11842388A JPS6457637A JP S6457637 A JPS6457637 A JP S6457637A JP 63118423 A JP63118423 A JP 63118423A JP 11842388 A JP11842388 A JP 11842388A JP S6457637 A JPS6457637 A JP S6457637A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- handler
- bump
- ports
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
- B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/141—Associated with semiconductor wafer handling includes means for gripping wafer
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/053,980 US4773687A (en) | 1987-05-22 | 1987-05-22 | Wafer handler |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6457637A true JPS6457637A (en) | 1989-03-03 |
JPH0322058B2 JPH0322058B2 (ja) | 1991-03-26 |
Family
ID=21987890
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP63118423A Granted JPS6457637A (en) | 1987-05-22 | 1988-05-17 | Method and apparatus for handling wafer |
Country Status (3)
Country | Link |
---|---|
US (1) | US4773687A (ja) |
EP (1) | EP0295785A1 (ja) |
JP (1) | JPS6457637A (ja) |
Families Citing this family (44)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2624778B1 (fr) * | 1987-12-22 | 1994-09-23 | Recif Sa | Embout pour pipette a vide |
JP2865690B2 (ja) * | 1989-02-17 | 1999-03-08 | 株式会社日立製作所 | 嵌合挿入装置 |
US5292222A (en) * | 1992-03-31 | 1994-03-08 | International Business Machines Corporation | Robotic load device for outer diameter pickup of a disk |
USH1373H (en) * | 1992-04-06 | 1994-11-01 | American Telephone And Telegraph Company | Wafer handling apparatus and method |
DE4309092C2 (de) * | 1993-03-22 | 1998-11-12 | Joachim Dr Scheerer | Verfahren und Vorrichtung zur Handhabung und zum Transport von Wafern in Reinst-Räumen |
EP0634787B1 (en) * | 1993-07-15 | 1997-05-02 | Applied Materials, Inc. | Subsrate tray and ceramic blade for semiconductor processing apparatus |
US5697748A (en) * | 1993-07-15 | 1997-12-16 | Applied Materials, Inc. | Wafer tray and ceramic blade for semiconductor processing apparatus |
KR0175013B1 (ko) * | 1995-09-13 | 1999-04-01 | 김광호 | 진공 트위저를 사용하는 반도체 제조장치 |
KR0163548B1 (ko) * | 1995-12-18 | 1999-02-01 | 김광호 | 진공튀저 |
US5783754A (en) * | 1996-02-28 | 1998-07-21 | Integrated Device Technology, Inc. | Apparatus and method for measuring the gripping strength of a vacuum wand |
US5765890A (en) * | 1996-10-03 | 1998-06-16 | Memc Electronic Materials, Inc. | Device for transferring a semiconductor wafer |
JP3850951B2 (ja) * | 1997-05-15 | 2006-11-29 | 東京エレクトロン株式会社 | 基板搬送装置及び基板搬送方法 |
US5915910A (en) * | 1997-08-29 | 1999-06-29 | Daitron, Inc. | Semiconductor wafer transfer method and apparatus |
US6183186B1 (en) | 1997-08-29 | 2001-02-06 | Daitron, Inc. | Wafer handling system and method |
US6168697B1 (en) | 1998-03-10 | 2001-01-02 | Trusi Technologies Llc | Holders suitable to hold articles during processing and article processing methods |
US6095582A (en) * | 1998-03-11 | 2000-08-01 | Trusi Technologies, Llc | Article holders and holding methods |
ATE305434T1 (de) * | 1998-03-13 | 2005-10-15 | Pronomic Ab | Vakuum ejektor mit einer anzahl von saugnäpfen |
WO2000078654A1 (en) * | 1999-06-17 | 2000-12-28 | Speedfam-Ipec Corporation | Improved wafer handling apparatus |
US6322116B1 (en) | 1999-07-23 | 2001-11-27 | Asm America, Inc. | Non-contact end effector |
US6517130B1 (en) * | 2000-03-14 | 2003-02-11 | Applied Materials, Inc. | Self positioning vacuum chuck |
US6474864B1 (en) * | 2000-03-24 | 2002-11-05 | Eastman Kodak Company | Comfort-enhancing intraoral dental radiographic film packet and method for forming same |
US6631935B1 (en) | 2000-08-04 | 2003-10-14 | Tru-Si Technologies, Inc. | Detection and handling of semiconductor wafer and wafer-like objects |
US6578893B2 (en) | 2000-10-02 | 2003-06-17 | Ajs Automation, Inc. | Apparatus and methods for handling semiconductor wafers |
US6612590B2 (en) * | 2001-01-12 | 2003-09-02 | Tokyo Electron Limited | Apparatus and methods for manipulating semiconductor wafers |
US6935830B2 (en) | 2001-07-13 | 2005-08-30 | Tru-Si Technologies, Inc. | Alignment of semiconductor wafers and other articles |
US6615113B2 (en) * | 2001-07-13 | 2003-09-02 | Tru-Si Technologies, Inc. | Articles holders with sensors detecting a type of article held by the holder |
US6638004B2 (en) | 2001-07-13 | 2003-10-28 | Tru-Si Technologies, Inc. | Article holders and article positioning methods |
US20030062734A1 (en) * | 2001-10-02 | 2003-04-03 | Faris Sadeg M. | Device and method for handling fragile objects, and manufacturing method thereof |
US7104578B2 (en) * | 2002-03-15 | 2006-09-12 | Asm International N.V. | Two level end effector |
KR20040001423A (ko) * | 2002-06-28 | 2004-01-07 | 삼성전자주식회사 | 웨이퍼 이송장치의 로봇 암 청소장치 |
US6893070B2 (en) * | 2002-10-17 | 2005-05-17 | Delaware Capital Formation, Inc. | Integrated end effector |
US20040212205A1 (en) * | 2003-01-30 | 2004-10-28 | Linker Frank V. | Method and apparatus for handling semiconductor wafers and interleafs |
US7181132B2 (en) | 2003-08-20 | 2007-02-20 | Asm International N.V. | Method and system for loading substrate supports into a substrate holder |
CN101023011A (zh) * | 2004-07-09 | 2007-08-22 | Oc欧瑞康巴尔斯公司 | 气体支撑的基底承载机构 |
US8635784B2 (en) * | 2005-10-04 | 2014-01-28 | Applied Materials, Inc. | Methods and apparatus for drying a substrate |
JP4642787B2 (ja) * | 2006-05-09 | 2011-03-02 | 東京エレクトロン株式会社 | 基板搬送装置及び縦型熱処理装置 |
JP4746003B2 (ja) * | 2007-05-07 | 2011-08-10 | リンテック株式会社 | 移載装置及び移載方法 |
ITUD20090214A1 (it) * | 2009-11-24 | 2011-05-25 | Applied Materials Inc | Effettore d'estremita' per la manipolazione di substrati |
US8905680B2 (en) | 2011-10-31 | 2014-12-09 | Masahiro Lee | Ultrathin wafer transport systems |
JP2013198960A (ja) * | 2012-03-26 | 2013-10-03 | Disco Corp | ロボットハンド |
DE102012111869A1 (de) | 2012-12-06 | 2014-06-12 | Aixtron Se | Vakuumgreifvorrichtung |
JP6128050B2 (ja) * | 2014-04-25 | 2017-05-17 | トヨタ自動車株式会社 | 非接触型搬送ハンド |
JP6305272B2 (ja) * | 2014-08-14 | 2018-04-04 | 株式会社ディスコ | 搬送装置 |
CN107953093A (zh) * | 2016-10-17 | 2018-04-24 | 重庆市钟表有限公司 | 真空吸附型E-Ring装配治具 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5525037U (ja) * | 1978-08-05 | 1980-02-18 | ||
JPS56107896A (en) * | 1980-01-23 | 1981-08-27 | Hitachi Ltd | Suction type vacuum tweezer |
JPS6088548U (ja) * | 1983-11-22 | 1985-06-18 | 三菱電機株式会社 | 半導体ウエ−ハの真空吸着具 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3200723A (en) * | 1963-03-29 | 1965-08-17 | Polaroid Corp | Shutter timing apparatus |
US3431009A (en) * | 1967-01-06 | 1969-03-04 | Western Electric Co | Pickup device for supporting workpieces on a layer of fluid |
US3523706A (en) * | 1967-10-27 | 1970-08-11 | Ibm | Apparatus for supporting articles without structural contact and for positioning the supported articles |
US3539216A (en) * | 1968-01-11 | 1970-11-10 | Sprague Electric Co | Pickup device |
US3517958A (en) * | 1968-06-17 | 1970-06-30 | Ibm | Vacuum pick-up with air shield |
GB1513444A (en) * | 1974-09-06 | 1978-06-07 | Chemical Reactor Equip As | Pick-up devices for lifting and moving semiconductor wafers |
DE2609754A1 (de) * | 1976-03-09 | 1977-09-22 | Wacker Chemitronic | Halterung fuer das beidseitig beruehrungslose aufnehmen von scheiben |
US4029351A (en) * | 1976-06-02 | 1977-06-14 | International Business Machines Corporation | Bernoulli pickup head with self-restoring anti-tilt improvement |
DE3036829A1 (de) * | 1980-09-30 | 1982-05-13 | Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH, 8263 Burghausen | Verfahren zum aufnehmen von kristallscheiben |
FR2539373A1 (fr) * | 1983-01-14 | 1984-07-20 | Renault Vehicules Ind | Dispositif de liaison d'un tracteur a une semi-remorque |
US4566726A (en) * | 1984-06-13 | 1986-01-28 | At&T Technologies, Inc. | Method and apparatus for handling semiconductor wafers |
DE3686781D1 (de) * | 1985-05-04 | 1992-10-29 | Seibu Giken Kk | Vorrichtung zum halten und/oder foerdern einer platte mittels eines fluids ohne koerperliche beruehrung. |
-
1987
- 1987-05-22 US US07/053,980 patent/US4773687A/en not_active Expired - Lifetime
-
1988
- 1988-05-13 EP EP88304333A patent/EP0295785A1/en not_active Ceased
- 1988-05-17 JP JP63118423A patent/JPS6457637A/ja active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5525037U (ja) * | 1978-08-05 | 1980-02-18 | ||
JPS56107896A (en) * | 1980-01-23 | 1981-08-27 | Hitachi Ltd | Suction type vacuum tweezer |
JPS6088548U (ja) * | 1983-11-22 | 1985-06-18 | 三菱電機株式会社 | 半導体ウエ−ハの真空吸着具 |
Also Published As
Publication number | Publication date |
---|---|
JPH0322058B2 (ja) | 1991-03-26 |
US4773687A (en) | 1988-09-27 |
EP0295785A1 (en) | 1988-12-21 |
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