JPS56107896A - Suction type vacuum tweezer - Google Patents
Suction type vacuum tweezerInfo
- Publication number
- JPS56107896A JPS56107896A JP570180A JP570180A JPS56107896A JP S56107896 A JPS56107896 A JP S56107896A JP 570180 A JP570180 A JP 570180A JP 570180 A JP570180 A JP 570180A JP S56107896 A JPS56107896 A JP S56107896A
- Authority
- JP
- Japan
- Prior art keywords
- type vacuum
- suction type
- vacuum tweezer
- tweezer
- suction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Manipulator (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP570180A JPS56107896A (en) | 1980-01-23 | 1980-01-23 | Suction type vacuum tweezer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP570180A JPS56107896A (en) | 1980-01-23 | 1980-01-23 | Suction type vacuum tweezer |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS56107896A true JPS56107896A (en) | 1981-08-27 |
Family
ID=11618404
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP570180A Pending JPS56107896A (en) | 1980-01-23 | 1980-01-23 | Suction type vacuum tweezer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56107896A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6457637A (en) * | 1987-05-22 | 1989-03-03 | American Telephone & Telegraph | Method and apparatus for handling wafer |
JPH0260247U (en) * | 1988-10-27 | 1990-05-02 |
-
1980
- 1980-01-23 JP JP570180A patent/JPS56107896A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6457637A (en) * | 1987-05-22 | 1989-03-03 | American Telephone & Telegraph | Method and apparatus for handling wafer |
JPH0322058B2 (en) * | 1987-05-22 | 1991-03-26 | Amerikan Terefuon Ando Teregurafu Co | |
JPH0260247U (en) * | 1988-10-27 | 1990-05-02 |
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