JPS56107896A - Suction type vacuum tweezer - Google Patents

Suction type vacuum tweezer

Info

Publication number
JPS56107896A
JPS56107896A JP570180A JP570180A JPS56107896A JP S56107896 A JPS56107896 A JP S56107896A JP 570180 A JP570180 A JP 570180A JP 570180 A JP570180 A JP 570180A JP S56107896 A JPS56107896 A JP S56107896A
Authority
JP
Japan
Prior art keywords
type vacuum
suction type
vacuum tweezer
tweezer
suction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP570180A
Other languages
Japanese (ja)
Inventor
Kazuyoshi Ueki
Toshihiko Takayanagi
Takashi Aoyanagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP570180A priority Critical patent/JPS56107896A/en
Publication of JPS56107896A publication Critical patent/JPS56107896A/en
Pending legal-status Critical Current

Links

Landscapes

  • Manipulator (AREA)
JP570180A 1980-01-23 1980-01-23 Suction type vacuum tweezer Pending JPS56107896A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP570180A JPS56107896A (en) 1980-01-23 1980-01-23 Suction type vacuum tweezer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP570180A JPS56107896A (en) 1980-01-23 1980-01-23 Suction type vacuum tweezer

Publications (1)

Publication Number Publication Date
JPS56107896A true JPS56107896A (en) 1981-08-27

Family

ID=11618404

Family Applications (1)

Application Number Title Priority Date Filing Date
JP570180A Pending JPS56107896A (en) 1980-01-23 1980-01-23 Suction type vacuum tweezer

Country Status (1)

Country Link
JP (1) JPS56107896A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6457637A (en) * 1987-05-22 1989-03-03 American Telephone & Telegraph Method and apparatus for handling wafer
JPH0260247U (en) * 1988-10-27 1990-05-02

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6457637A (en) * 1987-05-22 1989-03-03 American Telephone & Telegraph Method and apparatus for handling wafer
JPH0322058B2 (en) * 1987-05-22 1991-03-26 Amerikan Terefuon Ando Teregurafu Co
JPH0260247U (en) * 1988-10-27 1990-05-02

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