WO1998031046A3 - Teststation für halbleiterwafer bzw. bruchstücke von halbleiterwafern - Google Patents
Teststation für halbleiterwafer bzw. bruchstücke von halbleiterwafern Download PDFInfo
- Publication number
- WO1998031046A3 WO1998031046A3 PCT/DE1998/000030 DE9800030W WO9831046A3 WO 1998031046 A3 WO1998031046 A3 WO 1998031046A3 DE 9800030 W DE9800030 W DE 9800030W WO 9831046 A3 WO9831046 A3 WO 9831046A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- bearing surface
- wafer
- testing station
- semiconductor
- semiconductor wafers
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
- G01R31/2831—Testing of materials or semi-finished products, e.g. semiconductor wafers or substrates
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP98905215A EP0951732A2 (de) | 1997-01-13 | 1998-01-07 | Teststation für halbleiterwafer bzw. bruchstücke von halbleiterwafern |
JP53045298A JP2001507868A (ja) | 1997-01-13 | 1998-01-07 | 半導体ウェーハもしくは半導体ウェーハの断片のためのテストステーション |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19700839.9 | 1997-01-13 | ||
DE1997100839 DE19700839C2 (de) | 1997-01-13 | 1997-01-13 | Chuckanordnung |
Publications (2)
Publication Number | Publication Date |
---|---|
WO1998031046A2 WO1998031046A2 (de) | 1998-07-16 |
WO1998031046A3 true WO1998031046A3 (de) | 1998-11-05 |
Family
ID=7817236
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/DE1998/000030 WO1998031046A2 (de) | 1997-01-13 | 1998-01-07 | Teststation für halbleiterwafer bzw. bruchstücke von halbleiterwafern |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP0951732A2 (de) |
JP (1) | JP2001507868A (de) |
DE (1) | DE19700839C2 (de) |
WO (1) | WO1998031046A2 (de) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6389225B1 (en) | 1998-07-14 | 2002-05-14 | Delta Design, Inc. | Apparatus, method and system of liquid-based, wide range, fast response temperature control of electronic device |
WO2001006273A1 (en) * | 1999-07-15 | 2001-01-25 | Schlumberger Technologies, Inc. | Apparatus and method for temperature control of ic device during test |
JP5980147B2 (ja) | 2013-03-08 | 2016-08-31 | 日本発條株式会社 | 基板支持装置 |
JP6654850B2 (ja) * | 2015-10-13 | 2020-02-26 | 株式会社ディスコ | 加工装置 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4131267A (en) * | 1978-06-02 | 1978-12-26 | Disco Kabushiki Kaisha | Apparatus for holding workpiece by suction |
DE3306999A1 (de) * | 1982-03-31 | 1983-10-06 | Censor Patent Versuch | Einrichtung zum festhalten eines werkstueckes |
EP0411916A2 (de) * | 1989-08-01 | 1991-02-06 | Canon Kabushiki Kaisha | Wafertisch und damit versehene Belichtungsvorrichtung |
JPH05335200A (ja) * | 1992-06-01 | 1993-12-17 | Canon Inc | 基板支持装置 |
EP0603438A1 (de) * | 1992-12-21 | 1994-06-29 | Heian Corporation | Unterdruckspanntafel für eine numerisch gesteuerte Fräsmaschine |
JPH0714890A (ja) * | 1993-06-24 | 1995-01-17 | Rohm Co Ltd | 電子部品の環境試験用温度設定装置およびこれを用いた電子部品の環境試験装置ならびに方法 |
US5564682A (en) * | 1993-08-13 | 1996-10-15 | Kabushiki Kaisha Toshiba | Wafer stage apparatus for attaching and holding semiconductor wafer |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2848684C3 (de) * | 1978-11-09 | 1981-07-09 | Censor Patent- und Versuchs-Anstalt, 9490 Vaduz | Vakuum Werkstückhalter |
DE3915039A1 (de) * | 1989-05-08 | 1990-11-15 | Balzers Hochvakuum | Hubtisch |
DE4425874A1 (de) * | 1994-07-09 | 1996-01-11 | Ges Zur Foerderung Angewandter Optik Optoelektronik Quantenelektronik & Spektroskopie Ev | Substratträger |
-
1997
- 1997-01-13 DE DE1997100839 patent/DE19700839C2/de not_active Expired - Fee Related
-
1998
- 1998-01-07 EP EP98905215A patent/EP0951732A2/de not_active Ceased
- 1998-01-07 WO PCT/DE1998/000030 patent/WO1998031046A2/de not_active Application Discontinuation
- 1998-01-07 JP JP53045298A patent/JP2001507868A/ja active Pending
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4131267A (en) * | 1978-06-02 | 1978-12-26 | Disco Kabushiki Kaisha | Apparatus for holding workpiece by suction |
DE3306999A1 (de) * | 1982-03-31 | 1983-10-06 | Censor Patent Versuch | Einrichtung zum festhalten eines werkstueckes |
EP0411916A2 (de) * | 1989-08-01 | 1991-02-06 | Canon Kabushiki Kaisha | Wafertisch und damit versehene Belichtungsvorrichtung |
JPH05335200A (ja) * | 1992-06-01 | 1993-12-17 | Canon Inc | 基板支持装置 |
EP0603438A1 (de) * | 1992-12-21 | 1994-06-29 | Heian Corporation | Unterdruckspanntafel für eine numerisch gesteuerte Fräsmaschine |
JPH0714890A (ja) * | 1993-06-24 | 1995-01-17 | Rohm Co Ltd | 電子部品の環境試験用温度設定装置およびこれを用いた電子部品の環境試験装置ならびに方法 |
US5564682A (en) * | 1993-08-13 | 1996-10-15 | Kabushiki Kaisha Toshiba | Wafer stage apparatus for attaching and holding semiconductor wafer |
Non-Patent Citations (2)
Title |
---|
PATENT ABSTRACTS OF JAPAN vol. 018, no. 158 (E - 1525) 16 March 1994 (1994-03-16) * |
PATENT ABSTRACTS OF JAPAN vol. 095, no. 004 31 May 1995 (1995-05-31) * |
Also Published As
Publication number | Publication date |
---|---|
JP2001507868A (ja) | 2001-06-12 |
DE19700839C2 (de) | 2000-06-08 |
DE19700839A1 (de) | 1998-07-16 |
WO1998031046A2 (de) | 1998-07-16 |
EP0951732A2 (de) | 1999-10-27 |
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