JPS5295166A - Wafer dryer - Google Patents

Wafer dryer

Info

Publication number
JPS5295166A
JPS5295166A JP1145776A JP1145776A JPS5295166A JP S5295166 A JPS5295166 A JP S5295166A JP 1145776 A JP1145776 A JP 1145776A JP 1145776 A JP1145776 A JP 1145776A JP S5295166 A JPS5295166 A JP S5295166A
Authority
JP
Japan
Prior art keywords
wafer dryer
dryer
wafer
mist
wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1145776A
Other languages
Japanese (ja)
Inventor
Shogo Kiyota
Tetsuya Mizutani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1145776A priority Critical patent/JPS5295166A/en
Publication of JPS5295166A publication Critical patent/JPS5295166A/en
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

PURPOSE: To prevent turbulent air and mist from re-adhering to wafers by providing an upper board upon rapidly rotating multi-stage shelves.
COPYRIGHT: (C)1977,JPO&Japio
JP1145776A 1976-02-06 1976-02-06 Wafer dryer Pending JPS5295166A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1145776A JPS5295166A (en) 1976-02-06 1976-02-06 Wafer dryer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1145776A JPS5295166A (en) 1976-02-06 1976-02-06 Wafer dryer

Publications (1)

Publication Number Publication Date
JPS5295166A true JPS5295166A (en) 1977-08-10

Family

ID=11778614

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1145776A Pending JPS5295166A (en) 1976-02-06 1976-02-06 Wafer dryer

Country Status (1)

Country Link
JP (1) JPS5295166A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5818927A (en) * 1981-07-27 1983-02-03 Seiichiro Sogo Strainer-drier
JPS6294630U (en) * 1985-12-04 1987-06-17
JPH02201916A (en) * 1989-01-30 1990-08-10 Dainippon Screen Mfg Co Ltd Removal and cleaning of resist of substrate
US5158616A (en) * 1988-07-22 1992-10-27 Tokyo Electron Limited Apparatus for cleaning a substrate

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5818927A (en) * 1981-07-27 1983-02-03 Seiichiro Sogo Strainer-drier
JPS6294630U (en) * 1985-12-04 1987-06-17
US5158616A (en) * 1988-07-22 1992-10-27 Tokyo Electron Limited Apparatus for cleaning a substrate
JPH02201916A (en) * 1989-01-30 1990-08-10 Dainippon Screen Mfg Co Ltd Removal and cleaning of resist of substrate

Similar Documents

Publication Publication Date Title
JPS5212576A (en) Wafer washing drying device
JPS5295166A (en) Wafer dryer
JPS5318967A (en) Wafer sucking jig
JPS52140179A (en) Vibrating conveyor
JPS51118395A (en) Semiconductor emitting unit and manufacturing process
JPS51112193A (en) Processing method of semiconductor equipment
JPS5441665A (en) Manufacture for semiconductor device
JPS5228868A (en) Semiconductor device
JPS5363870A (en) Assembling method of semiconductor device
JPS522164A (en) Wafer cleaning and drying device
JPS51142978A (en) Mounting method of circuit elements
JPS52156552A (en) Wafer inspection apparatus
JPS531433A (en) Processing system for fan stop
JPS52130521A (en) Color solid pickup unit
JPS51112279A (en) Semiconductor device
JPS5225032A (en) Insecticide
JPS5214257A (en) Boiling cooler syetem
JPS521360A (en) Plastics washer
JPS546171A (en) Dryer
JPS526470A (en) Semiconductor integrated circuit
JPS5299458A (en) Refrigerating plant
JPS51132785A (en) Semiconductor integrated circuit
JPS51148855A (en) Drying hoist equipment
JPS5267837A (en) High frequency heater
JPS51135450A (en) Amplifier