JPS546171A - Dryer - Google Patents
DryerInfo
- Publication number
- JPS546171A JPS546171A JP7124577A JP7124577A JPS546171A JP S546171 A JPS546171 A JP S546171A JP 7124577 A JP7124577 A JP 7124577A JP 7124577 A JP7124577 A JP 7124577A JP S546171 A JPS546171 A JP S546171A
- Authority
- JP
- Japan
- Prior art keywords
- dryer
- substrates
- revolver
- damaging
- atmospheric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Solid Materials (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
PURPOSE: To dry semiconductor substrates sufficiently, without damaging them, by rotating the substrates on a high-speed revolver and reducing the pressure inside the dryer down below the atmospheric.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7124577A JPS546171A (en) | 1977-06-15 | 1977-06-15 | Dryer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7124577A JPS546171A (en) | 1977-06-15 | 1977-06-15 | Dryer |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS546171A true JPS546171A (en) | 1979-01-18 |
Family
ID=13455108
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7124577A Pending JPS546171A (en) | 1977-06-15 | 1977-06-15 | Dryer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS546171A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6415926A (en) * | 1987-07-09 | 1989-01-19 | Nec Corp | Forming method of fine pattern |
JPH0629278A (en) * | 1992-04-27 | 1994-02-04 | Chuo Riken:Kk | Method of washing substrate and low pressure drier |
-
1977
- 1977-06-15 JP JP7124577A patent/JPS546171A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6415926A (en) * | 1987-07-09 | 1989-01-19 | Nec Corp | Forming method of fine pattern |
JPH0629278A (en) * | 1992-04-27 | 1994-02-04 | Chuo Riken:Kk | Method of washing substrate and low pressure drier |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS549041A (en) | Closed type cooling tower | |
JPS51125615A (en) | A cooling arrangement for rolls, etc. | |
JPS546171A (en) | Dryer | |
JPS51130743A (en) | Wave-energy application device | |
JPS5419252A (en) | Bedquilt dryer | |
JPS529961A (en) | Process for exhausting air in coating room | |
JPS51140252A (en) | Regenerator | |
JPS5415363A (en) | Vacuum cleaner | |
JPS51131950A (en) | Continuous vacuum dryer for food | |
JPS52131251A (en) | Dryer | |
JPS51131277A (en) | Semi-conductor unit manufacturing process | |
JPS5434773A (en) | Vacuum tweezers | |
JPS51121844A (en) | A refrigerator | |
JPS53101765A (en) | Drip-proof device | |
JPS5423133A (en) | Prophylactic and remedy for coccidiosis | |
JPS5361469A (en) | Steam jet device | |
JPS5423252A (en) | Vacuum dryer | |
JPS51117366A (en) | Vacuum dehydrator | |
JPS52155471A (en) | Bottle drying method | |
JPS51123949A (en) | Process for drying and device thereof | |
JPS51145053A (en) | Drying equipment | |
JPS51146087A (en) | Boat | |
JPS5224373A (en) | A clothing dryer | |
JPS521360A (en) | Plastics washer | |
JPS5224434A (en) | Cooling method for electronic computor |