JPS5434773A - Vacuum tweezers - Google Patents
Vacuum tweezersInfo
- Publication number
- JPS5434773A JPS5434773A JP10045477A JP10045477A JPS5434773A JP S5434773 A JPS5434773 A JP S5434773A JP 10045477 A JP10045477 A JP 10045477A JP 10045477 A JP10045477 A JP 10045477A JP S5434773 A JPS5434773 A JP S5434773A
- Authority
- JP
- Japan
- Prior art keywords
- vacuum tweezers
- article
- tweezers
- vacuum
- detachment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
Abstract
PURPOSE: To avoid the detachment of an article, and to improve operation by enabling an article-absorption surface provided to the head of a vacuum tweezers to rotate freely in the facing direction.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10045477A JPS6020898B2 (en) | 1977-08-24 | 1977-08-24 | vacuum tweezers |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10045477A JPS6020898B2 (en) | 1977-08-24 | 1977-08-24 | vacuum tweezers |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5434773A true JPS5434773A (en) | 1979-03-14 |
JPS6020898B2 JPS6020898B2 (en) | 1985-05-24 |
Family
ID=14274352
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10045477A Expired JPS6020898B2 (en) | 1977-08-24 | 1977-08-24 | vacuum tweezers |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6020898B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57194545A (en) * | 1981-05-27 | 1982-11-30 | Hitachi Ltd | Attracting plate for wafer |
JPH0529149U (en) * | 1991-09-24 | 1993-04-16 | 山形日本電気株式会社 | Vacuum pin set |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63127495U (en) * | 1987-02-13 | 1988-08-19 |
-
1977
- 1977-08-24 JP JP10045477A patent/JPS6020898B2/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57194545A (en) * | 1981-05-27 | 1982-11-30 | Hitachi Ltd | Attracting plate for wafer |
JPH0529149U (en) * | 1991-09-24 | 1993-04-16 | 山形日本電気株式会社 | Vacuum pin set |
Also Published As
Publication number | Publication date |
---|---|
JPS6020898B2 (en) | 1985-05-24 |
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