JPS5434773A - Vacuum tweezers - Google Patents

Vacuum tweezers

Info

Publication number
JPS5434773A
JPS5434773A JP10045477A JP10045477A JPS5434773A JP S5434773 A JPS5434773 A JP S5434773A JP 10045477 A JP10045477 A JP 10045477A JP 10045477 A JP10045477 A JP 10045477A JP S5434773 A JPS5434773 A JP S5434773A
Authority
JP
Japan
Prior art keywords
vacuum tweezers
article
tweezers
vacuum
detachment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10045477A
Other languages
Japanese (ja)
Other versions
JPS6020898B2 (en
Inventor
Hiroshi Maejima
Hiroshi Nashihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10045477A priority Critical patent/JPS6020898B2/en
Publication of JPS5434773A publication Critical patent/JPS5434773A/en
Publication of JPS6020898B2 publication Critical patent/JPS6020898B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)

Abstract

PURPOSE: To avoid the detachment of an article, and to improve operation by enabling an article-absorption surface provided to the head of a vacuum tweezers to rotate freely in the facing direction.
COPYRIGHT: (C)1979,JPO&Japio
JP10045477A 1977-08-24 1977-08-24 vacuum tweezers Expired JPS6020898B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10045477A JPS6020898B2 (en) 1977-08-24 1977-08-24 vacuum tweezers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10045477A JPS6020898B2 (en) 1977-08-24 1977-08-24 vacuum tweezers

Publications (2)

Publication Number Publication Date
JPS5434773A true JPS5434773A (en) 1979-03-14
JPS6020898B2 JPS6020898B2 (en) 1985-05-24

Family

ID=14274352

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10045477A Expired JPS6020898B2 (en) 1977-08-24 1977-08-24 vacuum tweezers

Country Status (1)

Country Link
JP (1) JPS6020898B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57194545A (en) * 1981-05-27 1982-11-30 Hitachi Ltd Attracting plate for wafer
JPH0529149U (en) * 1991-09-24 1993-04-16 山形日本電気株式会社 Vacuum pin set

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63127495U (en) * 1987-02-13 1988-08-19

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57194545A (en) * 1981-05-27 1982-11-30 Hitachi Ltd Attracting plate for wafer
JPH0529149U (en) * 1991-09-24 1993-04-16 山形日本電気株式会社 Vacuum pin set

Also Published As

Publication number Publication date
JPS6020898B2 (en) 1985-05-24

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