JPS5423475A - Mask alignment unit - Google Patents
Mask alignment unitInfo
- Publication number
- JPS5423475A JPS5423475A JP8838177A JP8838177A JPS5423475A JP S5423475 A JPS5423475 A JP S5423475A JP 8838177 A JP8838177 A JP 8838177A JP 8838177 A JP8838177 A JP 8838177A JP S5423475 A JPS5423475 A JP S5423475A
- Authority
- JP
- Japan
- Prior art keywords
- mask alignment
- alignment unit
- mask
- pressurized
- space
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
PURPOSE: To make efficient the mask alignment work, by suitably making vacuum or pressurized the space among the unit itself, substrate chuck and the mask clamp.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8838177A JPS5423475A (en) | 1977-07-25 | 1977-07-25 | Mask alignment unit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8838177A JPS5423475A (en) | 1977-07-25 | 1977-07-25 | Mask alignment unit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5423475A true JPS5423475A (en) | 1979-02-22 |
Family
ID=13941205
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8838177A Pending JPS5423475A (en) | 1977-07-25 | 1977-07-25 | Mask alignment unit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5423475A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59121838A (en) * | 1982-12-16 | 1984-07-14 | Fujitsu Ltd | Mask contact method |
-
1977
- 1977-07-25 JP JP8838177A patent/JPS5423475A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59121838A (en) * | 1982-12-16 | 1984-07-14 | Fujitsu Ltd | Mask contact method |
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