JPS5423475A - Mask alignment unit - Google Patents

Mask alignment unit

Info

Publication number
JPS5423475A
JPS5423475A JP8838177A JP8838177A JPS5423475A JP S5423475 A JPS5423475 A JP S5423475A JP 8838177 A JP8838177 A JP 8838177A JP 8838177 A JP8838177 A JP 8838177A JP S5423475 A JPS5423475 A JP S5423475A
Authority
JP
Japan
Prior art keywords
mask alignment
alignment unit
mask
pressurized
space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8838177A
Other languages
Japanese (ja)
Inventor
Yoshimitsu Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8838177A priority Critical patent/JPS5423475A/en
Publication of JPS5423475A publication Critical patent/JPS5423475A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To make efficient the mask alignment work, by suitably making vacuum or pressurized the space among the unit itself, substrate chuck and the mask clamp.
COPYRIGHT: (C)1979,JPO&Japio
JP8838177A 1977-07-25 1977-07-25 Mask alignment unit Pending JPS5423475A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8838177A JPS5423475A (en) 1977-07-25 1977-07-25 Mask alignment unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8838177A JPS5423475A (en) 1977-07-25 1977-07-25 Mask alignment unit

Publications (1)

Publication Number Publication Date
JPS5423475A true JPS5423475A (en) 1979-02-22

Family

ID=13941205

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8838177A Pending JPS5423475A (en) 1977-07-25 1977-07-25 Mask alignment unit

Country Status (1)

Country Link
JP (1) JPS5423475A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59121838A (en) * 1982-12-16 1984-07-14 Fujitsu Ltd Mask contact method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59121838A (en) * 1982-12-16 1984-07-14 Fujitsu Ltd Mask contact method

Similar Documents

Publication Publication Date Title
JPS53105477A (en) 7-glycylprolylamono-4-methylcoumarine
JPS5213642A (en) Panel board for temporary works
JPS5219446A (en) Air-conditioning system
JPS5423475A (en) Mask alignment unit
JPS51113337A (en) Sun-room unit serviceable as terrace
JPS51116477A (en) Clamping tool
JPS53124201A (en) 6-ethyl-substituted higher alkane and its use
JPS53108974A (en) 7-arginylamino-4-methylcoumarin
JPS5234850A (en) Umbrella
JPS5350397A (en) Preparation of 4-hydroxycyclopent-2-ene-1-one
JPS53121767A (en) Funiculosin derivatives
JPS51118521A (en) Special ruling for notebooks
JPS549258A (en) Epidesmosterol derivatives
JPS51142795A (en) Grinding device
JPS53105478A (en) Novel acetylpeneramide
JPS5315326A (en) N,n,n',n'-tetraglycidyltolylenediamine
JPS51126584A (en) Vacuum chuck
JPS537672A (en) 4-aminomethyl-5,6,7-trihydroxyisocoumarin
JPS53115450A (en) Clamping mechanism
JPS51150190A (en) Working unit
JPS53108993A (en) 14-methylene-11-oxahexadecanolide
JPS51112060A (en) Universal holding mechanism
JPS52134969A (en) Holder
JPS51140060A (en) Plus pressure type vacuum pinset
JPS5227275A (en) Glass mask holder