JPS51126584A - Vacuum chuck - Google Patents

Vacuum chuck

Info

Publication number
JPS51126584A
JPS51126584A JP5088575A JP5088575A JPS51126584A JP S51126584 A JPS51126584 A JP S51126584A JP 5088575 A JP5088575 A JP 5088575A JP 5088575 A JP5088575 A JP 5088575A JP S51126584 A JPS51126584 A JP S51126584A
Authority
JP
Japan
Prior art keywords
vacuum chuck
cluching
deformation
article
chuck
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5088575A
Other languages
Japanese (ja)
Other versions
JPS5830104B2 (en
Inventor
Hiroshi Suzuki
Norio Mizutani
Original Assignee
Toyoda Mach Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyoda Mach Works Ltd filed Critical Toyoda Mach Works Ltd
Priority to JP50050885A priority Critical patent/JPS5830104B2/ja
Publication of JPS51126584A publication Critical patent/JPS51126584A/en
Publication of JPS5830104B2 publication Critical patent/JPS5830104B2/ja
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To provide a vacuum chuck cluching article without any deformation.
COPYRIGHT: (C)1976,JPO&Japio
JP50050885A 1975-04-25 1975-04-25 Expired JPS5830104B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50050885A JPS5830104B2 (en) 1975-04-25 1975-04-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50050885A JPS5830104B2 (en) 1975-04-25 1975-04-25

Publications (2)

Publication Number Publication Date
JPS51126584A true JPS51126584A (en) 1976-11-04
JPS5830104B2 JPS5830104B2 (en) 1983-06-27

Family

ID=12871175

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50050885A Expired JPS5830104B2 (en) 1975-04-25 1975-04-25

Country Status (1)

Country Link
JP (1) JPS5830104B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02262902A (en) * 1989-03-30 1990-10-25 Seibu Electric & Mach Co Ltd Processing method for diaphragm

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4930192A (en) * 1972-07-31 1974-03-18

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4930192A (en) * 1972-07-31 1974-03-18

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02262902A (en) * 1989-03-30 1990-10-25 Seibu Electric & Mach Co Ltd Processing method for diaphragm

Also Published As

Publication number Publication date
JPS5830104B2 (en) 1983-06-27

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