JPS6020898B2 - vacuum tweezers - Google Patents
vacuum tweezersInfo
- Publication number
- JPS6020898B2 JPS6020898B2 JP10045477A JP10045477A JPS6020898B2 JP S6020898 B2 JPS6020898 B2 JP S6020898B2 JP 10045477 A JP10045477 A JP 10045477A JP 10045477 A JP10045477 A JP 10045477A JP S6020898 B2 JPS6020898 B2 JP S6020898B2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- suction
- suction surface
- product
- suction ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Description
【発明の詳細な説明】
本発明は吸着時に製品の脱落を生じないでかつ作業性の
よい真空ピンセットを提供するにある。DETAILED DESCRIPTION OF THE INVENTION The object of the present invention is to provide vacuum tweezers that do not cause products to fall off during suction and have good workability.
真空ピンセットとしては第１図に示すように、ホルダ本
体１から連絡パイプ２を介して連結されたヘッド部３の
一平面を吸着面４にして、この吸着面４のほぼ中央に吸
引口５をあげてなり、ヘッド部３をテフロンなどのフツ
ソ樹脂でつくっている。そして、ウェーハなどの板状製
品９以下、ゥェーハという、を真空を利用して吸着し、
たとえばゥェーハ収容カートリッジなどにそのワェーハ
を収納する。しかしながら、この様なものにおいては、
吸着面４が固定化しており、ヘッド部３と一体をなして
いるために、ウェーハを吸着した状態でウェーハをカー
トリッジなどに収納するため、ウヱーハが起した状態で
持ち運ぶ時、ウェーハの重′○が移動し、ウェーハの保
持が不安定となって、ゥェーハが吸着面４から脱落し、
ゥェーハを破損する場合がある。また、カートリッジに
ゥヱーハを収容する場合には、ゥェーハがスムースにカ
ートリッジに入るようにホルダ本体１を適当に預けなけ
ればならないために作業者に負担がかかり作業性が悪い
。本発明はこのような従来の欠点を解消し、製品の脱落
がなくかつ作業性のよい真空ピンセットを提供するにあ
る。As shown in FIG. 1, the vacuum tweezers have a suction surface 4 on one plane of a head portion 3 connected to a holder body 1 via a connecting pipe 2, and a suction port 5 at approximately the center of this suction surface 4. As a result, the head portion 3 is made of a soft resin such as Teflon. Then, a plate-shaped product such as a wafer 9 or less, called a wafer, is adsorbed using a vacuum,
For example, the wafer is stored in a wafer storage cartridge. However, in something like this,
Since the suction surface 4 is fixed and integrated with the head section 3, the wafer is stored in a cartridge or the like while it is suctioned, so when the wafer is carried with the wafer upright, the weight of the wafer is reduced. moves, the holding of the wafer becomes unstable, and the wafer falls off the suction surface 4.
The wafer may be damaged. Further, when storing a wafer in a cartridge, the holder main body 1 must be properly placed so that the wafer can smoothly enter the cartridge, which places a burden on the operator and degrades work efficiency. The present invention solves these conventional drawbacks and provides vacuum tweezers that prevent products from falling off and have good workability.
このような目的を達成するための本発明の要旨は、樹脂
からなるヘッド部に製品吸着用の吸着面を有する石英か
らなる吸着リングを選択的にかつ回動自在に鉄め込み、
前記吸着面にシリコンからなるウェーハを水平状態で吸
着し、その後前記ウェーハを垂直状態になるように前記
ヘッド部を回転させた時に前記吸着されたゥェハと前記
吸着面との間の摩擦係数が前記ヘッド部とそこに鉄め込
まれる石英の吸着リングとの間の摩擦係数よりも大きい
こと及びウェハの自重とにより前記吸着ＩＪングがその
吸着面にウェハを吸着した状態で鉄め込まれたヘッド部
内で回動して、前記ウェハの中心が前記吸着リングの中
心の真下にくるようにすることができることを特徴とす
る真空ピンセットにある。The gist of the present invention to achieve such an object is to selectively and rotatably iron a suction ring made of quartz having a suction surface for adsorbing products to a head portion made of resin,
When a wafer made of silicon is horizontally attracted to the suction surface and the head section is then rotated so that the wafer is vertically held, the coefficient of friction between the suctioned wafer and the suction surface is as follows. Due to the coefficient of friction between the head part and the quartz suction ring that is iron-inserted therein, and the weight of the wafer, the adsorption IJ ring attracts the wafer to its suction surface. The vacuum tweezers are characterized in that they can be rotated within the vacuum tweezers so that the center of the wafer is directly below the center of the suction ring.
以下、図面に示す実施例により本発明をを詳細に説明す
る。Hereinafter, the present invention will be explained in detail with reference to embodiments shown in the drawings.
第２図および第３図において、この真空ピンセットは、
ホルダ本体１１から連絡パイプ１２を介して連結したヘ
ッド部１３を有し このヘッド部ｉ３にはウェーハ吸着
用の吸着面１４を一部にもつ吸着リング１５が回動自在
に豚め込まれ、吸着面’４はヘッド１３よりも一段高い
位置にくるようにし、この吸着リング１５をたとえば石
英でつくっている。In FIGS. 2 and 3, the vacuum tweezers are
It has a head part 13 connected to the holder main body 11 via a communication pipe 12. A suction ring 15 having a suction surface 14 for suctioning a wafer as a part is rotatably inserted into this head part i3, and The surface '4 is positioned one step higher than the head 13, and the suction ring 15 is made of quartz, for example.
また、吸着リング１５の形状は梶を広くとった円筒で、
この裾を収容し得る溝をヘッド部１３に設けている。こ
の場合の吸着リング量５の緩め合いの程度は、たとえば
、スキマバメにしている。また、吸着リング１５をヘッ
ド部１３に装着するやり方は、あらかじめヘッド部１３
側を反らした状態にして、鞍め込めば容易に装着できる
。そして、ヘッド部１３の吸着リング１５が入る溝の底
には、吸引ロー６があげられている。この吸引ロー６は
「連結パイプ１２、ホルダ本体膏１の内部にあげた蓮通
路１７７ １８を通して任意の真空源に連絡されている
。つぎに、このように構成された真空ピンセットの使用
状態を第４図で説明すれば、まずゥェーハ１９をピンセ
ットで吸着する場合は「ヘッド部１３の吸着面１４がゥ
ェーハ１９の中心よりも外側寄りの位置にくるようにし
て吸着し、つぎにカートリッジ２０‘こ収納する際には
「 ウェーハ１９が起立するようにホルダ本体１１を握
ると、ウェーハ１９は吸着リング１５の回敷により、そ
の重心Ｐが吸着リング１５の中心Ｍの真下に並ぶ、そこ
で、このようにウェーハ１９がヘッド部１３から吊り下
げられた状態でカートリッジ２０内に入れられる。In addition, the shape of the suction ring 15 is a cylinder with a wide groove.
A groove capable of accommodating this hem is provided in the head portion 13. In this case, the degree of loosening of the suction ring amount 5 is, for example, a loose fit. In addition, the method of attaching the suction ring 15 to the head section 13 is to attach the suction ring 15 to the head section 13 in advance.
It can be easily installed by keeping the sides bent and inserting it into the saddle. A suction row 6 is raised at the bottom of the groove in which the suction ring 15 of the head portion 13 is inserted. This suction row 6 is connected to an arbitrary vacuum source through a connecting pipe 12 and a lotus passage 177 to 18 raised inside the holder main body plaster 1. 4, when the wafer 19 is picked up with tweezers, the wafer 19 is first picked up so that the attracting surface 14 of the head section 13 is located at a position closer to the outside than the center of the wafer 19, and then the cartridge 20' is picked up. When storing the wafer 19, hold the holder body 11 so that the wafer 19 stands up.The wafer 19's center of gravity P is aligned directly below the center M of the suction ring 15 due to the suction ring 15. Then, the wafer 19 is placed into the cartridge 20 while being suspended from the head section 13.
このあと、真空を解いてウェーハ１９を放し収納を完了
する。以上の説明から明らかなように本発明によれば、
ヘッド部に設けた吸着面をその面方向に回動自在に設け
ていることから、吸着面に吸着された製品は吸着後吸着
面を縦方向に向け製品を起立状態にすると同時に製品の
重○の移動方向に吸着面が回動し、製品の重Ｄと吸着面
の支点、すなわち吸着面の回転中心が垂直線上に並び、
製品がホルダ本体の傾き状態に関係なくヘッド部から真
下に吊り下げられた状態になる。したがって、吸着面に
余分な力が加わらないから、製品が吸着面からずれたり
脱落することもなく、製品の安定した吸着ができ、製品
の破損等も生じない。また本発明によれば、製品を真空
ピンセットで吸着し製品が起立するようにピンセットを
握ることで簡単に製品の重心とピンセット側の支点を垂
直線上に一致させられるから、常に一定した製品の姿勢
でカートリッジなどに収納でき、作業者の手は自然のま
まの姿勢で作業できる。したがって、製品の吸着、持ち
運び、収納作業が楽にでき、作業者に負担を感じさせな
いで、効率のよい製品取扱いができる。After this, the vacuum is released and the wafer 19 is released to complete the storage. As is clear from the above description, according to the present invention,
Since the suction surface provided on the head part is rotatable in the direction of the surface, the product attracted to the suction surface is turned vertically after suction, and the product is placed in an upright position, and at the same time the product's weight is reduced. The suction surface rotates in the direction of movement, and the weight D of the product and the fulcrum of the suction surface, that is, the rotation center of the suction surface, are aligned on a vertical line.
The product is suspended directly below the head section regardless of the tilted state of the holder body. Therefore, since no extra force is applied to the suction surface, the product does not shift or fall off the suction surface, and the product can be stably suctioned and no damage to the product occurs. Further, according to the present invention, by sucking the product with vacuum tweezers and holding the tweezers so that the product stands up, the center of gravity of the product and the fulcrum on the tweezers side can be easily aligned on a vertical line, so the posture of the product is always constant. It can be stored in a cartridge, etc., and the worker's hands can work in a natural position. Therefore, it is easy to suction, carry, and store the product, and the product can be handled efficiently without putting any burden on the worker.
簾ｇ図は真空ピンセットを説明するための要部断面図「
第２図は本発明の真空ピンセットの要部平面図、第３図
は第２図のＡ−Ａ′線に沿って矢印方向に見た垂直断面
図、第４図は本発明の真空ピンセットの使用状態を示す
説明図である。
１１…ホルダ本体、１２・・・連絡パイプ、１３・・・
ヘッド部、亀４・・・吸着面、１５・・・吸着リング、
ＩＳ…吸引口ｔ １７…蓮通路「 １８…蓮通路、１９
…ウエーハ、２０…カートリッジ。
鰭ｉ囚
鰭ｚ図
芥３図
群４図Diagram G is a sectional view of the main parts to explain vacuum tweezers.
FIG. 2 is a plan view of essential parts of the vacuum tweezers of the present invention, FIG. 3 is a vertical sectional view taken along the line A-A' in FIG. 2 in the direction of the arrow, and FIG. It is an explanatory diagram showing a usage state. 11...Holder body, 12...Connection pipe, 13...
Head part, turtle 4... suction surface, 15... suction ring,
IS...Suction port t 17...Lotus passage 18...Lotus passage, 19
...wafer, 20...cartridge. Fin i Captive fin Z diagram Akuta 3 diagram group 4 diagram
Claims (1)
る石英からなる吸着リングを選択的かつ回動自在に嵌め
込み、前記吸着面にシリコンからなるウエーハを水平状
態で吸着し、その後前記ウエーハを垂直状態になるよう
に前記ヘツド部を回転させた時に前記吸着されたウエハ
と前記吸着面との間の摩擦係数が前記ヘツド部とそこに
嵌め込まれる石英の吸着リングとの間の摩擦係数よりも
大きいこと及びウエハの自重とにより前記吸着リングが
その吸着面にウエハを吸着した状態で嵌め込まれたヘツ
ド部内で回動して、前記ウエハの中心が前記吸着リング
の中心の真下にくるようにすることができることを特徴
とする真空ピンセツト。1 A suction ring made of quartz having a suction surface for adsorbing products is selectively and rotatably fitted into the head portion made of resin, a wafer made of silicon is horizontally adsorbed on the suction surface, and then the wafer is vertically When the head section is rotated so that the wafer is placed in the wafer position, the coefficient of friction between the attracted wafer and the suction surface is greater than the coefficient of friction between the head section and a quartz suction ring fitted therein. Due to the weight of the wafer and the wafer's own weight, the suction ring rotates within the fitted head part with the wafer suctioned to its suction surface, so that the center of the wafer is located directly below the center of the suction ring. Vacuum tweezers characterized by the ability to
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10045477A JPS6020898B2 (en) | 1977-08-24 | 1977-08-24 | vacuum tweezers |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10045477A JPS6020898B2 (en) | 1977-08-24 | 1977-08-24 | vacuum tweezers |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5434773A JPS5434773A (en) | 1979-03-14 |
| JPS6020898B2 true JPS6020898B2 (en) | 1985-05-24 |
Family
ID=14274352
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10045477A Expired JPS6020898B2 (en) | 1977-08-24 | 1977-08-24 | vacuum tweezers |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6020898B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63127495U (en) * | 1987-02-13 | 1988-08-19 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57194545A (en) * | 1981-05-27 | 1982-11-30 | Hitachi Ltd | Attracting plate for wafer |
| JPH0529149U (en) * | 1991-09-24 | 1993-04-16 | 山形日本電気株式会社 | Vacuum pin set |
-
1977
- 1977-08-24 JP JP10045477A patent/JPS6020898B2/en not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63127495U (en) * | 1987-02-13 | 1988-08-19 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5434773A (en) | 1979-03-14 |
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