JP3217110B2 - Transfer device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to relates to a conveyance apparatus.
More specifically, the present invention relates to a transfer device capable of preventing generation of vibration by a detection function for overload or the like (or an RCC escape mechanism) when transferring an object by a robot or the like.

In recent years, in a semiconductor device manufacturing process, a transfer device for transferring an object such as a wafer has a function of detecting an overload so as not to damage the object. However, since the detection function may cause vibration during conveyance, it is necessary to reduce the vibration.

[0003]

2. Description of the Related Art FIG. 6 is a diagram showing a conventional wafer transfer robot. The transfer robot 1 includes a vertical shaft 2 can be rotated, and a telescopic arm 3 attached to the shaft immediately
And Bei, rotation about axis A over arm parallel to the axis X on the tip of the arm, and rotating the transport device 4 for conveying material adsorption can attached to the central axis of the arm and perpendicular to the axis Z The wafer 5 can be transferred between the resin cassette 6 and the quartz basket 7.

When the wafers 5 are stored in the cassette 6 or the basket 7 in the transfer device 4, the wafers 5 may be damaged by the grooves 8 and cause dust generation. Can be detected. For this reason, as shown in FIG. 7 , the wafer suction unit 4 is provided with a spring 11 between the fixed plate 9 attached to the arm of the robot and the suction plate 10 for holding the wafer 5, thereby providing flexibility. The overload can be detected by an optical fiber sensor (not shown) at the same time as the load is released.

[0005]

In the above-mentioned conventional transfer device , the suction plate 10 is supported via the spring 11, so that
If a sudden conveyance is performed, vibrations occur in the conveyed object. As a result, when the wafer is to be stored in the cassette 6 or the basket 7, the wafer hits the groove 8 or the wafer
There is a problem that it is necessary to wait until the vibration stops because it may be away from the vehicle.

[0006] The present invention seeks to realize the conveyance device and the reduced vibration of the conveyed object in the conveying.

[0007]

In the transfer apparatus according to the present invention, a suction plate for sucking and supporting an object to be transferred is provided;
A fixing plate 9 having a vacuum passage 14 for sucking
The fixed plate 9 supports the suction plate 10 via a spring 11 serving as an escape mechanism when an overload occurs .
In a transfer device for transferring adsorbed supported by the suction plate 10, provided with a conical recess 17 in the opening of the vacuum channel 14 of the fixed plate 9, the <br/> suction opposite the depressions viewed 17 A conical or hemispherical projection 18 is provided on the plate 10, and the suction plate 1
Positioning the 0 and wherein the fixable to the thing.

[0008] In addition, the fixing means 12 for fixing the escape mechanism 11 has a positioning function. By adopting this configuration, conveyance device and the reduced vibration of the conveyed object in the conveying is obtained.

[0009]

According to the present invention, as shown in FIG. 3, by providing the fixing means 12 by vacuum Aspirate capable of fixing the suction plate 10 to the fixing plate 9 of the conveyor 4, conveys the conveyance object (wafer 5) During this operation, the adsorbing plate 10 can be fixed by operating the fixing means 12 as shown in FIG. As a result, the vibration of the conveyed object during conveyance can be reduced. Also, the vacuum of the fixing means
The dent 17 provided at the opening of the passage 14 and the transferred object are supported.
The suction plate 1 is engaged with the projection 18 provided on the suction plate 10.
Zero positioning is possible.

[0010]

PREFERRED EMBODIMENTS FIG. 1 and FIG. 2 is a diagram showing a conveying device of the present invention, FIG. 1 is a perspective view illustrating with robot, FIG. 2 is a front及
A diagram showing a fine side, FIG. (A) is a side view, (b) is (a) Z arrow view of Figure (c) is c enlarged view of Figure (a). As shown in FIG. 1 , the transfer device of this embodiment is a robot having a rotatable vertical shaft 2 and a telescopic arm 3 attached to the shaft. rotating, and Rukoto mounted so as to be rotated around axis arm perpendicular axes Ru similar der the conventional example described in FIG.

As shown in FIG. 2, the transfer device 4 of the present embodiment is attached to a fixed plate 9 attached to an arm of a robot , and to the fixed plate 9 via a spring (a relief mechanism when an overload occurs) 11. Suction plate 10 and fixing means 12 for fixing the suction plate 10 to the fixing plate 9. The fixing means 12 is a small distance from the suction plate 10 (a distance that does not hinder the operation of the escape mechanism). A vacuum passage 14 is opened in the suction surface 13 so as to face the vacuum suction surface 13.

[0012] Further, the fixing means 12 is shown in FIG.
As shown, a conical opening is formed in the opening of the vacuum passage 14 of the fixing plate 9.
A depression 17 is provided, and the depression 17
A conical projection 18 that can be fitted to
Doubles as well.

The transport device of the present embodiment having the above-described structure.
3 will be described with reference to FIG. First, when taking out a wafer from the cassette, as shown in FIG. 3A, vacuum suction is performed through the vacuum suction port 15 of the suction plate, and the wafer 5 is sucked and pulled up from the cassette. Next, before moving on to transport,
As shown in (b), the suction plate 10 is sucked and fixed to the vacuum suction surface 13 by vacuum suction from the vacuum suction port 16 of the fixing means 12. Next, the wafer 5 is transferred to the basket while maintaining the state shown in FIG. Here, the fixing means 12 releases the suction of the suction plate 10, and the suction unit descends to move the wafer 5.
Into the basket. Also, the sheet is conveyed in the reverse direction in the same manner.

By transporting the wafer in this manner,
Since the suction plate 10 holding the wafer by suction is fixed to the fixing plate 9 by the fixing means 12, vibration during transfer is reduced. Therefore, the waiting time for inserting a wafer into a basket or a cassette can be reduced, and high-speed transfer can be performed. In addition, since the suction action of the fixing means 12 is released when the wafer is taken out or inserted from the cassette or the basket, the function of the escape mechanism when an overload occurs when the wafer hits the groove is not hindered.

Further, combined suction plate 10 when the fixing means 1 2 above adsorbed fixing the intake Chakuban 10 and the conical recess 17 and the conical-shaped projection 18 as shown in FIG. 4 (b) fitting Vertical
Lateral positioning is possible.

Here, the positioning can be reduced during transporting if one is positioned during transport and the other is positioned until immediately before loading into a cassette or the like. (Since the overload relief mechanism has a spring property, it tends to be in an indefinite position.) The same effect can be obtained by making the projection 18 in FIG. 4 a hemisphere as shown in FIG.

[0017]

According to the present invention, the provision of the fixing means for fixing the suction plate for adsorbing the conveyed article enables the vibration of the conveyed article being conveyed to be reduced, thereby enabling high-speed conveyance.
In addition, it becomes possible to position the suction plate with the attachment portion having flexibility due to overload or the like.

[Brief description of the drawings]

FIG. 1 is a perspective view showing a transfer device of the present invention together with a robot .

FIG. 2 is a view showing an embodiment of the transport device of the present invention, and (a).
Is a side view, (b) is a view as viewed in the direction of the arrow Z in (a) , and (c) is a view.
(A) It is a c section enlarged view of a figure .

FIG. 3 is a diagram for explaining the operation of the embodiment of the transport device of the present invention.

FIGS. 4A and 4B are diagrams showing a positioning mechanism of a fixing unit in the embodiment of the transport device of the present invention, wherein FIG.
(B) is a figure which shows an adsorption state.

FIG. 5 is a view showing another positioning mechanism of the fixing means in the embodiment of the transport device of the present invention.

FIG. 6 is a diagram showing a conventional transfer device together with a robot .

[7] a diagram showing a conventional conveying equipment, (a) shows the side view,
(B) is a view taken in the direction of the arrow Z in (a), and (c) is a c- view in (a).
It is sectional drawing in the c line.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Robot 2 ... Vertical axis 3 ... Arm 4 ... Transfer device 9 ... Fixing plate 10 ... Suction plate 11 ... Spring (overload relief mechanism) 12 ... Fixing means 13 ... Vacuum suction surface 14 ... Vacuum passage 15, 16 ... Vacuum suction Mouth 17 ... dent 18 ... projection

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int. Cl. ⁷ , DB name) B25J 17/02 B25J 15/00-15/08 H01L 21/68 B65G 49/07 B23Q 7/04

Claims (1)

(57) [Claims] A suction plate (10) for sucking and supporting an object to be conveyed.
And a vacuum passage (14) for sucking the suction plate (10).
And a fixing plate (9) for performing the suction.
A spring (1 ) serving as an escape mechanism when the overload occurs in the mounting plate (10)
1) supporting the object to be conveyed through the suction plate
(10) In the transfer device for transferring by suction and support , a conical depression (17) is provided in the opening of the vacuum passage (14) of the fixing plate (9) , and the concavity (17) faces the depression (17).
The suction plate (10) is provided with a conical or hemispherical projection (18), and the suction plate (10) is positioned and fixed when the projection (18) is vacuum-sucked in the recess (17).
A transport device characterized by being made possible.