JPS6455740A - Production of perpendicular magnetic recording medium - Google Patents

Abstract

PURPOSE:To improve a magnetostatic characteristic so that the high-density recording of a recording medium can be executed and the mass productivity thereof is enhanced by previously bringing the substrate into contact with a reducing gaseous active species before forming a thin magnetic film having perpendicular magnetic anisotropy on the substrate by using a vacuum deposition method. CONSTITUTION:The substrate 1 is run along a can 3 kept at >=100 deg.C in <=10Torr vacuum and the impurities essentially consisting of water in the substrate 1 are removed. A reducing gas is fed into a vacuum vessel and a glow discharge is generated by a glow discharger 7 to bring the reducing gaseous active species into contact with the substrate 1. The introduction of the gas is thereafter stopped and the magnetic metal is evaporated from an evaporation source 5 so that the magnetic film is deposited on the surface of the substrate 1 traveling along the peripheral face of the can 2 heated to >=130 deg.C through a mask 6. Gaseous hydrogen ions are projected on the substrate 1 before or after the adhesion of the reducing gaseous active species by providing a high-speed ion source 8 together with the device 7, then the orientational property of the magnetic layer is additionally improved by the synergistic effect thereof.