JPS5516409A - Process for production of cr film - Google Patents
Process for production of cr filmInfo
- Publication number
- JPS5516409A JPS5516409A JP8840878A JP8840878A JPS5516409A JP S5516409 A JPS5516409 A JP S5516409A JP 8840878 A JP8840878 A JP 8840878A JP 8840878 A JP8840878 A JP 8840878A JP S5516409 A JPS5516409 A JP S5516409A
- Authority
- JP
- Japan
- Prior art keywords
- film
- vapor
- stainless steel
- less
- depositing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
PURPOSE: To produce a Cr film, which peels only with difficulty and has less defects, by employing a sample bed or substrate holder made of stainless steel in vapor-deposing the Cr film by the sputtering method.
CONSTITUTION: In vapor-depositing a Cr film with a film thickness of 0.5μm or more on a ferrite substrate 1 by use of a RF sputtering apparatus, a Cr targent plate 4 is provided on an upper electrode 2 and the ferrite substrate 1 is provided through a sample bad 5 or substrate holder made of stainless steel on a lower electrode, and the vapor-depositing is carried out at an argon pressure of 5×10-3 Torr and a power density of 1 W/cm2. Since the stainless steel has a thermal expansion coefficient close to that of Cr and its surface is less deteriorated, there occurs no attachment of Cr film fragments 6 onto the surface of the formed Cr film 7 from the surface of the sample bed as indicated by an arrow 9, and thus the Cr film having less surface defects can be produced.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8840878A JPS5516409A (en) | 1978-07-21 | 1978-07-21 | Process for production of cr film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8840878A JPS5516409A (en) | 1978-07-21 | 1978-07-21 | Process for production of cr film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5516409A true JPS5516409A (en) | 1980-02-05 |
Family
ID=13941963
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8840878A Pending JPS5516409A (en) | 1978-07-21 | 1978-07-21 | Process for production of cr film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5516409A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6316583B1 (en) | 1998-09-22 | 2001-11-13 | Borden Chemical, Inc. | Phenol-novolacs with improved optical properties |
-
1978
- 1978-07-21 JP JP8840878A patent/JPS5516409A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6316583B1 (en) | 1998-09-22 | 2001-11-13 | Borden Chemical, Inc. | Phenol-novolacs with improved optical properties |
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