JPS556434A - Sputtering apparatus - Google Patents

Sputtering apparatus

Info

Publication number
JPS556434A
JPS556434A JP7737178A JP7737178A JPS556434A JP S556434 A JPS556434 A JP S556434A JP 7737178 A JP7737178 A JP 7737178A JP 7737178 A JP7737178 A JP 7737178A JP S556434 A JPS556434 A JP S556434A
Authority
JP
Japan
Prior art keywords
targets
substrates
cracks
surfaces face
diagonally upward
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7737178A
Other languages
Japanese (ja)
Other versions
JPS5745466B2 (en
Inventor
Chikara Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP7737178A priority Critical patent/JPS556434A/en
Publication of JPS556434A publication Critical patent/JPS556434A/en
Publication of JPS5745466B2 publication Critical patent/JPS5745466B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering

Abstract

PURPOSE:To prevent the top layers from collapsing down despite formation of cracks on target surface and enable even sputtering to be continuously performed by so disposing the targets that their surfaces face diagonally upward. CONSTITUTION:Targets 13, 13' and substrates 14, 14' are provided diagonally parallel and the targets 13, 13' are so disposed that their surfaces face diagonally upward. For example, when the targets 13, 13' are provided with an inclination of 60 deg., cracks stay in their positions and have no worry of collapsing down even when they are formed. Hence, the targets 13, 13' may be used out to the last and uniform sputter films may be deposited on the substrates 14, 14'.
JP7737178A 1978-06-28 1978-06-28 Sputtering apparatus Granted JPS556434A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7737178A JPS556434A (en) 1978-06-28 1978-06-28 Sputtering apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7737178A JPS556434A (en) 1978-06-28 1978-06-28 Sputtering apparatus

Publications (2)

Publication Number Publication Date
JPS556434A true JPS556434A (en) 1980-01-17
JPS5745466B2 JPS5745466B2 (en) 1982-09-28

Family

ID=13632032

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7737178A Granted JPS556434A (en) 1978-06-28 1978-06-28 Sputtering apparatus

Country Status (1)

Country Link
JP (1) JPS556434A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2472619A1 (en) * 1979-12-18 1981-07-03 Ulvac Corp VACUUM SPRAY COATING APPARATUS

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58116246A (en) * 1981-12-28 1983-07-11 Sumitomo Electric Ind Ltd Car brake control method
JPS60134069U (en) * 1984-02-20 1985-09-06 トキコ株式会社 Vehicle brake device
JPS60134068U (en) * 1984-02-20 1985-09-06 トキコ株式会社 Vehicle brake device
JPS60134067U (en) * 1984-02-20 1985-09-06 トキコ株式会社 Vehicle brake device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2472619A1 (en) * 1979-12-18 1981-07-03 Ulvac Corp VACUUM SPRAY COATING APPARATUS

Also Published As

Publication number Publication date
JPS5745466B2 (en) 1982-09-28

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