JPS53116499A - Preparing high dielectric thin film - Google Patents
Preparing high dielectric thin filmInfo
- Publication number
- JPS53116499A JPS53116499A JP3248677A JP3248677A JPS53116499A JP S53116499 A JPS53116499 A JP S53116499A JP 3248677 A JP3248677 A JP 3248677A JP 3248677 A JP3248677 A JP 3248677A JP S53116499 A JPS53116499 A JP S53116499A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- high dielectric
- dielectric thin
- preparing high
- pbo
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Inorganic Compounds Of Heavy Metals (AREA)
- Physical Vapour Deposition (AREA)
- Inorganic Insulating Materials (AREA)
Abstract
PURPOSE: To provide a thin film having high permittivity, high dielectric strength and high transmittivity in a range of wave length above the visible light, by means of less controlling a quantity of PbO in the evaporating source, when in a time of constructing a thin film of transparent PZT system by methods of evaporation, sputtering, etc.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3248677A JPS53116499A (en) | 1977-03-23 | 1977-03-23 | Preparing high dielectric thin film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3248677A JPS53116499A (en) | 1977-03-23 | 1977-03-23 | Preparing high dielectric thin film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53116499A true JPS53116499A (en) | 1978-10-11 |
Family
ID=12360305
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3248677A Pending JPS53116499A (en) | 1977-03-23 | 1977-03-23 | Preparing high dielectric thin film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53116499A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58209093A (en) * | 1982-05-28 | 1983-12-05 | 松下電器産業株式会社 | Thin film light emitting element |
JPS5997532A (en) * | 1982-11-24 | 1984-06-05 | Matsushita Electric Ind Co Ltd | Manufacture of electrooptic thin film material |
CN107369555A (en) * | 2016-05-11 | 2017-11-21 | 德尔福技术有限公司 | Increase the PLZT capacitors and method of electric medium constant |
-
1977
- 1977-03-23 JP JP3248677A patent/JPS53116499A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58209093A (en) * | 1982-05-28 | 1983-12-05 | 松下電器産業株式会社 | Thin film light emitting element |
JPH0439200B2 (en) * | 1982-05-28 | 1992-06-26 | ||
JPS5997532A (en) * | 1982-11-24 | 1984-06-05 | Matsushita Electric Ind Co Ltd | Manufacture of electrooptic thin film material |
JPH0335247B2 (en) * | 1982-11-24 | 1991-05-27 | Matsushita Electric Ind Co Ltd | |
CN107369555A (en) * | 2016-05-11 | 2017-11-21 | 德尔福技术有限公司 | Increase the PLZT capacitors and method of electric medium constant |
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