JPS645454B2 - - Google Patents

Info

Publication number
JPS645454B2
JPS645454B2 JP56045551A JP4555181A JPS645454B2 JP S645454 B2 JPS645454 B2 JP S645454B2 JP 56045551 A JP56045551 A JP 56045551A JP 4555181 A JP4555181 A JP 4555181A JP S645454 B2 JPS645454 B2 JP S645454B2
Authority
JP
Japan
Prior art keywords
water
cleaning
tank
cleaned
flow control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56045551A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57160131A (en
Inventor
Morio Toyooka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP56045551A priority Critical patent/JPS57160131A/ja
Publication of JPS57160131A publication Critical patent/JPS57160131A/ja
Publication of JPS645454B2 publication Critical patent/JPS645454B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P52/00—

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP56045551A 1981-03-30 1981-03-30 Washing cell Granted JPS57160131A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56045551A JPS57160131A (en) 1981-03-30 1981-03-30 Washing cell

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56045551A JPS57160131A (en) 1981-03-30 1981-03-30 Washing cell

Publications (2)

Publication Number Publication Date
JPS57160131A JPS57160131A (en) 1982-10-02
JPS645454B2 true JPS645454B2 (OSRAM) 1989-01-30

Family

ID=12722491

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56045551A Granted JPS57160131A (en) 1981-03-30 1981-03-30 Washing cell

Country Status (1)

Country Link
JP (1) JPS57160131A (OSRAM)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5974887U (ja) * 1982-11-09 1984-05-21 ソニー株式会社 洗浄装置
JPS60163436A (ja) * 1984-02-06 1985-08-26 Seiichiro Sogo 半導体材料の洗浄乾燥方法
JPS61254280A (ja) * 1985-05-07 1986-11-12 オムロン株式会社 超音波洗浄装置
JPH0164044U (OSRAM) * 1987-10-16 1989-04-25
KR0166831B1 (ko) * 1995-12-18 1999-02-01 문정환 반도체 웨이퍼 세정장치 및 방법

Also Published As

Publication number Publication date
JPS57160131A (en) 1982-10-02

Similar Documents

Publication Publication Date Title
US5890251A (en) Method and apparatus for scrubbing work in running wash liquid
US4375992A (en) Apparatus and method for cleaning recorded discs
JP2012183816A (ja) インクジェットヘッドの洗浄装置およびインクジェット記録装置
JPS645454B2 (OSRAM)
GB2031036A (en) Liquid Treatment of Metal Strip
KR101336996B1 (ko) 대면적 패널용 초음파 세정장치
JP6631687B1 (ja) 半導体ウェーハの洗浄槽および洗浄方法
GB2069962A (en) Conveying glass containers
JPS6217873B2 (OSRAM)
CN217194734U (zh) 一种用于化学机械抛光的供液装置、修整装置及抛光单元
JPS6110846Y2 (OSRAM)
JPS5919990B2 (ja) 化成処理方法及びその装置
JP3004334U (ja) 水平コンベア式連続洗浄装置
JP2759076B2 (ja) 連続超音波洗浄装置
JPS63202516A (ja) 板状物の移送装置
JP2579661B2 (ja) 電着槽
JP4905964B2 (ja) 食品の油揚げ装置
JPS6242372B2 (OSRAM)
JPH0195760A (ja) 野菜類の水洗水槽
JPS5846170B2 (ja) 半導体ウェファ−の搬送方法および搬送装置
JP7020457B2 (ja) シャローバス型酸洗装置
JP7589084B2 (ja) ワイピング装置
KR101008114B1 (ko) 강판 청정탱크내 금속이물 제거장치
JPS6188531A (ja) 集積回路装置の洗浄装置
JP2539732Y2 (ja) ウェーハ洗浄装置