JPS6453423A - Detection of etching end point - Google Patents

Detection of etching end point

Info

Publication number
JPS6453423A
JPS6453423A JP20969187A JP20969187A JPS6453423A JP S6453423 A JPS6453423 A JP S6453423A JP 20969187 A JP20969187 A JP 20969187A JP 20969187 A JP20969187 A JP 20969187A JP S6453423 A JPS6453423 A JP S6453423A
Authority
JP
Japan
Prior art keywords
oxide film
silicon
film
silicon oxide
nitrogen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20969187A
Other languages
English (en)
Inventor
Tsuguya Yanagihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Priority to JP20969187A priority Critical patent/JPS6453423A/ja
Publication of JPS6453423A publication Critical patent/JPS6453423A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP20969187A 1987-08-24 1987-08-24 Detection of etching end point Pending JPS6453423A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20969187A JPS6453423A (en) 1987-08-24 1987-08-24 Detection of etching end point

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20969187A JPS6453423A (en) 1987-08-24 1987-08-24 Detection of etching end point

Publications (1)

Publication Number Publication Date
JPS6453423A true JPS6453423A (en) 1989-03-01

Family

ID=16577033

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20969187A Pending JPS6453423A (en) 1987-08-24 1987-08-24 Detection of etching end point

Country Status (1)

Country Link
JP (1) JPS6453423A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5147740A (en) * 1990-08-09 1992-09-15 Rockwell International Corporation Structure and process for fabricating conductive patterns having sub-half micron dimensions
JP2006196735A (ja) * 2005-01-14 2006-07-27 Yamaha Corp サイドスペーサ形成法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5147740A (en) * 1990-08-09 1992-09-15 Rockwell International Corporation Structure and process for fabricating conductive patterns having sub-half micron dimensions
JP2006196735A (ja) * 2005-01-14 2006-07-27 Yamaha Corp サイドスペーサ形成法

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