JPS6451398A - Epitaxial growth method - Google Patents

Epitaxial growth method

Info

Publication number
JPS6451398A
JPS6451398A JP20872187A JP20872187A JPS6451398A JP S6451398 A JPS6451398 A JP S6451398A JP 20872187 A JP20872187 A JP 20872187A JP 20872187 A JP20872187 A JP 20872187A JP S6451398 A JPS6451398 A JP S6451398A
Authority
JP
Japan
Prior art keywords
reaction tube
upstream side
group
growth
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20872187A
Other languages
English (en)
Inventor
Akira Usui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP20872187A priority Critical patent/JPS6451398A/ja
Publication of JPS6451398A publication Critical patent/JPS6451398A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP20872187A 1987-08-21 1987-08-21 Epitaxial growth method Pending JPS6451398A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20872187A JPS6451398A (en) 1987-08-21 1987-08-21 Epitaxial growth method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20872187A JPS6451398A (en) 1987-08-21 1987-08-21 Epitaxial growth method

Publications (1)

Publication Number Publication Date
JPS6451398A true JPS6451398A (en) 1989-02-27

Family

ID=16560983

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20872187A Pending JPS6451398A (en) 1987-08-21 1987-08-21 Epitaxial growth method

Country Status (1)

Country Link
JP (1) JPS6451398A (ja)

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