JPS6447042U - - Google Patents

Info

Publication number
JPS6447042U
JPS6447042U JP1987125439U JP12543987U JPS6447042U JP S6447042 U JPS6447042 U JP S6447042U JP 1987125439 U JP1987125439 U JP 1987125439U JP 12543987 U JP12543987 U JP 12543987U JP S6447042 U JPS6447042 U JP S6447042U
Authority
JP
Japan
Prior art keywords
terminal
pads corresponding
terminals
force
sense
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987125439U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0429561Y2 (US07709020-20100504-C00041.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987125439U priority Critical patent/JPH0429561Y2/ja
Priority to US07/225,492 priority patent/US4899106A/en
Priority to EP88307340A priority patent/EP0305076B1/en
Priority to DE3852073T priority patent/DE3852073T2/de
Publication of JPS6447042U publication Critical patent/JPS6447042U/ja
Application granted granted Critical
Publication of JPH0429561Y2 publication Critical patent/JPH0429561Y2/ja
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP1987125439U 1987-08-18 1987-08-18 Expired JPH0429561Y2 (US07709020-20100504-C00041.png)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP1987125439U JPH0429561Y2 (US07709020-20100504-C00041.png) 1987-08-18 1987-08-18
US07/225,492 US4899106A (en) 1987-08-18 1988-07-28 Personality board
EP88307340A EP0305076B1 (en) 1987-08-18 1988-08-09 Personality board
DE3852073T DE3852073T2 (de) 1987-08-18 1988-08-09 Angepasste gedruckte Schaltung.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987125439U JPH0429561Y2 (US07709020-20100504-C00041.png) 1987-08-18 1987-08-18

Publications (2)

Publication Number Publication Date
JPS6447042U true JPS6447042U (US07709020-20100504-C00041.png) 1989-03-23
JPH0429561Y2 JPH0429561Y2 (US07709020-20100504-C00041.png) 1992-07-17

Family

ID=14910114

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987125439U Expired JPH0429561Y2 (US07709020-20100504-C00041.png) 1987-08-18 1987-08-18

Country Status (4)

Country Link
US (1) US4899106A (US07709020-20100504-C00041.png)
EP (1) EP0305076B1 (US07709020-20100504-C00041.png)
JP (1) JPH0429561Y2 (US07709020-20100504-C00041.png)
DE (1) DE3852073T2 (US07709020-20100504-C00041.png)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2677772B1 (fr) * 1991-06-11 1993-10-08 Sgs Thomson Microelectronics Sa Carte a pointes pour testeur de puces de circuit integre.
US5806181A (en) * 1993-11-16 1998-09-15 Formfactor, Inc. Contact carriers (tiles) for populating larger substrates with spring contacts
US7073254B2 (en) * 1993-11-16 2006-07-11 Formfactor, Inc. Method for mounting a plurality of spring contact elements
US20020053734A1 (en) * 1993-11-16 2002-05-09 Formfactor, Inc. Probe card assembly and kit, and methods of making same
US6741085B1 (en) * 1993-11-16 2004-05-25 Formfactor, Inc. Contact carriers (tiles) for populating larger substrates with spring contacts
US5600259A (en) * 1993-12-17 1997-02-04 International Business Machines Corporation Method and apparatus for reducing interference in a pin array
JPH07245133A (ja) * 1994-03-06 1995-09-19 Yokogawa Hewlett Packard Ltd 電気接続構造
US5546012A (en) * 1994-04-15 1996-08-13 International Business Machines Corporation Probe card assembly having a ceramic probe card
JP3608795B2 (ja) * 1995-05-26 2005-01-12 フォームファクター，インコーポレイテッド より大きな基板にばね接触子を定置させるための接触子担体（タイル）
US5994152A (en) 1996-02-21 1999-11-30 Formfactor, Inc. Fabricating interconnects and tips using sacrificial substrates
US8033838B2 (en) * 1996-02-21 2011-10-11 Formfactor, Inc. Microelectronic contact structure
US5808475A (en) * 1996-06-07 1998-09-15 Keithley Instruments, Inc. Semiconductor probe card for low current measurements
US6690185B1 (en) 1997-01-15 2004-02-10 Formfactor, Inc. Large contactor with multiple, aligned contactor units
US6034533A (en) * 1997-06-10 2000-03-07 Tervo; Paul A. Low-current pogo probe card
US6047469A (en) * 1997-11-12 2000-04-11 Luna Family Trust Method of connecting a unit under test in a wireless test fixture
US7215131B1 (en) 1999-06-07 2007-05-08 Formfactor, Inc. Segmented contactor
JP2003031666A (ja) * 2001-07-12 2003-01-31 Mitsubishi Electric Corp 半導体デバイスまたは半導体ウェハ一括のテスト装置及びテスト方法
KR100443999B1 (ko) * 2003-02-28 2004-08-21 주식회사 파이컴 인쇄회로기판용 상호 접속체, 이의 제조방법 및 이를구비한 상호 접속 조립체
US8476918B2 (en) * 2010-04-28 2013-07-02 Tsmc Solid State Lighting Ltd. Apparatus and method for wafer level classification of light emitting device
US9772391B2 (en) * 2014-01-24 2017-09-26 Tektronix, Inc. Method for probe equalization

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3911361A (en) * 1974-06-28 1975-10-07 Ibm Coaxial array space transformer
US4038599A (en) * 1974-12-30 1977-07-26 International Business Machines Corporation High density wafer contacting and test system
US3963986A (en) * 1975-02-10 1976-06-15 International Business Machines Corporation Programmable interface contactor structure
US4574235A (en) * 1981-06-05 1986-03-04 Micro Component Technology, Inc. Transmission line connector and contact set assembly for test site
US4488111A (en) * 1982-06-01 1984-12-11 At&T Technologies, Inc. Coupling devices for operations such as testing
JPS58189530U (ja) * 1982-06-10 1983-12-16 横河・ヒユ−レツト・パツカ−ド株式会社 プリント配線基板

Also Published As

Publication number Publication date
JPH0429561Y2 (US07709020-20100504-C00041.png) 1992-07-17
DE3852073T2 (de) 1995-03-16
EP0305076A2 (en) 1989-03-01
EP0305076B1 (en) 1994-11-09
US4899106A (en) 1990-02-06
EP0305076A3 (en) 1989-03-15
DE3852073D1 (de) 1994-12-15

Similar Documents

Publication Publication Date Title
JPS6447042U (US07709020-20100504-C00041.png)
JPS6336047U (US07709020-20100504-C00041.png)
JPS63280432A (ja) Ｉｃパツケ−ジ
JPS6336045U (US07709020-20100504-C00041.png)
JP3052874B2 (ja) Ｂｇａ型半導体装置のプローブ装置
JPS63109674U (US07709020-20100504-C00041.png)
JPH04288847A (ja) 半導体試験装置
JP2926759B2 (ja) 半導体集積回路測定治具
JPS62157145U (US07709020-20100504-C00041.png)
JPH0661316A (ja) プローブ集合体
JPS63152243U (US07709020-20100504-C00041.png)
JPH0474432U (US07709020-20100504-C00041.png)
JPH0270441U (US07709020-20100504-C00041.png)
JPS6448064U (US07709020-20100504-C00041.png)
JPH0523537U (ja) プローブカード
JPS6329538A (ja) プロ−ブ装置
JPS62157146U (US07709020-20100504-C00041.png)
JPH0754814B2 (ja) Ｉｃチツプの試験測定方法
JPS6336046U (US07709020-20100504-C00041.png)
JPH0666372B2 (ja) 集積回路
JPS58164235U (ja) 半導体装置の試験装置
JPS62163764U (US07709020-20100504-C00041.png)
JPH0328465U (US07709020-20100504-C00041.png)
JPH044754U (US07709020-20100504-C00041.png)
JPS60109326U (ja) 半導体疑似試験装置