JPS6447042U - - Google Patents
Info
- Publication number
- JPS6447042U JPS6447042U JP1987125439U JP12543987U JPS6447042U JP S6447042 U JPS6447042 U JP S6447042U JP 1987125439 U JP1987125439 U JP 1987125439U JP 12543987 U JP12543987 U JP 12543987U JP S6447042 U JPS6447042 U JP S6447042U
- Authority
- JP
- Japan
- Prior art keywords
- terminal
- pads corresponding
- terminals
- force
- sense
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000012360 testing method Methods 0.000 claims 3
- 238000005259 measurement Methods 0.000 claims 1
- 239000000523 sample Substances 0.000 claims 1
- 239000004020 conductor Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987125439U JPH0429561Y2 (US06633600-20031014-M00021.png) | 1987-08-18 | 1987-08-18 | |
US07/225,492 US4899106A (en) | 1987-08-18 | 1988-07-28 | Personality board |
EP88307340A EP0305076B1 (en) | 1987-08-18 | 1988-08-09 | Personality board |
DE3852073T DE3852073T2 (de) | 1987-08-18 | 1988-08-09 | Angepasste gedruckte Schaltung. |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987125439U JPH0429561Y2 (US06633600-20031014-M00021.png) | 1987-08-18 | 1987-08-18 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6447042U true JPS6447042U (US06633600-20031014-M00021.png) | 1989-03-23 |
JPH0429561Y2 JPH0429561Y2 (US06633600-20031014-M00021.png) | 1992-07-17 |
Family
ID=14910114
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987125439U Expired JPH0429561Y2 (US06633600-20031014-M00021.png) | 1987-08-18 | 1987-08-18 |
Country Status (4)
Country | Link |
---|---|
US (1) | US4899106A (US06633600-20031014-M00021.png) |
EP (1) | EP0305076B1 (US06633600-20031014-M00021.png) |
JP (1) | JPH0429561Y2 (US06633600-20031014-M00021.png) |
DE (1) | DE3852073T2 (US06633600-20031014-M00021.png) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2677772B1 (fr) * | 1991-06-11 | 1993-10-08 | Sgs Thomson Microelectronics Sa | Carte a pointes pour testeur de puces de circuit integre. |
US5806181A (en) * | 1993-11-16 | 1998-09-15 | Formfactor, Inc. | Contact carriers (tiles) for populating larger substrates with spring contacts |
US7073254B2 (en) * | 1993-11-16 | 2006-07-11 | Formfactor, Inc. | Method for mounting a plurality of spring contact elements |
US20020053734A1 (en) * | 1993-11-16 | 2002-05-09 | Formfactor, Inc. | Probe card assembly and kit, and methods of making same |
US6741085B1 (en) * | 1993-11-16 | 2004-05-25 | Formfactor, Inc. | Contact carriers (tiles) for populating larger substrates with spring contacts |
US5600259A (en) * | 1993-12-17 | 1997-02-04 | International Business Machines Corporation | Method and apparatus for reducing interference in a pin array |
JPH07245133A (ja) * | 1994-03-06 | 1995-09-19 | Yokogawa Hewlett Packard Ltd | 電気接続構造 |
US5546012A (en) * | 1994-04-15 | 1996-08-13 | International Business Machines Corporation | Probe card assembly having a ceramic probe card |
JP3608795B2 (ja) * | 1995-05-26 | 2005-01-12 | フォームファクター,インコーポレイテッド | より大きな基板にばね接触子を定置させるための接触子担体(タイル) |
US5994152A (en) | 1996-02-21 | 1999-11-30 | Formfactor, Inc. | Fabricating interconnects and tips using sacrificial substrates |
US8033838B2 (en) * | 1996-02-21 | 2011-10-11 | Formfactor, Inc. | Microelectronic contact structure |
US5808475A (en) * | 1996-06-07 | 1998-09-15 | Keithley Instruments, Inc. | Semiconductor probe card for low current measurements |
US6690185B1 (en) | 1997-01-15 | 2004-02-10 | Formfactor, Inc. | Large contactor with multiple, aligned contactor units |
US6034533A (en) * | 1997-06-10 | 2000-03-07 | Tervo; Paul A. | Low-current pogo probe card |
US6047469A (en) * | 1997-11-12 | 2000-04-11 | Luna Family Trust | Method of connecting a unit under test in a wireless test fixture |
US7215131B1 (en) | 1999-06-07 | 2007-05-08 | Formfactor, Inc. | Segmented contactor |
JP2003031666A (ja) * | 2001-07-12 | 2003-01-31 | Mitsubishi Electric Corp | 半導体デバイスまたは半導体ウェハ一括のテスト装置及びテスト方法 |
KR100443999B1 (ko) * | 2003-02-28 | 2004-08-21 | 주식회사 파이컴 | 인쇄회로기판용 상호 접속체, 이의 제조방법 및 이를구비한 상호 접속 조립체 |
US8476918B2 (en) * | 2010-04-28 | 2013-07-02 | Tsmc Solid State Lighting Ltd. | Apparatus and method for wafer level classification of light emitting device |
US9772391B2 (en) * | 2014-01-24 | 2017-09-26 | Tektronix, Inc. | Method for probe equalization |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3911361A (en) * | 1974-06-28 | 1975-10-07 | Ibm | Coaxial array space transformer |
US4038599A (en) * | 1974-12-30 | 1977-07-26 | International Business Machines Corporation | High density wafer contacting and test system |
US3963986A (en) * | 1975-02-10 | 1976-06-15 | International Business Machines Corporation | Programmable interface contactor structure |
US4574235A (en) * | 1981-06-05 | 1986-03-04 | Micro Component Technology, Inc. | Transmission line connector and contact set assembly for test site |
US4488111A (en) * | 1982-06-01 | 1984-12-11 | At&T Technologies, Inc. | Coupling devices for operations such as testing |
JPS58189530U (ja) * | 1982-06-10 | 1983-12-16 | 横河・ヒユ−レツト・パツカ−ド株式会社 | プリント配線基板 |
-
1987
- 1987-08-18 JP JP1987125439U patent/JPH0429561Y2/ja not_active Expired
-
1988
- 1988-07-28 US US07/225,492 patent/US4899106A/en not_active Expired - Lifetime
- 1988-08-09 DE DE3852073T patent/DE3852073T2/de not_active Expired - Fee Related
- 1988-08-09 EP EP88307340A patent/EP0305076B1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0429561Y2 (US06633600-20031014-M00021.png) | 1992-07-17 |
DE3852073T2 (de) | 1995-03-16 |
EP0305076A2 (en) | 1989-03-01 |
EP0305076B1 (en) | 1994-11-09 |
US4899106A (en) | 1990-02-06 |
EP0305076A3 (en) | 1989-03-15 |
DE3852073D1 (de) | 1994-12-15 |