JPS6442867A - Mis-type nonvolatile memory and manufacture thereof - Google Patents

Mis-type nonvolatile memory and manufacture thereof

Info

Publication number
JPS6442867A
JPS6442867A JP20032387A JP20032387A JPS6442867A JP S6442867 A JPS6442867 A JP S6442867A JP 20032387 A JP20032387 A JP 20032387A JP 20032387 A JP20032387 A JP 20032387A JP S6442867 A JPS6442867 A JP S6442867A
Authority
JP
Japan
Prior art keywords
silicon nitride
nitride film
composition
mis
manufacture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20032387A
Other languages
English (en)
Other versions
JPH0642550B2 (ja
Inventor
Yasunobu Saito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Yamagata Ltd
Original Assignee
NEC Yamagata Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Yamagata Ltd filed Critical NEC Yamagata Ltd
Priority to JP62200323A priority Critical patent/JPH0642550B2/ja
Publication of JPS6442867A publication Critical patent/JPS6442867A/ja
Publication of JPH0642550B2 publication Critical patent/JPH0642550B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP62200323A 1987-08-10 1987-08-10 Ｍｉｓ型不揮発性メモリ−及びその製造方法 Expired - Lifetime JPH0642550B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62200323A JPH0642550B2 (ja) 1987-08-10 1987-08-10 Ｍｉｓ型不揮発性メモリ−及びその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62200323A JPH0642550B2 (ja) 1987-08-10 1987-08-10 Ｍｉｓ型不揮発性メモリ−及びその製造方法

Publications (2)

Publication Number Publication Date
JPS6442867A true JPS6442867A (en) 1989-02-15
JPH0642550B2 JPH0642550B2 (ja) 1994-06-01

Family

ID=16422386

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62200323A Expired - Lifetime JPH0642550B2 (ja) 1987-08-10 1987-08-10 Ｍｉｓ型不揮発性メモリ−及びその製造方法

Country Status (1)

Country Link
JP (1) JPH0642550B2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8281446B2 (en) 2004-07-14 2012-10-09 Colgate-Palmolive Company Oral care implement

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5357771A (en) * 1976-11-04 1978-05-25 Sony Corp Non-volatile memory transistor
JPS5834978A (ja) * 1981-08-26 1983-03-01 Matsushita Electronics Corp 半導体記憶装置
JPS5867072A (ja) * 1981-10-16 1983-04-21 Nec Corp 半導体装置の製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5357771A (en) * 1976-11-04 1978-05-25 Sony Corp Non-volatile memory transistor
JPS5834978A (ja) * 1981-08-26 1983-03-01 Matsushita Electronics Corp 半導体記憶装置
JPS5867072A (ja) * 1981-10-16 1983-04-21 Nec Corp 半導体装置の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8281446B2 (en) 2004-07-14 2012-10-09 Colgate-Palmolive Company Oral care implement

Also Published As

Publication number Publication date
JPH0642550B2 (ja) 1994-06-01

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