JPS6442577A - Ion treating device - Google Patents

Ion treating device

Info

Publication number
JPS6442577A
JPS6442577A JP19869787A JP19869787A JPS6442577A JP S6442577 A JPS6442577 A JP S6442577A JP 19869787 A JP19869787 A JP 19869787A JP 19869787 A JP19869787 A JP 19869787A JP S6442577 A JPS6442577 A JP S6442577A
Authority
JP
Japan
Prior art keywords
holder
wafer
main shaft
passage
refrigerant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19869787A
Other languages
English (en)
Inventor
Tsukasa Nogami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP19869787A priority Critical patent/JPS6442577A/ja
Publication of JPS6442577A publication Critical patent/JPS6442577A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP19869787A 1987-08-08 1987-08-08 Ion treating device Pending JPS6442577A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19869787A JPS6442577A (en) 1987-08-08 1987-08-08 Ion treating device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19869787A JPS6442577A (en) 1987-08-08 1987-08-08 Ion treating device

Publications (1)

Publication Number Publication Date
JPS6442577A true JPS6442577A (en) 1989-02-14

Family

ID=16395521

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19869787A Pending JPS6442577A (en) 1987-08-08 1987-08-08 Ion treating device

Country Status (1)

Country Link
JP (1) JPS6442577A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01180968A (ja) * 1988-01-13 1989-07-18 Hitachi Ltd イオンビーム加工装置
JPH0398329U (ja) * 1990-01-29 1991-10-11

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6029167B2 (ja) * 1980-09-13 1985-07-09 東北電力株式会社 耐塩長幹碍子
JPS61159571A (ja) * 1985-01-07 1986-07-19 Hitachi Ltd スパツタリング装置
JPS6254089A (ja) * 1985-09-02 1987-03-09 Hitachi Ltd ウエハ自公転機構

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6029167B2 (ja) * 1980-09-13 1985-07-09 東北電力株式会社 耐塩長幹碍子
JPS61159571A (ja) * 1985-01-07 1986-07-19 Hitachi Ltd スパツタリング装置
JPS6254089A (ja) * 1985-09-02 1987-03-09 Hitachi Ltd ウエハ自公転機構

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01180968A (ja) * 1988-01-13 1989-07-18 Hitachi Ltd イオンビーム加工装置
JPH0398329U (ja) * 1990-01-29 1991-10-11

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