JPS6441294A - Manufacture of solid-state laser - Google Patents
Manufacture of solid-state laserInfo
- Publication number
- JPS6441294A JPS6441294A JP19771387A JP19771387A JPS6441294A JP S6441294 A JPS6441294 A JP S6441294A JP 19771387 A JP19771387 A JP 19771387A JP 19771387 A JP19771387 A JP 19771387A JP S6441294 A JPS6441294 A JP S6441294A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- oxide film
- film
- solid
- silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE:To maintain thickness of a substrate with reproducibility in a process in which a rear of the substrate is first etched and to realize a solid-state laser with good luminous efficiency, by forming an etching stopper layer of a prescribed depth in the single-crystalline substrate. CONSTITUTION:A heat oxide film 12 is formed on a rear of a silicon substrate 11, and after the patterning of it, a silicon oxide film 13 is formed on a surface of the substrate 11. Next the surface of the substrate 11 is annealed, and a ZnS:Tb layer 14 is made to grow as a luminous layer on this annealed surface (f), and it is provided with a patterning process. A first insulation film 15 made of Ta2O5 is formed and a first electrode 16 is formed thereon. In succession the oxide film 12 on the rear of the substrate is used as a mask to perform anisotropic etching. Thereupon, said silicon film 13 functions as an etching stopper layer. Subsequently, the heat oxide film 12 is removed, and a second insulation film 17 made of Ta2O5 and a second electrode are formed on the surface after the removal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19771387A JP2587642B2 (en) | 1987-08-07 | 1987-08-07 | Method for manufacturing solid laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19771387A JP2587642B2 (en) | 1987-08-07 | 1987-08-07 | Method for manufacturing solid laser |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6441294A true JPS6441294A (en) | 1989-02-13 |
| JP2587642B2 JP2587642B2 (en) | 1997-03-05 |
Family
ID=16379117
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19771387A Expired - Lifetime JP2587642B2 (en) | 1987-08-07 | 1987-08-07 | Method for manufacturing solid laser |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2587642B2 (en) |
-
1987
- 1987-08-07 JP JP19771387A patent/JP2587642B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JP2587642B2 (en) | 1997-03-05 |
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