JPS6436022A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS6436022A JPS6436022A JP19009787A JP19009787A JPS6436022A JP S6436022 A JPS6436022 A JP S6436022A JP 19009787 A JP19009787 A JP 19009787A JP 19009787 A JP19009787 A JP 19009787A JP S6436022 A JPS6436022 A JP S6436022A
- Authority
- JP
- Japan
- Prior art keywords
- film
- etching operation
- insulating film
- etching
- impressed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19009787A JPS6436022A (en) | 1987-07-31 | 1987-07-31 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19009787A JPS6436022A (en) | 1987-07-31 | 1987-07-31 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6436022A true JPS6436022A (en) | 1989-02-07 |
Family
ID=16252322
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19009787A Pending JPS6436022A (en) | 1987-07-31 | 1987-07-31 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6436022A (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5510294A (en) * | 1991-12-31 | 1996-04-23 | Sgs-Thomson Microelectronics, Inc. | Method of forming vias for multilevel metallization |
DE19939317A1 (de) * | 1999-08-19 | 2001-02-22 | Bosch Gmbh Robert | Verfahren zur Herstellung von Polymerstrukturen mittels eines Ätzprozesses |
CN102013396A (zh) * | 2009-09-04 | 2011-04-13 | 东京毅力科创株式会社 | 等离子体蚀刻方法 |
-
1987
- 1987-07-31 JP JP19009787A patent/JPS6436022A/ja active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5510294A (en) * | 1991-12-31 | 1996-04-23 | Sgs-Thomson Microelectronics, Inc. | Method of forming vias for multilevel metallization |
DE19939317A1 (de) * | 1999-08-19 | 2001-02-22 | Bosch Gmbh Robert | Verfahren zur Herstellung von Polymerstrukturen mittels eines Ätzprozesses |
CN102013396A (zh) * | 2009-09-04 | 2011-04-13 | 东京毅力科创株式会社 | 等离子体蚀刻方法 |
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