JPS6436022A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS6436022A
JPS6436022A JP19009787A JP19009787A JPS6436022A JP S6436022 A JPS6436022 A JP S6436022A JP 19009787 A JP19009787 A JP 19009787A JP 19009787 A JP19009787 A JP 19009787A JP S6436022 A JPS6436022 A JP S6436022A
Authority
JP
Japan
Prior art keywords
film
etching operation
insulating film
etching
impressed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19009787A
Other languages
English (en)
Inventor
Seiji Sagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP19009787A priority Critical patent/JPS6436022A/ja
Publication of JPS6436022A publication Critical patent/JPS6436022A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP19009787A 1987-07-31 1987-07-31 Manufacture of semiconductor device Pending JPS6436022A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19009787A JPS6436022A (en) 1987-07-31 1987-07-31 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19009787A JPS6436022A (en) 1987-07-31 1987-07-31 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS6436022A true JPS6436022A (en) 1989-02-07

Family

ID=16252322

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19009787A Pending JPS6436022A (en) 1987-07-31 1987-07-31 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS6436022A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5510294A (en) * 1991-12-31 1996-04-23 Sgs-Thomson Microelectronics, Inc. Method of forming vias for multilevel metallization
DE19939317A1 (de) * 1999-08-19 2001-02-22 Bosch Gmbh Robert Verfahren zur Herstellung von Polymerstrukturen mittels eines Ätzprozesses
CN102013396A (zh) * 2009-09-04 2011-04-13 东京毅力科创株式会社 等离子体蚀刻方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5510294A (en) * 1991-12-31 1996-04-23 Sgs-Thomson Microelectronics, Inc. Method of forming vias for multilevel metallization
DE19939317A1 (de) * 1999-08-19 2001-02-22 Bosch Gmbh Robert Verfahren zur Herstellung von Polymerstrukturen mittels eines Ätzprozesses
CN102013396A (zh) * 2009-09-04 2011-04-13 东京毅力科创株式会社 等离子体蚀刻方法

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