JPS6435932A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS6435932A
JPS6435932A JP19008487A JP19008487A JPS6435932A JP S6435932 A JPS6435932 A JP S6435932A JP 19008487 A JP19008487 A JP 19008487A JP 19008487 A JP19008487 A JP 19008487A JP S6435932 A JPS6435932 A JP S6435932A
Authority
JP
Japan
Prior art keywords
film
insulating film
fine interval
films
insulating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19008487A
Other languages
English (en)
Inventor
Akinori Shimizu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP19008487A priority Critical patent/JPS6435932A/ja
Publication of JPS6435932A publication Critical patent/JPS6435932A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP19008487A 1987-07-31 1987-07-31 Manufacture of semiconductor device Pending JPS6435932A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19008487A JPS6435932A (en) 1987-07-31 1987-07-31 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19008487A JPS6435932A (en) 1987-07-31 1987-07-31 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS6435932A true JPS6435932A (en) 1989-02-07

Family

ID=16252099

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19008487A Pending JPS6435932A (en) 1987-07-31 1987-07-31 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS6435932A (ja)

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