JPS6435909A - Barrel type vapor growth device - Google Patents
Barrel type vapor growth deviceInfo
- Publication number
- JPS6435909A JPS6435909A JP19078187A JP19078187A JPS6435909A JP S6435909 A JPS6435909 A JP S6435909A JP 19078187 A JP19078187 A JP 19078187A JP 19078187 A JP19078187 A JP 19078187A JP S6435909 A JPS6435909 A JP S6435909A
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- heating
- lamp house
- vapor growth
- barrel type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19078187A JPS6435909A (en) | 1987-07-30 | 1987-07-30 | Barrel type vapor growth device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19078187A JPS6435909A (en) | 1987-07-30 | 1987-07-30 | Barrel type vapor growth device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6435909A true JPS6435909A (en) | 1989-02-07 |
Family
ID=16263627
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19078187A Pending JPS6435909A (en) | 1987-07-30 | 1987-07-30 | Barrel type vapor growth device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6435909A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013021454A1 (ja) * | 2011-08-09 | 2013-02-14 | 東横化学株式会社 | 熱処理装置 |
-
1987
- 1987-07-30 JP JP19078187A patent/JPS6435909A/ja active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013021454A1 (ja) * | 2011-08-09 | 2013-02-14 | 東横化学株式会社 | 熱処理装置 |
JPWO2013021454A1 (ja) * | 2011-08-09 | 2015-03-05 | 東横化学株式会社 | 熱処理装置 |
US10237915B2 (en) | 2011-08-09 | 2019-03-19 | Toyoko Kagaku Co., Ltd. | Heat treatment apparatus |
US11291083B2 (en) | 2011-08-09 | 2022-03-29 | Toyoko Kagaku Co., Ltd. | Heat treatment apparatus |
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