JPS6435910A - Barrel type vapor growth device - Google Patents

Barrel type vapor growth device

Info

Publication number
JPS6435910A
JPS6435910A JP19078287A JP19078287A JPS6435910A JP S6435910 A JPS6435910 A JP S6435910A JP 19078287 A JP19078287 A JP 19078287A JP 19078287 A JP19078287 A JP 19078287A JP S6435910 A JPS6435910 A JP S6435910A
Authority
JP
Japan
Prior art keywords
susceptor
lamp house
barrel type
heating means
growth device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19078287A
Other languages
Japanese (ja)
Other versions
JP2621197B2 (en
Inventor
Hiroharu Kawai
Fumihiko Nakamura
Masahisa Enomoto
Keiichi Yoneyama
Kikuo Kaise
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP62190782A priority Critical patent/JP2621197B2/en
Publication of JPS6435910A publication Critical patent/JPS6435910A/en
Application granted granted Critical
Publication of JP2621197B2 publication Critical patent/JP2621197B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PURPOSE:To enhance the thermal efficiency of a susceptor heating device as well as to contrive improvement in controllability of the susceptor temperature by a method wherein a susceptor heating device is arranged in the lamp house located in a barrel type susceptor, and the inside of the lamp house is depressed. CONSTITUTION:A barrel type susceptor 14, which supports a substrate, is provided in a bell jar 11. In this case, a lamp house 17 is provided inside the barrel type susceptor 14, a susceptor heating means 15 is arranged inside the lamp house 17, and the inside of the lamp house is depressed. The susceptor heating means 15 is composed of the resistance heating body such as carbon, SiC and the like. By depressing the lamp house 17 in which the susceptor heating means 15 is arranged, the entire energy of the susceptor heating means 15 can be used as radiant energy. As a result, energy efficiency can be improved, and the controllability of the susceptor temperature can also be improved.
JP62190782A 1987-07-30 1987-07-30 Barrel type vapor phase growth equipment Expired - Lifetime JP2621197B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62190782A JP2621197B2 (en) 1987-07-30 1987-07-30 Barrel type vapor phase growth equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62190782A JP2621197B2 (en) 1987-07-30 1987-07-30 Barrel type vapor phase growth equipment

Publications (2)

Publication Number Publication Date
JPS6435910A true JPS6435910A (en) 1989-02-07
JP2621197B2 JP2621197B2 (en) 1997-06-18

Family

ID=16263645

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62190782A Expired - Lifetime JP2621197B2 (en) 1987-07-30 1987-07-30 Barrel type vapor phase growth equipment

Country Status (1)

Country Link
JP (1) JP2621197B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002141294A (en) * 2000-07-24 2002-05-17 Asm America Inc Improved heat lamp for heating zone

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5372569A (en) * 1976-12-10 1978-06-28 Mitsubishi Electric Corp Vapor growing device
JPS6138930U (en) * 1984-08-07 1986-03-11 東京エレクトロン相模株式会社 Optical CVD equipment

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5372569A (en) * 1976-12-10 1978-06-28 Mitsubishi Electric Corp Vapor growing device
JPS6138930U (en) * 1984-08-07 1986-03-11 東京エレクトロン相模株式会社 Optical CVD equipment

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002141294A (en) * 2000-07-24 2002-05-17 Asm America Inc Improved heat lamp for heating zone

Also Published As

Publication number Publication date
JP2621197B2 (en) 1997-06-18

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