ES2162861T3 - Procedimiento activado por energia de microondas para la preparacion de material semiconductor de alta calidad. - Google Patents
Procedimiento activado por energia de microondas para la preparacion de material semiconductor de alta calidad.Info
- Publication number
- ES2162861T3 ES2162861T3 ES94909452T ES94909452T ES2162861T3 ES 2162861 T3 ES2162861 T3 ES 2162861T3 ES 94909452 T ES94909452 T ES 94909452T ES 94909452 T ES94909452 T ES 94909452T ES 2162861 T3 ES2162861 T3 ES 2162861T3
- Authority
- ES
- Spain
- Prior art keywords
- semiconductor material
- high quality
- microwave energy
- quality semiconductor
- preparation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32357—Generation remote from the workpiece, e.g. down-stream
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/511—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using microwave discharges
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32697—Electrostatic control
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Photovoltaic Devices (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Abstract
MATERIAL SEMICONDUCTOR DE ALTA CALIDAD SE DEPOSITA EN UN PROCESO DE ELECTRODEPOSICION DE DESCARGA LUMINESCENTE ENERGIZADO POR MICRONDAS, ENERGIZANDO UN GAS EN PROCESO CON ENERGIA POR MICRONDAS MEDIANTE UN GENERADOR DE MICRONDAS (24) A UN NIVEL DE POTENCIA SUFICIENTE PARA GENERAR UN PLASMA (30) A UN GRADO DE SATURACION DE APROXIMADAMENTE EL 100, E IMPIDIENDO EL ACCESO DE LAS ESPECIES DE ELECTRODEPOSICION A UN SUSTRATO (28) PARA REBAJAR EL INDICE DE ELECTRODEPOSICION A UN VALOR MENOR QUE EL QUE SE CONSEGUIRIA, DE OTRA FORMA, OPERANDO A UN GRADO DE SATURACION DEL 100.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/010,074 US5334423A (en) | 1993-01-28 | 1993-01-28 | Microwave energized process for the preparation of high quality semiconductor material |
Publications (1)
Publication Number | Publication Date |
---|---|
ES2162861T3 true ES2162861T3 (es) | 2002-01-16 |
Family
ID=21743695
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES94909452T Expired - Lifetime ES2162861T3 (es) | 1993-01-28 | 1994-01-13 | Procedimiento activado por energia de microondas para la preparacion de material semiconductor de alta calidad. |
Country Status (6)
Country | Link |
---|---|
US (1) | US5334423A (es) |
EP (1) | EP0680384B1 (es) |
JP (1) | JPH08506215A (es) |
AU (1) | AU6229494A (es) |
ES (1) | ES2162861T3 (es) |
WO (1) | WO1994016825A1 (es) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6274461B1 (en) * | 1998-08-20 | 2001-08-14 | United Solar Systems Corporation | Method for depositing layers of high quality semiconductor material |
DE19935046C2 (de) * | 1999-07-26 | 2001-07-12 | Schott Glas | Plasma-CVD-Verfahren und Vorrichtung zur Herstellung einer mikrokristallinen Si:H-Schicht auf einem Substrat sowie deren Verwendung |
KR20030028296A (ko) * | 2001-09-28 | 2003-04-08 | 학교법인 한양학원 | 플라즈마 화학기상증착 장치 및 이를 이용한 탄소나노튜브제조방법 |
DE10308381B4 (de) * | 2003-02-27 | 2012-08-16 | Forschungszentrum Jülich GmbH | Verfahren zur Abscheidung von Silizium |
FR2857379A1 (fr) * | 2003-07-09 | 2005-01-14 | Inanov | Croissance catalytique et directionnelle de nanotubes de carbone individuels, applications a des sources froides d'electrons |
DE10353996A1 (de) * | 2003-11-19 | 2005-06-09 | Degussa Ag | Nanoskaliges, kristallines Siliciumpulver |
EP1760045A1 (en) | 2005-09-03 | 2007-03-07 | Degussa GmbH | Nanoscale silicon particles |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4504518A (en) * | 1982-09-24 | 1985-03-12 | Energy Conversion Devices, Inc. | Method of making amorphous semiconductor alloys and devices using microwave energy |
US4517223A (en) * | 1982-09-24 | 1985-05-14 | Sovonics Solar Systems | Method of making amorphous semiconductor alloys and devices using microwave energy |
GB8516537D0 (en) * | 1985-06-29 | 1985-07-31 | Standard Telephones Cables Ltd | Pulsed plasma apparatus |
US4721663A (en) * | 1985-08-26 | 1988-01-26 | Energy Conversion Devices, Inc. | Enhancement layer for negatively charged electrophotographic devices |
DE3853551T2 (de) * | 1987-05-08 | 1995-10-05 | Hitachi Ltd | Plasmabehandlungsvorrichtung. |
US4883686A (en) * | 1988-05-26 | 1989-11-28 | Energy Conversion Devices, Inc. | Method for the high rate plasma deposition of high quality material |
US5192717A (en) * | 1989-04-28 | 1993-03-09 | Canon Kabushiki Kaisha | Process for the formation of a polycrystalline semiconductor film by microwave plasma chemical vapor deposition method |
-
1993
- 1993-01-28 US US08/010,074 patent/US5334423A/en not_active Expired - Lifetime
-
1994
- 1994-01-13 EP EP94909452A patent/EP0680384B1/en not_active Expired - Lifetime
- 1994-01-13 JP JP6517091A patent/JPH08506215A/ja active Pending
- 1994-01-13 ES ES94909452T patent/ES2162861T3/es not_active Expired - Lifetime
- 1994-01-13 AU AU62294/94A patent/AU6229494A/en not_active Abandoned
- 1994-01-13 WO PCT/US1994/000450 patent/WO1994016825A1/en active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
EP0680384A4 (en) | 1997-12-29 |
US5334423A (en) | 1994-08-02 |
AU6229494A (en) | 1994-08-15 |
EP0680384B1 (en) | 2001-09-12 |
EP0680384A1 (en) | 1995-11-08 |
JPH08506215A (ja) | 1996-07-02 |
WO1994016825A1 (en) | 1994-08-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FG2A | Definitive protection |
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