JPS6435382A - Probe card - Google Patents

Probe card

Info

Publication number
JPS6435382A
JPS6435382A JP19321587A JP19321587A JPS6435382A JP S6435382 A JPS6435382 A JP S6435382A JP 19321587 A JP19321587 A JP 19321587A JP 19321587 A JP19321587 A JP 19321587A JP S6435382 A JPS6435382 A JP S6435382A
Authority
JP
Japan
Prior art keywords
probe
stylus
holes
guide plates
fixation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19321587A
Other languages
English (en)
Other versions
JP2519737B2 (ja
Inventor
Noboru Masuoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP62193215A priority Critical patent/JP2519737B2/ja
Publication of JPS6435382A publication Critical patent/JPS6435382A/ja
Application granted granted Critical
Publication of JP2519737B2 publication Critical patent/JP2519737B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP62193215A 1987-07-31 1987-07-31 プロ−ブカ−ド Expired - Lifetime JP2519737B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62193215A JP2519737B2 (ja) 1987-07-31 1987-07-31 プロ−ブカ−ド

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62193215A JP2519737B2 (ja) 1987-07-31 1987-07-31 プロ−ブカ−ド

Publications (2)

Publication Number Publication Date
JPS6435382A true JPS6435382A (en) 1989-02-06
JP2519737B2 JP2519737B2 (ja) 1996-07-31

Family

ID=16304220

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62193215A Expired - Lifetime JP2519737B2 (ja) 1987-07-31 1987-07-31 プロ−ブカ−ド

Country Status (1)

Country Link
JP (1) JP2519737B2 (ja)

Cited By (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03209173A (ja) * 1990-01-12 1991-09-12 Organ Needle Co Ltd コンタクトプローブ
JPH03209174A (ja) * 1990-01-12 1991-09-12 Organ Needle Co Ltd コンタクトプローブ
JPH05279184A (ja) * 1992-04-02 1993-10-26 Fuji Electric Co Ltd ダイヤモンド合成方法
JPH06124985A (ja) * 1992-10-13 1994-05-06 Tokyo Electron Yamanashi Kk プローブ装置及びプロービング方法
JPH0649994U (ja) * 1992-11-20 1994-07-08 有限会社テクノプローブ 縦型プローブカード
JPH06253791A (ja) * 1993-03-01 1994-09-13 Urashima:Kk パック詰おでんとその製造方法
JPH06256662A (ja) * 1993-03-01 1994-09-13 Shin Etsu Chem Co Ltd 導電性重合体
JPH077055A (ja) * 1993-06-17 1995-01-10 Nec Corp 探針装置
JPH0729839U (ja) * 1993-11-08 1995-06-02 日本電子材料株式会社 垂直スプリング式プローブカード
JPH0729838U (ja) * 1993-11-08 1995-06-02 日本電子材料株式会社 座屈応力減少機構付垂直動作式プローブカード
US5436571A (en) * 1990-08-20 1995-07-25 Tokyo Electron Limited Probing test method of contacting a plurality of probes of a probe card with pads on a chip on a semiconductor wafer
JPH08285890A (ja) * 1995-04-10 1996-11-01 Tokyo Electron Ltd プローブカード
JPH1194875A (ja) * 1997-09-16 1999-04-09 Japan Electronic Materials Corp プローブ及びそれを用いたプローブカード
JPH11125645A (ja) * 1997-10-21 1999-05-11 Mitsubishi Electric Corp 垂直針型プローブカードおよびその製造方法
JP2001041979A (ja) * 1999-05-26 2001-02-16 Nidec-Read Corp プリント基板検査装置及びそれに用いるプローブ
JP2001249167A (ja) * 2000-03-06 2001-09-14 Tokyo Weld Co Ltd 測定プローブ駆動装置
JP2002090410A (ja) * 2000-09-13 2002-03-27 Nidec-Read Corp 基板検査用検査治具および該検査治具を備えた基板検査装置
US6486689B1 (en) 1999-05-26 2002-11-26 Nidec-Read Corporation Printed circuit board testing apparatus and probe device for use in the same
JP2007127488A (ja) * 2005-11-02 2007-05-24 Rika Denshi Co Ltd プローブカード
JP2010249493A (ja) * 1999-01-12 2010-11-04 Xdx Inc ベーパ圧縮装置及び方法
WO2018021088A1 (ja) * 2016-07-27 2018-02-01 株式会社日本マイクロニクス 電気的接続装置
CN110537100A (zh) * 2017-04-12 2019-12-03 日本麦可罗尼克斯股份有限公司 电连接装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5040550U (ja) * 1973-08-04 1975-04-24
JPS614971A (ja) * 1984-06-15 1986-01-10 インタ−ナシヨナル　ビジネス　マシ−ンズ　コ−ポレ−シヨン 座屈柱プロ−ブ装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5040550U (ja) * 1973-08-04 1975-04-24
JPS614971A (ja) * 1984-06-15 1986-01-10 インタ−ナシヨナル　ビジネス　マシ−ンズ　コ−ポレ−シヨン 座屈柱プロ−ブ装置

Cited By (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03209173A (ja) * 1990-01-12 1991-09-12 Organ Needle Co Ltd コンタクトプローブ
JPH03209174A (ja) * 1990-01-12 1991-09-12 Organ Needle Co Ltd コンタクトプローブ
US5436571A (en) * 1990-08-20 1995-07-25 Tokyo Electron Limited Probing test method of contacting a plurality of probes of a probe card with pads on a chip on a semiconductor wafer
JPH05279184A (ja) * 1992-04-02 1993-10-26 Fuji Electric Co Ltd ダイヤモンド合成方法
JPH06124985A (ja) * 1992-10-13 1994-05-06 Tokyo Electron Yamanashi Kk プローブ装置及びプロービング方法
JPH0649994U (ja) * 1992-11-20 1994-07-08 有限会社テクノプローブ 縦型プローブカード
JPH06253791A (ja) * 1993-03-01 1994-09-13 Urashima:Kk パック詰おでんとその製造方法
JPH06256662A (ja) * 1993-03-01 1994-09-13 Shin Etsu Chem Co Ltd 導電性重合体
JPH077055A (ja) * 1993-06-17 1995-01-10 Nec Corp 探針装置
JPH0729839U (ja) * 1993-11-08 1995-06-02 日本電子材料株式会社 垂直スプリング式プローブカード
JPH0729838U (ja) * 1993-11-08 1995-06-02 日本電子材料株式会社 座屈応力減少機構付垂直動作式プローブカード
JPH08285890A (ja) * 1995-04-10 1996-11-01 Tokyo Electron Ltd プローブカード
JPH1194875A (ja) * 1997-09-16 1999-04-09 Japan Electronic Materials Corp プローブ及びそれを用いたプローブカード
JPH11125645A (ja) * 1997-10-21 1999-05-11 Mitsubishi Electric Corp 垂直針型プローブカードおよびその製造方法
JP2010249493A (ja) * 1999-01-12 2010-11-04 Xdx Inc ベーパ圧縮装置及び方法
JP2001041979A (ja) * 1999-05-26 2001-02-16 Nidec-Read Corp プリント基板検査装置及びそれに用いるプローブ
US6486689B1 (en) 1999-05-26 2002-11-26 Nidec-Read Corporation Printed circuit board testing apparatus and probe device for use in the same
JP2001249167A (ja) * 2000-03-06 2001-09-14 Tokyo Weld Co Ltd 測定プローブ駆動装置
JP2002090410A (ja) * 2000-09-13 2002-03-27 Nidec-Read Corp 基板検査用検査治具および該検査治具を備えた基板検査装置
JP2007127488A (ja) * 2005-11-02 2007-05-24 Rika Denshi Co Ltd プローブカード
WO2018021088A1 (ja) * 2016-07-27 2018-02-01 株式会社日本マイクロニクス 電気的接続装置
JP2018017575A (ja) * 2016-07-27 2018-02-01 株式会社日本マイクロニクス 電気的接続装置
CN109661583A (zh) * 2016-07-27 2019-04-19 日本麦可罗尼克斯股份有限公司 电连接装置
US10901031B2 (en) 2016-07-27 2021-01-26 Kabushiki Kaisha Nihon Micronics Electric connecting apparatus
CN109661583B (zh) * 2016-07-27 2021-08-06 日本麦可罗尼克斯股份有限公司 电连接装置
CN110537100A (zh) * 2017-04-12 2019-12-03 日本麦可罗尼克斯股份有限公司 电连接装置

Also Published As

Publication number Publication date
JP2519737B2 (ja) 1996-07-31

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