JPS6430459U - - Google Patents
Info
- Publication number
- JPS6430459U JPS6430459U JP12452687U JP12452687U JPS6430459U JP S6430459 U JPS6430459 U JP S6430459U JP 12452687 U JP12452687 U JP 12452687U JP 12452687 U JP12452687 U JP 12452687U JP S6430459 U JPS6430459 U JP S6430459U
- Authority
- JP
- Japan
- Prior art keywords
- source
- test object
- value
- measure unit
- unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000012360 testing method Methods 0.000 claims description 10
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000005259 measurement Methods 0.000 claims 3
- 230000002950 deficient Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Description
第１図は本考案に係る半導体試験装置の一実施
例を示す構成図、第２図は従来の半導体試験装置
の一例を示す構成図、第３図はエミツタ・コレク
タ飽和電圧測定回路を示す図である。
ＣＣ……コントローラ、Ｐ……プロセツサ、Ｄ
ＳＰ……表示装置、ＣＵ１……第１のコントロー
ル・ユニツト、ＣＵ２……第２のコントロール・
ユニツト、ＤＵＴ……試験対象物、ＡＤＣ……Ａ
Ｄコンバータ・カード、ＤＣＲ……判別手段、Ｓ
ＭＵ１，２１……ソース・メジヤー・ユニツト。
Fig. 1 is a block diagram showing an embodiment of a semiconductor testing device according to the present invention, Fig. 2 is a block diagram showing an example of a conventional semiconductor testing device, and Fig. 3 is a diagram showing an emitter-collector saturation voltage measuring circuit. It is. CC...Controller, P...Processor, D
SP... Display device, CU1... First control unit, CU2... Second control unit.
Unit, DUT...Test object, ADC...A
D converter card, DCR...Discrimination means, S
MU1, 21...Source measure unit.
Claims (1)
・ユニツトによりソース・メジヤー・ユニツトを
駆動し、試験対象物に定電圧あるいは定電流を与
え、試験対象物からの出力信号を他のソース・メ
ジヤー・ユニツトで測定し、その測定値をデイジ
タル信号に変換した後コントローラに渡して試験
対象物の良否判定などを行う半導体試験装置にお
いて、 前記ソース・メジヤー・ユニツトから出力して
試験対象物に実際に供給している定電圧あるいは
定電流を前記他のソース・メジヤー・ユニツトを
介して測定し、その測定値がソース・メジヤー・
ユニツトから出力しようとしている値と一致しな
い場合は測定条件不良として試験対象物の良否判
定のための測定を中止し、ソース・メジヤー・ユ
ニツトから出力しようとしている値と一致した場
合には試験対象物の良否判定のための測定を実行
させるように制御する機能を有する判別手段を具
備したことを特徴とする半導体試験装置。[Claims for Utility Model Registration] A control unit that operates under the control of a controller drives a source/measure unit, applies a constant voltage or constant current to the test object, and transmits the output signal from the test object to other sources. In semiconductor test equipment that measures with a source/measure unit, converts the measured value into a digital signal, and then passes it to a controller to judge the quality of the test object, etc. The constant voltage or constant current actually supplied to the source/measure unit is measured via the other source/measure unit, and the measured value is
If the value does not match the value that is about to be output from the unit, it is assumed that the measurement conditions are defective and the measurement for determining the quality of the test object is stopped.If it matches the value that is about to be output from the source/measure unit, the test object is terminated. 1. A semiconductor testing device comprising: a determining means having a control function to perform a measurement for determining the quality of a semiconductor device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12452687U JPS6430459U (en) | 1987-08-14 | 1987-08-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12452687U JPS6430459U (en) | 1987-08-14 | 1987-08-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6430459U true JPS6430459U (en) | 1989-02-23 |
Family
ID=31374336
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12452687U Pending JPS6430459U (en) | 1987-08-14 | 1987-08-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6430459U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH045463U (en) * | 1990-04-24 | 1992-01-20 |
-
1987
- 1987-08-14 JP JP12452687U patent/JPS6430459U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH045463U (en) * | 1990-04-24 | 1992-01-20 |
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